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Acquisition - Schedule of Consolidated Net Revenue and Earnings (Detail) - Electro Scientific Industries Inc [Member] $ / shares in Units, $ in Millions | 12 Months Ended
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Dec. 31, 2019 USD ($) $ / shares
Acquisition Date [Line Items] |
Total net revenues | $ | $ 183.7
Net loss | $ | $ (33.5)
Net loss per share: |
Basic | $ / shares | $ (0.61)
Diluted | $ / shares | $ (0.61)

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- Definition Acquisition Date [Line Items] + References No definition available. + Details
Name: | mksi_AcquisitionDateLineItems
Namespace Prefix: | mksi_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Business acquisition earnings per share. + References No definition available. + Details
Name: | mksi_BusinessAcquisitionEarningsPerShareAbstract
Namespace Prefix: | mksi_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Business acquisition earnings per share basic. + References No definition available. + Details
Name: | mksi_BusinessAcquisitionEarningsPerShareBasic
Namespace Prefix: | mksi_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | duration

X
- Definition Business acquisition earnings per share diluted. + References No definition available. + Details
Name: | mksi_BusinessAcquisitionEarningsPerShareDiluted
Namespace Prefix: | mksi_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | duration

X
- Definition This element represents the amount of earnings or loss of the acquiree since the acquisition date included in the consolidated income statement for the reporting period. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1) -URI http://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463 + Details
Name: | us-gaap_BusinessCombinationProFormaInformationEarningsOrLossOfAcquireeSinceAcquisitionDateActual
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition This element represents the amount of revenue of the acquiree since the acquisition date included in the consolidated income statement for the reporting period. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1) -URI http://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463 + Details
Name: | us-gaap_BusinessCombinationProFormaInformationRevenueOfAcquireeSinceAcquisitionDateActual
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_ElectroScientificIndustriesIncMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |