Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Gain (loss) from sale or disposal of an organization or integrated set of activities (for example, but not limited to, a partnership or corporation) engaged in providing a product or service in a commercial, industrial, or professional environment.

+ References

No definition available.

+ Details

Name:	us-gaap_GainLossOnSaleOfBusiness
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash inflow associated with the amount received from the sale of a portion of the company's business, for example a segment, division, branch or other business, during the period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 12
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=98514028&loc=d3e3179-108585

+ Details

Name:	us-gaap_ProceedsFromDivestitureOfBusinesses
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 225
-SubTopic 10
-Section S99
-Paragraph 2
-Subparagraph (SX 210.5-03.1)
-URI http://asc.fasb.org/extlink&oid=63488584&loc=d3e20235-122688

+ Details

Name:	us-gaap_SalesRevenueNet
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Details

Name:	us-gaap_StatementBusinessSegmentsAxis=mksi_DataAnalyticsSolutionsBusinessMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Dispositions - Additional Information (Detail) - USD ($) $ in Thousands	1 Months Ended	3 Months Ended		12 Months Ended
	Apr. 30, 2017	Mar. 31, 2018	Mar. 31, 2017	Dec. 31, 2016
Business Acquisition [Line Items]
Total proceeds from sale of business unit, net of cash sold	$ 72,509
Pre-tax gain	$ 74,856
Net revenues		$ 554,275	$ 437,153
Data Analytics Solutions Business [Member]
Business Acquisition [Line Items]
Net revenues				$ 12,700