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Subsequent Event - Additional Information (Detail) - Subsequent Event [Member] - Coherent, Inc. [Member] $ in Millions | Feb. 04, 2021 USD ($) shares
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Subsequent Event [Line Items] |
Date of acquisition agreement | Feb. 04, 2021
Price per share of common stock in cash | $ | $ 115
Number of share received per common stock | shares | 7,473

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- Definition Business combination, price per share of common stock in cash. + References No definition available. + Details
Name: | mksi_BusinessCombinationPricePerShareOfCommonStockInCash
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

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- Definition Business combination share received per common stock. + References No definition available. + Details
Name: | mksi_BusinessCombinationShareReceivedPerCommonStock
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

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- Definition Date when the business acquisition agreement was executed, in CCYY-MM-DD format. + References No definition available. + Details
Name: | us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:dateItemType
Balance Type: | na
Period Type: | duration

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- Definition Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event. + References No definition available. + Details
Name: | us-gaap_SubsequentEventLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Details
Name: | us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

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- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_CoherentIncMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |