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Stock-Based Compensation - Additional Information (Detail) - USD ($) $ / shares in Units, $ in Thousands |  |  | 1 Months Ended | 12 Months Ended
--- | --- | --- | --- | ---
Jan. 31, 2017 | Apr. 29, 2016 | May 31, 2018 | May 31, 2017 | Dec. 31, 2019 | Dec. 31, 2018 | Dec. 31, 2017
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Common stock reserved for issuance |  |  |  |  | 18,000,000 |  |
Restricted stock units, weighted average grant date fair value |  |  |  |  | $ 16.04 | $ 21.74 | $ 13.14
Capitalization of share based payment costs |  |  |  |  | $ 1,595 | $ 471 | $ 471
Vesting period |  |  |  |  | 3 years |  |
Common Stock, Shares, Issued |  |  |  |  | 54,596,183 | 54,039,554 |
2014 ESPP Plan [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Common stock reserved for issuance |  |  |  |  | 1,800,324 |  |
Shares authorized for issuance |  |  |  |  | 2,500,000 |  |
Percentage of payroll deduction to compensation |  |  |  |  | up to 10% |  |
Percentage of Common Stock through payroll deductions |  |  |  |  | 10.00% |  |
Amount of payroll deduction |  |  |  |  | $ 21,250 |  |
Amount of payroll deduction increased |  |  |  |  | $ 22,500 |  |
Percentage of closing price of the Common Stock |  |  |  |  | 85.00% |  | 90.00%
Common Stock, Shares, Issued |  |  |  |  | 126,407 | 105,672 | 105,506
2014 ESPP Plan [Member] | Offer Terminate [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Percentage of closing price of the Common Stock | 90.00% |  |  |  | 85.00% |  |
2014 ESPP Plan [Member] | Minimum [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  | $ 64.31 | $ 84.11 | $ 46.37
2014 ESPP Plan [Member] | Maximum [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  | $ 63.78 | $ 70.61 | $ 74.12
Stock Incentive Plan 2014 [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Common stock reserved for issuance |  |  |  |  | 13,268,546 |  |
Shares available for future grant |  |  |  |  | 18,000,000 |  |
Percentage of exercise price fair value option grant in period |  |  |  |  | 100.00% |  |
Number of shares returned for each common stock |  |  |  |  | 2.4 |  |
Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  |  |  | 1,260,525 |  |
Restricted stock units, weighted average grant date fair value |  |  |  |  | $ 87.11 |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  | $ 68,123 | $ 61,626 | $ 60,302
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  |  |  | $ 26,137 |  |
Estimated weighted average amortization period |  |  |  |  | 1 year |  |
Dividend reinvestment |  |  |  |  | 57 | 66 | 122
Number of RSUs outstanding |  |  |  |  | 5,794 | 6,694 | 12,134
Vesting percentage per year of RSUs from date of grant |  |  |  |  | 33.00% |  |
Shares available for future grant |  |  |  |  | 18,000,000 |  |
Restricted Stock Units (RSUs) [Member] | Share-based Compensation Award, Tranche One [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Vesting percentage per year of RSUs from date of grant |  |  |  |  | 33.00% | 33.00% | 33.00%
Restricted Stock Units (RSUs) [Member] | Minimum [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Level of performance target achieved |  |  |  |  | 0.00% |  |
Restricted Stock Units (RSUs) [Member] | Maximum [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Level of performance target achieved |  |  |  |  | 150.00% |  |
Restricted Stock Units (RSUs) [Member] | Newport Deferred Compensation [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Dividend reinvestment |  |  |  |  | 3,086 |  |
Number of RSUs outstanding |  |  |  |  | 327,328 |  |
Restricted Stock Units (RSUs) [Member] | Newport Deferred Compensation [Member] | Outside Directors [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  |  |  | 36,599 |  |
Newport RSUs converted to MKS RSUs at Merger date and released |  |  | 5,561 | 5,515 | 967 |  |
Restricted Stock Units (RSUs) [Member] | ESI Plan member [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  |  |  | 748,920 |  |
Restricted Stock Units (RSUs) [Member] | ESI Plan member [Member] | Outside Directors [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  |  |  | 326,283 |  |
Stock Appreciation Rights (SARs) [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  | $ 68,123 | $ 61,626 | $ 60,302
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  |  |  | $ 26,137 |  |
Estimated weighted average amortization period |  |  |  |  | 1 year |  |
RSUs Granted to Employees [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  | employees who meet certain retirement eligibility requirements will vest in full upon each such employee’s retirement and are expensed immediately |  |
RSUs Granted To Directors [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  | RSUs granted to directors generally vest at the earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of a change in control of the Company. |  |
Newport [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Shares issued as per merger agreement |  | 360,674 |  |  |  |  |
Newport [Member] | Restricted Stock Units (RSUs) [Member] | ESI Plan member [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Shares issued as per merger agreement |  | 736,133 |  |  |  |  |
Newport [Member] | Stock Appreciation Rights (SARs) [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Shares issued as per merger agreement |  | 899,851 |  |  |  |  |
Newport [Member] | Stock Appreciation Rights (SARs) [Member] | ESI Plan member [Member] |  |  |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |  |  |
Shares issued as per merger agreement |  | 12,787 |  |  |  |  |

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