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Stock-Based Compensation - Additional Information (Detail) - USD ($) $ / shares in Units, $ in Millions | 3 Months Ended
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Mar. 31, 2020 | Mar. 31, 2019
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Common stock reserved for issuance | 18,000,000 |
Total compensation expense related to unvested stock-based awards granted to employees, officers and directors | $ 27.9 |
Restricted Stock Units (RSUs) [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares issued as per merger agreement | 749,000 |
Restricted stock units, granted | 88,368 | 182,000
Restricted stock units, weighted average grant date fair value | $ 112.24 | $ 82.58
Restricted Stock Units (RSUs) [Member] | ESI Plan member [Member] | Outside Directors [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Newport RSUs converted to MKS RSUs at Merger date | 326,000 |
Stock Appreciation Rights (SARs) [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Restricted stock units, granted | 0 | 0
Newport Corporation | Restricted Stock Units (RSUs) [Member] | ESI Plan member [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares issued as per merger agreement | 736,000 |
Newport Corporation | Stock Appreciation Rights (SARs) [Member] | ESI Plan member [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares issued as per merger agreement | 13,000 |

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- Definition Number of shares of equity interests issued or issuable to acquire entity. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b)(4) -URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479 + Details
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- Definition Aggregate number of common shares reserved for future issuance. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.29) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 + Details
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- Definition Amount of cost not yet recognized for nonvested award under share-based payment arrangement. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (i) -URI http://asc.fasb.org/extlink&oid=116856206&loc=d3e5070-113901 + Details
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- Definition The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan). + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(2)(iii)(1) -URI http://asc.fasb.org/extlink&oid=116856206&loc=d3e5070-113901 + Details
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- Definition The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan). + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(2)(iii)(1) -URI http://asc.fasb.org/extlink&oid=116856206&loc=d3e5070-113901 + Details
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