EX-21.1 5 d114808dex211.htm EX-21.1

EXHIBIT 21.1

SUBSIDIARIES OF THE REGISTRANT

SUBSIDIARY |  | JURISDICTION OF INCORPORATION
Beijing Newport Spectra-Physics Technologies Co., Ltd. |  | China
Electro Scientific Industries Europe Ltd |  | United Kingdom
Electro Scientific Industries GmbH |  | Germany
Electro Scientific Industries Singapore Pte. Ltd. |  | Singapore
Electro Scientific Industries, Inc. |  | Oregon
Eolite Systems SAS |  | France
ESI China, Inc. |  | Oregon
ESI Electronic Equipment (Shanghai) Co., Ltd. |  | China
ESI International Corporation |  | Oregon
ESI Japan, K.K. |  | Japan
ESI Korea, Inc. |  | Korea
ESI Vietnam Company Limited |  | Vietnam
High Q Laser GmbH |  | Austria
Micro-Controle Spectra-Physics S.A.S. |  | France
MKS Denmark ApS |  | Denmark
MKS German Holding GmbH |  | Germany
MKS Instruments (China) Company Ltd. |  | China
MKS Instruments (Hong Kong) Limited |  | Hong Kong
MKS Instruments (Singapore) Pte. Ltd. |  | Singapore
MKS Instruments Deutschland GmbH |  | Germany
MKS Instruments ESI Switzerland GmbH |  | Switzerland
MKS Instruments Holdings Ltd |  | United Kingdom
MKS Instruments Israel Ltd. |  | Israel
MKS Instruments Italy S.r.l. |  | Italy
MKS Instruments Mexico S. de R.L. de C.V. |  | Mexico
MKS Instruments UK Limited |  | United Kingdom
MKS Spectra Holdings Limited |  | United Kingdom
MKS Japan, Inc. |  | Japan
MKS Korea Ltd. |  | Korea
MKS Taiwan Technology Limited |  | Taiwan
Newport Corporation |  | Nevada
Newport Instruments Canada Corporation |  | Canada
Newport Laser Holding GmbH |  | Austria
Newport Ophir Holdings Ltd. |  | Israel
Newport Opto-Electronics Technologies (Korea), LLC |  | Korea
Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. |  | Singapore
Newport Opto-Electronics Technologies (Wuxi) Company Limited |  | China
Newport Spectra-Physics B.V. |  | Netherlands
Newport Spectra-Physics GmbH |  | Germany
Newport Spectra-Physics Limited |  | United Kingdom
Ophir Japan Ltd. |  | Japan
Ophir Optics S.R.L. |  | Romania
Ophir Optronics GmbH |  | Germany
Ophir Optronics Ltd. |  | Israel
Ophir Optronics Solutions Ltd. |  | Israel
Ophir Spiricon Europe GmbH |  | Germany
Ophir-Spiricon, LLC |  | Utah
Spectra-Physics, K.K. |  | Japan
V-Gen Ltd. |  | Israel