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Business Segment, Geographic Area, Product/Service Offerings and Significant Customer Information - Schedule of Net Revenues and Long-Lived Assets by Geographic Regions (Parenthetical) (Detail) | Dec. 31, 2020 Location
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United States [Member] |
Revenues from External Customers and Long-Lived Assets [Line Items] |
Number of locations with increase in right-of-use assets | 3

X
- Definition Number of locations with increase in right-of-use assets. + References No definition available. + Details
Name: | mksi_NumberOfLocationsWithIncreaseInRightOfUseAssets
Namespace Prefix: | mksi_
Data Type: | xbrli:integerItemType
Balance Type: | na
Period Type: | instant

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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Details
Name: | srt_StatementGeographicalAxis=country_US
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |