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Stock-Based Compensation - Additional Information (Detail) - USD ($) |  |  |  | 1 Months Ended | 12 Months Ended
--- | --- | --- | --- | --- | ---
Jun. 01, 2017 | Jan. 31, 2017 | Apr. 29, 2016 | May 31, 2018 | May 31, 2017 | May 31, 2016 | Dec. 31, 2018 | Dec. 31, 2017 | Dec. 31, 2016
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Common stock, shares issued |  |  |  |  |  |  | 54,039,554 | 54,355,535 |
Common stock reserved for issuance |  |  |  |  |  |  | 18,000,000 |  |
Vesting period |  |  |  |  |  |  | 3 years |  |
Capitalization of share based payment costs |  |  |  |  |  |  | $ 471,000 | $ 471,000 | $ 471,000
Restricted stock units, weighted average grant date fair value |  |  |  |  |  |  | $ 21.74 | $ 13.14 | $ 8.52
2014 ESPP Plan [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Shares authorized for issuance |  |  |  |  |  |  | 2,500,000 |  |
Percentage of payroll deduction to compensation |  |  |  |  |  |  | Up to 10% |  |
Percentage of Common Stock through payroll deductions |  |  |  |  |  |  | 10.00% |  |
Amount of payroll deduction | $ 22,500,000 |  |  |  |  |  | $ 21,250,000 |  |
Amount of payroll deduction increased |  |  |  |  |  |  | $ 22,500,000 |  |
Percentage of closing price of the Common Stock |  | 90.00% |  |  |  |  | 85.00% |  |
Common stock, shares issued |  |  |  |  |  |  | 105,672 | 105,506 | 139,079
Common stock reserved for issuance |  |  |  |  |  |  | 1,926,731 |  |
2014 ESPP Plan [Member] | Offer Terminate [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Percentage of closing price of the Common Stock |  | 90.00% |  |  |  |  | 85.00% |  |
2014 ESPP Plan [Member] | Minimum [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  |  |  | $ 84.11 | $ 46.37 | $ 31.40
2014 ESPP Plan [Member] | Maximum [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  |  |  | $ 70.61 | $ 74.12 | $ 35.16
Stock Incentive Plan 2014 [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Common stock reserved for issuance |  |  |  |  |  |  | 14,079,849 |  |
Shares available for future grant |  |  |  |  |  |  | 18,000,000 |  |
Percentage of exercise price fair value option grant in period |  |  |  |  |  |  | 100.00% |  |
Number of shares returned for each common stock |  |  |  |  |  |  | 2.4 |  |
Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  |  |  |  |  | 1,260,525 |  |
Number of RSUs outstanding |  |  |  |  |  |  | 6,694 | 12,134 | 17,462
Dividend reinvestment |  |  |  |  |  |  | 66 | 122 | 187
Restricted stock units, weighted average grant date fair value |  |  |  |  |  |  | $ 111.64 |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  |  |  | $ 61,626,000 | $ 60,302,000 | $ 18,844,000
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  |  |  |  |  | $ 19,039,000 |  |
Estimated weighted average amortization period |  |  |  |  |  |  | 10 months 28 days |  |
Restricted Stock Units (RSUs) [Member] | Share-based Compensation Award, Tranche One [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Vesting percentage per year of RSUs from date of grant |  |  |  |  |  |  | 33.00% | 33.00% | 33.00%
Restricted Stock Units (RSUs) [Member] | Minimum [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Vesting period |  |  |  |  |  |  | 1 day |  |
Restricted Stock Units (RSUs) [Member] | Maximum [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Vesting period |  |  |  |  |  |  | 13 months |  |
Restricted Stock Units (RSUs) [Member] | Newport Deferred Compensation [Member] | Outside Directors [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  |  |  |  |  | 36,599 |  |
Newport RSUs converted to MKS RSUs at Merger date and released |  |  |  | 5,561 | 5,515 | 19,137 |  |  |
RSUs Granted to Employees [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  |  |  | Employees who are at least 60 years old and have a minimum of 10 Years of Service (as defined in the applicable RSU agreement) are expensed immediately. |  |
Minimum years of service for RSU |  |  |  |  |  |  | 10 years |  |
RSUs Granted to Directors [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  |  |  | Earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of a change in control of the Company. |  |
Stock Appreciation Rights (SARs) [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  |  |  | $ 61,626,000 | $ 60,302,000 | $ 18,844,000
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  |  |  |  |  | $ 19,039,000 |  |
Estimated weighted average amortization period |  |  |  |  |  |  | 10 months 28 days |  |
Newport [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  | 360,674 |  |  |  |  |  |
Newport [Member] | Stock Appreciation Rights (SARs) [Member] |  |  |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  | 899,851 |  |  |  |  |  |

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