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Revenue from Contracts with Customers - Schedule of Deferred Revenue and Customer Advances by Arrangement (Detail) $ in Thousands	9 Months Ended
	Sep. 30, 2019 USD ($)
Change in Contract with Customer, Liability [Line Items]
Beginning balance, January 1	$ 17,474
Additions to deferred revenue and customer advances	41,922
Amount of deferred revenue and customer advances recognized in income	(38,787)
Ending balance, September 30	25,238
Electro Scientific Industries Inc [Member]
Change in Contract with Customer, Liability [Line Items]
Deferred revenue and customer advances assumed	$ 4,629

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- Definition

Change in Contract with Customer, Liability [Line Items]

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Amount of deferred revenue expected to be recognized as such within one year or the normal operating cycle, if longer, assumed at the acquisition date.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 20
-Section 50
-Paragraph 1
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=116869197&loc=d3e4845-128472

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- Definition

Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 45
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=118944033&loc=SL49130531-203044

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
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-Publisher FASB
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Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 50
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