Income tax holiday tax rate.

No definition available.

Name:	mksi_IncomeTaxHolidayTaxRate
Namespace Prefix:	mksi_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

- Definition

Income Taxes [Line Items]

+ References

No definition available.

+ Details

Name:	mksi_IncomeTaxesLineItems
Namespace Prefix:	mksi_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Tax credit carry forward expiration year end.

+ References

No definition available.

+ Details

Name:	mksi_TaxCreditCarryForwardExpirationYearEnd
Namespace Prefix:	mksi_
Data Type:	xbrli:gYearItemType
Balance Type:	na
Period Type:	duration

- Definition

A brief description of status of the tax examination, significant findings to date, and the entity's position with respect to the findings.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15
-Subparagraph (d)(2)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32718-109319

+ Details

Name:	us-gaap_IncomeTaxExaminationDescription
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to repatriation of foreign earnings.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 12
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32687-109319

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 13
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32698-109319

+ Details

Name:	us-gaap_IncomeTaxReconciliationRepatriationOfForeignEarnings
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

The increase (decrease) during the reporting period in the account that represents the temporary difference that results from Income or Loss that is recognized for accounting purposes but not for tax purposes and vice versa.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 28
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=98514028&loc=d3e3602-108585

+ Details

Name:	us-gaap_IncreaseDecreaseInDeferredIncomeTaxes
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Tax year that remains open to examination under enacted tax laws, in CCYY format.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15
-Subparagraph (e)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32718-109319

+ Details

Name:	us-gaap_OpenTaxYear
Namespace Prefix:	us-gaap_
Data Type:	xbrli:gYearItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 3
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32559-109319

+ Details

Name:	us-gaap_OperatingLossCarryforwards
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Amount of increase (decrease) to previously recorded tax expense. Includes, but is not limited to, significant settlements of income tax disputes, and unusual tax positions or infrequent actions taken by the entity, including tax assessment reversal, and IRS tax settlement.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 25
-Paragraph 8
-URI http://asc.fasb.org/extlink&oid=96869850&loc=d3e28446-109314

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 25
-Paragraph 10
-URI http://asc.fasb.org/extlink&oid=96869850&loc=d3e28511-109314

+ Details

Name:	us-gaap_TaxAdjustmentsSettlementsAndUnusualProvisions
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.

+ References

+ Details

Name:	us-gaap_TaxCreditCarryforwardAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Amount of undistributed earnings of foreign subsidiaries intended to be permanently reinvested outside the country of domicile.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 944
-SubTopic 740
-Section 50
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=6487024&loc=d3e29054-158556

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 942
-SubTopic 740
-Section 50
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=6479915&loc=d3e66715-112838

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 995
-SubTopic 740
-Section 50
-Paragraph 2
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=6503627&loc=d3e59836-110443

Reference 4: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 25
-Paragraph 3
-Subparagraph (a)(1)
-URI http://asc.fasb.org/extlink&oid=96869850&loc=d3e28200-109314

Reference 5: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 30
-Section 50
-Paragraph 2
-Subparagraph (b)(c)
-URI http://asc.fasb.org/extlink&oid=6424122&loc=d3e41874-109331

+ Details

Name:	us-gaap_UndistributedEarningsOfForeignSubsidiaries
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of unrecognized tax benefits.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15A
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=SL6600010-109319

+ Details

Name:	us-gaap_UnrecognizedTaxBenefits
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount accrued for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32718-109319

+ Details

Name:	us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of increase in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15A
-Subparagraph (a)(1)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=SL6600010-109319

+ Details

Name:	us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15A
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=SL6600010-109319

+ Details

Name:	us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 20
-URI http://asc.fasb.org/extlink&oid=84176650&loc=d3e32123-109318

+ Details

Name:	us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Details

Name:	us-gaap_RangeAxis=us-gaap_MinimumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_RangeAxis=us-gaap_MaximumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_TaxCreditCarryforwardAxis=mksi_IndefiniteMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_IncomeTaxAuthorityAxis=mksi_FederalStateAndForeignMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_TaxCreditCarryforwardAxis=mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_TaxPeriodAxis=us-gaap_EarliestTaxYearMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Income Taxes - Additional Information (Detail) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2017	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Income Taxes [Line Items]
Decrease in deferred tax liabilities	$ 22,345
Gross tax research other tax credit carryforwards	36,496
Gross unrecognized tax benefits excluding interest and penalties	27,345	$ 25,465	$ 4,332	$ 19,610
Net unrecognized tax benefit excluding interest and penalties that would impact effective tax rate	18,276
Net benefit to income tax expense, excluding interest and penalties, due to discrete reserve releases	3,100
Accrued interest on unrecognized tax benefits	327	491	157
Net unrecognized tax benefits, excluding interest and penalties, related to foreign tax positions	$ 1,025
Income tax examination, description	The U.S. statute of limitations remains open for tax years 2014 through present. The statute of limitations for the Company’s tax filings in other jurisdictions varies between fiscal years 2012 through the present. The Company also has certain federal credit carry-forwards and state tax loss and credit carry-forwards that are open to examination for tax years 2000 through the present.
Change in valuation allowance	$ 1,102	$ 6,400	$ (20,636)
Undistributed earnings of foreign subsidiaries	560,000
Tax expense related to repatriation of foreign earnings	$ 27,610
Minimum [Member]
Income Taxes [Line Items]
Income tax holiday tax rate	7.50%
Maximum [Member]
Income Taxes [Line Items]
Income tax holiday tax rate	16.00%
Indefinite [Member]
Income Taxes [Line Items]
Gross tax research other tax credit carryforwards	$ 12,559
Federal State and Foreign [Member]
Income Taxes [Line Items]
Tax credit expiration period	2035
Federal State and Foreign [Member] \| Indefinite [Member]
Income Taxes [Line Items]
Operating loss carry forwards	$ 43,431
Federal State and Foreign [Member] \| 2017 [Member]
Income Taxes [Line Items]
Operating loss carry forwards	$ 37,098
Earliest Tax Year [Member]
Income Taxes [Line Items]
Open tax year	2014