# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001564590-21-007630
Filing Date
2021-02-23
Accepted
2021-02-23 17:04:32
Documents
158
Period of Report
2020-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | mksi-10k_20201231.htm iXBRL | 10-K | 6624773
2 | EX-10.36 | mksi-ex1036_271.htm | EX-10.36 | 72237
3 | EX-10.37 | mksi-ex1037_269.htm | EX-10.37 | 82680
4 | EX-10.38 | mksi-ex1038_270.htm | EX-10.38 | 88358
5 | EX-21.1 | mksi-ex211_117.htm | EX-21.1 | 29486
6 | EX-23.1 | mksi-ex231_173.htm | EX-23.1 | 2567
7 | EX-31.1 | mksi-ex311_78.htm | EX-31.1 | 16635
8 | EX-31.2 | mksi-ex312_76.htm | EX-31.2 | 16647
9 | EX-32.1 | mksi-ex321_77.htm | EX-32.1 | 10350
10 | GRAPHIC | gnwnkq4kmw4u000001.jpg | GRAPHIC | 169217
| Complete submission text file | 0001564590-21-007630.txt |  | 28618707

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
11 | XBRL TAXONOMY EXTENSION SCHEMA | mksi-20201231.xsd | EX-101.SCH | 137639
12 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | mksi-20201231_cal.xml | EX-101.CAL | 118013
13 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | mksi-20201231_def.xml | EX-101.DEF | 510785
14 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | mksi-20201231_lab.xml | EX-101.LAB | 962849
15 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | mksi-20201231_pre.xml | EX-101.PRE | 832387
16 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-10k_20201231_htm.xml | XML | 7402909

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-23621 | Film No.: 21666629
SIC: 3823 Industrial Instruments For Measurement, Display, and Control