<SEC-DOCUMENT>0001193125-18-312378-index.html : 20181030
<SEC-HEADER>0001193125-18-312378.hdr.sgml : 20181030
<ACCEPTANCE-DATETIME>20181030171446
ACCESSION NUMBER:		0001193125-18-312378
CONFORMED SUBMISSION TYPE:	DFAN14A
PUBLIC DOCUMENT COUNT:		4
FILED AS OF DATE:		20181030
DATE AS OF CHANGE:		20181030
EFFECTIVENESS DATE:		20181030

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ELECTRO SCIENTIFIC INDUSTRIES INC
		CENTRAL INDEX KEY:			0000726514
		STANDARD INDUSTRIAL CLASSIFICATION:	MISCELLANEOUS ELECTRICAL MACHINERY, EQUIPMENT & SUPPLIES [3690]
		IRS NUMBER:				930370304
		STATE OF INCORPORATION:			OR
		FISCAL YEAR END:			0328

	FILING VALUES:
		FORM TYPE:		DFAN14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12853
		FILM NUMBER:		181147814

	BUSINESS ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DR
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229
		BUSINESS PHONE:		5036414141

	MAIL ADDRESS:	
		STREET 1:		13900 NW SCIENCE PARK DRIVE
		CITY:			PORTLAND
		STATE:			OR
		ZIP:			97229-5497

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DFAN14A

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>DFAN14A
<SEQUENCE>1
<FILENAME>d644862d8k.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: d644862d8k.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-2.1
<SEQUENCE>2
<FILENAME>d644862dex21.htm
<DESCRIPTION>EX-2.1
<TEXT>
Document 2 - file: d644862dex21.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.1
<SEQUENCE>3
<FILENAME>d644862dex101.htm
<DESCRIPTION>EX-10.1
<TEXT>
Document 3 - file: d644862dex101.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>4
<FILENAME>d644862dex991.htm
<DESCRIPTION>EX-99.1
<TEXT>
Document 4 - file: d644862dex991.htm

</DOCUMENT>
</SEC-DOCUMENT>