EX-21.1 5 mksi-ex211_117.htm EX-21.1

EXHIBIT 21.1

SUBSIDIARIES OF THE REGISTRANT

SUBSIDIARY | JURISDICTION OF INCORPORATION
Beijing Newport Spectra-Physics Technologies Co., Ltd. | China
Electro Scientific Industries Europe Ltd | United Kingdom
Electro Scientific Industries GmbH | Germany
Electro Scientific Industries Singapore Pte. Ltd. | Singapore
Electro Scientific Industries, Inc. | Oregon
Eolite Systems SAS | France
ESI China, Inc. | Oregon
ESI Electronic Equipment (Shanghai) Co., Ltd. | China
ESI International Corporation | Oregon
ESI Japan, K.K. | Japan
ESI Korea, Inc. | Korea
ESI Vietnam Company Limited | Vietnam
High Q Laser GmbH | Austria
Micro-Controle Spectra-Physics S.A.S. | France
MKS Denmark ApS | Denmark
MKS German Holding GmbH | Germany
MKS Instruments (China) Company Ltd. | China
MKS Instruments (Hong Kong) Limited | Hong Kong
MKS Instruments (Singapore) Pte. Ltd. | Singapore
MKS Instruments Deutschland GmbH | Germany
MKS Instruments ESI Switzerland GmbH | Switzerland
MKS Instruments Holdings Ltd | United Kingdom
MKS Instruments Israel Ltd. | Israel
MKS Instruments Italy S.r.l. | Italy
MKS Instruments Mexico S. de R.L. de C.V. | Mexico
MKS Instruments UK Limited | United Kingdom
MKS Spectra Holdings Limited | United Kingdom
MKS Japan, Inc. | Japan
MKS Korea Ltd. | Korea
MKS Taiwan Technology Limited | Taiwan
Newport Corporation | Nevada
Newport Instruments Canada Corporation | Canada
Newport Laser Holding GmbH | Austria
Newport Ophir Holdings Ltd. | Israel
Newport Opto-Electronics Technologies (Korea) LLC | Korea
Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. | Singapore
Newport Opto-Electronics Technologies (Wuxi) Company Limited | China
Newport Spectra-Physics B.V. | Netherlands
Newport Spectra-Physics GmbH | Germany
Newport Spectra-Physics Limited | United Kingdom
Ophir Japan Ltd. | Japan
Ophir Optics S.R.L. | Romania
Ophir Optronics GmbH | Germany
Ophir Optronics Ltd. | Israel
Ophir Optronics Solutions Ltd. | Israel
Ophir Spiricon Europe GmbH | Germany
Ophir-Spiricon, LLC | Utah
Spectra-Physics, K.K. | Japan
V-Gen Ltd. | Israel