XML 106 R92.htm IDEA: XBRL DOCUMENT
v3.8.0.1

Stock-Based Compensation - Additional Information (Detail) - USD ($) |  |  |  | 1 Months Ended | 12 Months Ended
--- | --- | --- | --- | --- | ---
Jun. 01, 2017 | Jan. 31, 2017 | Apr. 29, 2016 | May 31, 2017 | May 31, 2016 | Dec. 31, 2017 | Dec. 31, 2016 | Dec. 31, 2015
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock, shares issued |  |  |  |  |  | 54,355,535 | 53,672,861 |
Common stock reserved for issuance |  |  |  |  |  | 18,000,000 |  |
Vesting period |  |  |  |  |  | 3 years |  |
Number of stock options outstanding |  |  |  |  |  | 0 | 0 |
Tax benefit realized from stock-based plans |  |  |  |  |  |  | $ 1,254,000 | $ 837,000
Capitalization of share based payment costs |  |  |  |  |  | $ 471,000 | $ 471,000 |
Options granted |  |  |  |  |  | 0 | 0 | 0
Total intrinsic value of options exercised |  |  |  |  |  |  |  | $ 494,000
Restricted stock units, weighted average grant date fair value |  |  |  |  |  | $ 13.14 | $ 8.52 | $ 8.16
Employee Stock Option [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Number of stock options outstanding |  |  |  |  |  | 0 | 0 |
Cash received from employees as a result of employee stock option exercises |  |  |  |  |  |  |  | $ 592,000
Tax benefit realized from stock-based plans |  |  |  |  |  |  |  | $ 21,000
Number of stock options exercisable |  |  |  |  |  | 0 | 0 |
Stock Incentive Plan 2014 [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock reserved for issuance |  |  |  |  |  | 14,548,013 |  |
Shares available for future grant |  |  |  |  |  | 18,000,000 |  |
Percentage of exercise price fair value option grant in period |  |  |  |  |  | 100.00% |  |
Number of shares returned for each common stock |  |  |  |  |  | 2.4 |  |
Stock Incentive Plans 2001 and After [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Percentage of exercise price fair value option grant in period |  |  |  |  |  | 100.00% |  |
Stock options granted to employees under plans prior to 2001, vested per quarter thereafter |  |  |  |  |  | 6.25% |  |
Stock options expired |  |  |  |  |  | 10 years |  |
Stock Incentive Plans 2001 and After [Member] | Share-based Compensation Award, Tranche One [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Stock options granted to employees under plans prior to 2001, vested after one year |  |  |  |  |  | 25.00% |  |
1997 Director Plan [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  |  | Options granted to directors generally vested at the earliest of (1) one day prior to the next annual meeting, (2) 13 months from the date of grant, or (3) the effective date of an acquisition. |  |
Number of stock options outstanding |  |  |  |  |  | 0 | 0 |
1997 Director Plan [Member] | Minimum [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Vesting period |  |  |  |  |  | 1 day |  |
1997 Director Plan [Member] | Maximum [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Vesting period |  |  |  |  |  | 13 months |  |
2014 ESPP Plan [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares authorized for issuance |  |  |  |  |  | 2,500,000 |  |
Percentage of payroll deduction to compensation |  |  |  |  |  | Up to 10% |  |
Percentage of Common Stock through payroll deductions |  |  |  |  |  | 10.00% |  |
Amount of payroll deduction | $ 22,500,000 |  |  |  |  | $ 21,250,000 |  |
Amount of payroll deduction increased |  |  |  |  |  | $ 22,500,000 |  |
Percentage of closing price of the Common Stock |  | 90.00% |  |  |  | 85.00% |  |
Common stock, shares issued |  |  |  |  |  | 105,506 | 139,079 | 140,531
Common stock reserved for issuance |  |  |  |  |  | 2,032,403 |  |
2014 ESPP Plan [Member] | Offer Terminate [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Percentage of closing price of the Common Stock |  | 90.00% |  |  |  | 85.00% |  |
2014 ESPP Plan [Member] | Minimum [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  |  | $ 46.37 | $ 31.40 | $ 30.74
2014 ESPP Plan [Member] | Maximum [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  |  | $ 74.12 | $ 35.16 | $ 31.34
Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  |  |  |  | 1,260,525 |  |
Number of RSUs outstanding |  |  |  |  |  | 12,134 | 17,462 |
Dividend reinvestment |  |  |  |  |  | 122 | 187 |
Restricted stock units, weighted average grant date fair value |  |  |  |  |  | $ 67.69 |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  |  | $ 60,302,000 | $ 18,844,000 | $ 12,868,000
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  |  |  |  | $ 20,314,000 |  |
Estimated weighted average amortization period |  |  |  |  |  | 11 months 4 days |  |
Restricted Stock Units (RSUs) [Member] | Share-based Compensation Award, Tranche One [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Stock options granted to employees under plans prior to 2001, vested after one year |  |  |  |  |  | 33.00% | 33.00% | 33.00%
Restricted Stock Units (RSUs) [Member] | Minimum [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Vesting period |  |  |  |  |  | 1 day |  |
Restricted Stock Units (RSUs) [Member] | Maximum [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Vesting period |  |  |  |  |  | 13 months |  |
Restricted Stock Units (RSUs) [Member] | Newport Deferred Compensation [Member] | Outside Directors [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  |  |  |  | 36,599 |  |
Newport RSUs converted to MKS RSUs at Merger date and released |  |  |  | 5,515 | 19,137 |  |  |
RSUs Granted to Employees [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  |  | Employees who are at least 60 years old and have a minimum of 10 Years of Service (as defined in the applicable RSU agreement) are expensed immediately. |  |
Minimum years of service for RSU |  |  |  |  |  | 10 years |  |
RSUs Granted to Directors [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  |  | Earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of a change in control of the Company. |  |
Stock Appreciation Rights (SARs) [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  |  | $ 60,302,000 | $ 18,844,000 | $ 12,868,000
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  |  |  |  | $ 20,314,000 |  |
Estimated weighted average amortization period |  |  |  |  |  | 11 months 4 days |  |
Employee Stock Option [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  |  | $ 60,302,000 | $ 18,844,000 | $ 12,868,000
Newport [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  | 360,674 |  |  |  |  |
Newport [Member] | Stock Appreciation Rights (SARs) [Member] |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  | 899,851 |  |  |  |  |

X
- Definition Common stock exercise price. + References No definition available. + Details
Name: | mksi_CommonStockExercisePrice
Namespace Prefix: | mksi_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | duration

X
- Definition Maximum percentage of payroll for purchase of stock. + References No definition available. + Details
Name: | mksi_MaximumPercentageOfPayrollForPurchaseOfStock
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Number Of Shares Returned For Each Share Of Common Stock + References No definition available. + Details
Name: | mksi_NumberOfSharesReturnedForEachShareOfCommonStock
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Percentage of payroll deduction to compensation. + References No definition available. + Details
Name: | mksi_PercentageOfPayrollDeductionToCompensation
Namespace Prefix: | mksi_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award equity instruments other than options converted to RSU upon merger. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsConvertedToRSUUponMerger
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other than Options Converted To RSU Upon Merger And Released + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsConvertedToRsuUponMergerAndReleased
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other than Options Converted To RSU Upon Merger Remaining To Issue + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsConvertedToRsuUponMergerRemainingToIssue
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award equity instruments other than options dividend reinvestment. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsDividendReinvestment
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share-based compensation arrangement by share-based payment award maximum amount increased per employee. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountIncreasedPerEmployee
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award maximum amount per employee. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Percentage of the balance sheet date at which grantees can acquire the shares reserved for issuance on stock options awarded under the plan during the reporting period. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award vesting percentage maximum per quarter. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPercentageMaximumPerQuarter
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award vesting period description. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription
Namespace Prefix: | mksi_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement minimum period of service. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementMinimumPeriodOfService
Namespace Prefix: | mksi_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Stock exercise price as percentage of closing market price. + References No definition available. + Details
Name: | mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of increase in additional paid in capital (APIC) resulting from a tax benefit associated with share-based compensation plan other than an employee stock ownership plan (ESOP). Includes, but is not limited to, excess tax benefit. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 740 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=79981250&loc=d3e23524-113945 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 505 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.3-04) -URI http://asc.fasb.org/extlink&oid=27012166&loc=d3e187085-122770 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 505 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=84159872&loc=d3e21463-112644 + Details
Name: | us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Number of shares of equity interests issued or issuable to acquire entity. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b)(4) -URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479 + Details
Name: | us-gaap_BusinessAcquisitionEquityInterestsIssuedOrIssuableNumberOfSharesIssued
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Aggregate number of common shares reserved for future issuance. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.29) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 + Details
Name: | us-gaap_CommonStockCapitalSharesReservedForFutureIssuance
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02(29)) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 + Details
Name: | us-gaap_CommonStockSharesIssued
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition The maximum number of shares authorized for issuance under the deferred compensation arrangement as of the balance sheet date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(3) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Represents the compensation cost capitalized during the period arising from equity-based compensation arrangements (for example, shares of stock, units, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1)(ii) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsCapitalizedAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Unrecognized cost of unvested share-based compensation awards. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (i) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Weighted average period over which unrecognized compensation is expected to be recognized for equity-based compensation plans, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (i) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of cash inflow from exercise of stock options granted under share-based compensation arrangement. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 14 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=98514028&loc=d3e3255-108585 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2A -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=96867065&loc=SL79508275-113901 + Details
Name: | us-gaap_ProceedsFromStockOptionsExercised
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Period which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(2)(iii)(1) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
Namespace Prefix: | us-gaap_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | duration

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(iii) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (d)(2) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Net number of share options (or share units) granted during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(iv)(1) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Number of options outstanding, including both vested and non-vested options. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(i)-(ii) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Percentage of vesting of share-based compensation awards. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage
Namespace Prefix: | us-gaap_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(2) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod
Namespace Prefix: | us-gaap_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Fair value of options vested. Excludes equity instruments other than options, for example, but not limited to, share units, stock appreciation rights, restricted stock. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901 + Details
Name: | us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Details
Name: | us-gaap_OptionIndexedToIssuersEquityTypeAxis=us-gaap_EmployeeStockOptionMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_StockIncentivePlanTwoThousandFourteenMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_StockIncentivePlan2001Member
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_VestingAxis=us-gaap_ShareBasedCompensationAwardTrancheOneMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_NineteenNinetySevenDirectorPlanMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_RangeAxis=us-gaap_MinimumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_RangeAxis=us-gaap_MaximumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=mksi_OfferTerminateMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_NewportDeferredCompensationMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_TitleOfIndividualAxis=mksi_OutsideDirectorsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_AwardTypeAxis=mksi_RestrictedStockUnitsGrantedToEmployeesMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_AwardTypeAxis=mksi_RestrictedStockUnitsGrantedToDirectorsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_AwardTypeAxis=us-gaap_StockAppreciationRightsSARSMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_NewportCorporationMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |