<SEC-DOCUMENT>0001193125-20-087668-index.html : 20200327
<SEC-HEADER>0001193125-20-087668.hdr.sgml : 20200327
<ACCEPTANCE-DATETIME>20200327080059
ACCESSION NUMBER:		0001193125-20-087668
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		17
CONFORMED PERIOD OF REPORT:	20200512
FILED AS OF DATE:		20200327
DATE AS OF CHANGE:		20200327
EFFECTIVENESS DATE:		20200327

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		20748069

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>d15820ddef14a.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: d15820ddef14a.htm
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>2 <FILENAME>g15820dsp007.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 2 - file: g15820dsp007.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>3 <FILENAME>g15820g01a10.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 3 - file: g15820g01a10.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>4 <FILENAME>g15820g02b20.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 4 - file: g15820g02b20.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>5 <FILENAME>g15820g03c30.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 5 - file: g15820g03c30.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>6 <FILENAME>g15820g04d40.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 6 - file: g15820g04d40.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>7 <FILENAME>g15820g05e50.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 7 - file: g15820g05e50.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>8 <FILENAME>g15820g06f60.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 8 - file: g15820g06f60.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>9 <FILENAME>g15820g07g70.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 9 - file: g15820g07g70.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>10 <FILENAME>g15820g08h80.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 10 - file: g15820g08h80.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>11 <FILENAME>g15820g09m90.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 11 - file: g15820g09m90.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>12 <FILENAME>g15820g10h01.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 12 - file: g15820g10h01.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>13 <FILENAME>g15820g11u11.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 13 - file: g15820g11u11.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>14 <FILENAME>g15820g23m46.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 14 - file: g15820g23m46.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>15 <FILENAME>g15820g25x18.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 15 - file: g15820g25x18.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>16 <FILENAME>g15820g31n98.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 16 - file: g15820g31n98.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>17 <FILENAME>g15820g73o19.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 17 - file: g15820g73o19.jpg
</DOCUMENT> </SEC-DOCUMENT>