# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-023317
Filing Date
2021-05-04
Accepted
2021-05-04 16:03:28
Documents
107
Period of Report
2021-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | mksi-10q_20210331.htm iXBRL | 10-Q | 3405145
2 | EX-31.1 | mksi-ex311_279.htm | EX-31.1 | 20037
3 | EX-31.2 | mksi-ex312_280.htm | EX-31.2 | 20277
4 | EX-32.1 | mksi-ex321_281.htm | EX-32.1 | 11114
| Complete submission text file | 0001564590-21-023317.txt |  | 15687412

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
5 | XBRL TAXONOMY EXTENSION SCHEMA | mksi-20210331.xsd | EX-101.SCH | 79293
6 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | mksi-20210331_cal.xml | EX-101.CAL | 74414
7 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | mksi-20210331_def.xml | EX-101.DEF | 290116
8 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | mksi-20210331_lab.xml | EX-101.LAB | 558891
9 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | mksi-20210331_pre.xml | EX-101.PRE | 490371
10 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-10q_20210331_htm.xml | XML | 4222959

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 21888324
SIC: 3823 Industrial Instruments For Measurement, Display, and Control