XML 125 R90.htm IDEA: XBRL DOCUMENT
v3.19.3.a.u2

Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) - USD ($) $ in Thousands |  | 12 Months Ended |
--- | --- | --- | ---
Feb. 01, 2019 | Dec. 31, 2019 | Dec. 31, 2018
Finite-Lived Intangible Assets [Line Items] |  |  |
Accumulated Amortization |  | $ 307,982 | $ 244,025
Customer Relationships [Member] |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |
Accumulated Amortization |  | 84,167 | 63,788
Patents, Trademarks, Trade Names and Other [Member] |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |
Accumulated Amortization |  | 45,505 | $ 42,954
Electro Scientific Industries Inc [Member] |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |
Acquired intangible assets, purchase price | $ 316,200 |  |
Accumulated Amortization |  | 316,200 |
Finite lived intangible asset , gross favorable lease |  | 6,428 |
Electro Scientific Industries Inc [Member] | Customer Relationships [Member] |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |
Acquired intangible assets, purchase price | $ 25,400 | 25,400 |
Electro Scientific Industries Inc [Member] | Patents, Trademarks, Trade Names and Other [Member] |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |
Accumulated Amortization |  | 3,445 |
Electro Scientific Industries Inc [Member] | Completed Technology [Member] |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |
Acquired intangible assets, purchase price |  | 274,000 |
Electro Scientific Industries Inc [Member] | Trademarks Tradenames and Backlog [Member] |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |
Acquired intangible assets, purchase price |  | $ 16,800 |

X
- Definition Finite lived intangible asset lease favorable gross. + References No definition available. + Details
Name: | mksi_FiniteLivedIntangibleAssetLeaseFavorableGross
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Accumulated amount of amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 30 -Section 50 -Paragraph 2 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275 + Details
Name: | us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_FiniteLivedIntangibleAssetsLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, from an acquisition. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275 + Details
Name: | us-gaap_FinitelivedIntangibleAssetsAcquired1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Details
Name: | us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=mksi_PatentsTrademarksTradeNamesAndOtherMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_ElectroScientificIndustriesIncMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=mksi_CompletedTechnologyRightsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=mksi_TrademarksTradenamesAndBacklogMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |