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Stock-Based Compensation - Additional Information (Detail) - USD ($) $ / shares in Units, $ in Millions |  | 1 Months Ended | 12 Months Ended
--- | --- | --- | ---
Apr. 29, 2016 | May 31, 2020 | Jan. 31, 2020 | May 31, 2019 | May 31, 2018 | Dec. 31, 2020 | Dec. 31, 2019 | Dec. 31, 2018
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock, shares issued |  |  |  |  |  | 55,196,501 | 54,596,183 |
Common stock reserved for issuance |  |  |  |  |  | 18,000,000 |  |
Weighted Average Grant Date Fair Value, Granted |  |  |  |  |  | $ 23.88 | $ 16.04 | $ 21.74
Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares available for future grant |  |  |  |  |  | 18,000,000 |  |
Shares issued as per merger agreement |  |  |  |  |  | 1,260,525 |  |
Number of RSUs outstanding |  |  |  |  |  | 4,875 | 5,794 |
Dividend reinvestment |  |  |  |  |  | 35 | 57 |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  |  |  |  | $ 86.2 | $ 68.1 | $ 61.6
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  |  |  |  | $ 31.5 |  |
Estimated weighted average amortization period |  |  |  |  |  | 1 year |  |
Restricted Stock Units (RSUs) [Member] | Newport Corporation |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  |  |  |  | 360,674 |  |
Restricted Stock Units (RSUs) [Member] | Share-based Compensation Award, Tranche One [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Vesting percentage per year of RSUs from date of grant |  |  |  |  |  | 33.00% | 33.00% | 33.00%
RSUs Granted to Employees [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  |  | employees who meet certain retirement eligibility requirements will vest in full upon each such employee’s retirement and are expensed immediately. |  |
RSUs Granted To Directors [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  |  |  |  | directors generally vest at the earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of a change in control of the Company. |  |
Stock Appreciation Rights (SARs) [Member] | Newport Corporation |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  |  |  |  | 899,851 |  |
2014 ESPP [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares authorized for issuance |  |  |  |  |  | 2,500,000 |  |
Percentage of payroll deduction to compensation |  |  |  |  |  | up to 10% |  |
Percentage of Common Stock through payroll deductions |  |  |  |  |  | 10.00% |  |
Percentage of closing price of the Common Stock |  |  |  |  |  | 90.00% |  |
Common stock, shares issued |  |  |  |  |  | 102,719 | 126,407 | 105,672
Common stock reserved for issuance |  |  |  |  |  | 1,697,604 |  |
2014 ESPP [Member] | Offer Terminate [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Percentage of closing price of the Common Stock |  |  |  |  |  | 90.00% |  |
Stock Incentive Plan 2014 [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock reserved for issuance |  |  |  |  |  | 12,690,974 |  |
Shares available for future grant |  |  |  |  |  | 18,000,000 |  |
Number of shares returned for each common stock |  |  |  |  |  | 2.4 |  |
Percentage of exercise price fair value option grant in period |  |  |  |  |  | 100.00% |  |
Stock Incentive Plan 2014 [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Weighted Average Grant Date Fair Value, Granted |  |  |  |  |  | $ 98.72 |  |
Newport Deferred Compensation [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Number of RSUs outstanding |  |  |  |  |  | 31,458 | 327,328 |
Dividend reinvestment |  |  |  |  |  | 203 | 3,086 |
Newport Deferred Compensation [Member] | Restricted Stock Units (RSUs) [Member] | Outside Directors [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  |  |  |  | 36,599 |  |
Newport RSUs converted to MKS RSUs at Merger date and released |  | 976 |  | 967 | 5,561 |  |  |
Esi Planmember | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement |  |  |  |  |  | 748,920 |  |
Esi Planmember | Restricted Stock Units (RSUs) [Member] | Outside Directors [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  |  |  |  | 326,283 |  |
Newport RSUs converted to MKS RSUs at Merger date and released |  |  | 300,654 |  |  |  |  |
Esi Planmember | Restricted Stock Units (RSUs) [Member] | Newport Corporation |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement | 736,133 |  |  |  |  |  |  |
Esi Planmember | Stock Appreciation Rights (SARs) [Member] | Newport Corporation |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Shares issued as per merger agreement | 12,787 |  |  |  |  |  |  |
Minimum [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Level of performance target achieved |  |  |  |  |  | 0.00% |  |
Minimum [Member] | 2014 ESPP [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  |  | $ 95.07 | $ 64.31 | $ 84.11
Maximum [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Level of performance target achieved |  |  |  |  |  | 150.00% |  |
Maximum [Member] | 2014 ESPP [Member] |  |  |  |  |  |  |  |
Share Based Compensation Arrangement By Share Based Payment Award [Line Items] |  |  |  |  |  |  |  |
Common stock, exercise price |  |  |  |  |  | $ 93.77 | $ 63.78 | $ 70.61

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