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Debt - Senior Secured Term Loan Credit Facility - Additional Information (Detail) - USD ($) $ in Millions |  |  | 3 Months Ended | 12 Months Ended |
--- | --- | --- | --- | --- | ---
Sep. 27, 2019 | Feb. 01, 2019 | Mar. 31, 2021 | Dec. 31, 2020 | Dec. 31, 2019
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, prepaid principal amount |  |  | $ 575.0 |  |
2016 Term Loan Facility [Member] | Repricing Amendment [Member] | LIBOR [Member] | Maximum [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 4.00% |  |
2016 Term Loan Facility [Member] | Repricing Amendment [Member] | LIBOR [Member] | Minimum [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 1.75% |  |
2016 Term Loan Facility [Member] | Repricing Amendment [Member] | LIBOR Floor Rate [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 0.75% |  |
2016 Term Loan Facility [Member] | Incremental Term Loan Facility [Member] | LIBOR [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 2.00% | 1.75% |
LIBOR floor rate |  |  | 1.00% | 0.75% |
Newport Corporation [Member] | Secured Debt [Member] | Floor Rate [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 0.00% |  |
Newport Corporation [Member] | Secured Debt [Member] | Base Rate [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 0.75% |  |
Newport Corporation [Member] | 2016 Term Loan Facility [Member] | Secured Debt [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Secured term loan, face amount |  |  | $ 780.0 |  |
Term loan maturity date |  |  | Apr. 29, 2023 |  |
Debt instrument, interest rate terms |  |  | borrowings under the Term Loan Facility​​​​​​​ bear interest per annum at one of the following rates selected by the Company: (a) a base rate determined by reference to the highest of (1) the federal funds effective rate plus 0.50%, (2) the “prime rate” quoted in The Wall Street Journal, (3) a LIBOR rate determined by reference to the costs of funds for U.S. dollar deposits for an interest period of one month adjusted for certain additional costs, plus 1.00%, and (4) a floor of 1.75%, plus, in each case, an applicable margin; or (b) a LIBOR rate determined by reference to the costs of funds for U.S. dollar deposits for the interest period relevant to such borrowing adjusted for certain additional costs, subject to a LIBOR rate floor of 0.0%, plus an applicable margin. The Company has elected the interest rate as described in clause (b) of the foregoing sentence. The Term Loan Credit Agreement provides that, unless an alternate rate of interest is agreed, all loans will be determined by reference to the base rate if the LIBOR rate cannot be ascertained, if regulators impose material restrictions on the authority of a lender to make LIBOR rate loans, or for other reasons. The 2016 Term Loan Facility was issued with original issue discount of 1.00​​​​​​​% of the principal amount thereof. |  |
Debt instrument, interest rate |  |  | 0.00% |  |
Debt instrument, issue discount percentage on principal |  |  | 1.00% |  |
Deferred finance fees, original issue discount and re-pricing fee, gross |  |  | $ 28.7 |  |
Newport Corporation [Member] | 2016 Term Loan Facility [Member] | Secured Debt [Member] | Federal Funds Rate [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 0.50% |  |
Newport Corporation [Member] | 2016 Term Loan Facility [Member] | Secured Debt [Member] | Adjusted One Month LIBOR [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 1.00% |  |
Newport Corporation [Member] | 2016 Term Loan Facility [Member] | Secured Debt [Member] | Floor Rate [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 1.75% |  |
Newport Corporation [Member] | 2016 Term Loan Facility [Member] | Incremental Term Loan Facility [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Deferred finance fees, original issue discount and re-pricing fee, gross |  |  | $ 11.4 |  |
Newport Corporation [Member] | Incremental Term Loan Facility [Member] | Secured Debt [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate terms |  |  | The 2019 Term Loan Refinancing Facility matures on February 2, 2026, and bears interest at a rate per annum equal to, at the Company’s option, a base rate or LIBOR rate (as described above) plus, in each case, an applicable margin equal to 0.75% with respect to base rate borrowings and 1.75% with respect to LIBOR borrowings. The 2019 Term Loan Refinancing Facility was issued with original issue discount of 0.25% of the principal amount thereof. |  |
Debt instrument, prepaid principal amount | $ 50.0 |  |  |  |
Newport Corporation [Member] | Incremental Term Loan Facility [Member] | Secured Debt Repricing Amendment 1 [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Secured term loan, face amount |  |  | $ 831.1 |  |
Term loan maturity date |  |  | Feb. 02, 2026 |  |
Debt instrument, interest rate |  |  | 1.90% |  |
Debt instrument, prepaid principal amount |  |  | $ 23.9 |  |
Debt instrument, frequency of periodic payment |  |  | quarterly |  |
Debt instrument, periodic payment percentage |  |  | 0.25% |  |
Newport Corporation [Member] | 2019 Term Loan Refinancing Facility [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Deferred finance fees, original issue discount and re-pricing fee, gross |  |  | $ 8.9 |  | $ 2.2
Newport Corporation [Member] | 2019 Term Loan Refinancing Facility [Member] | LIBOR [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  |  | 1.75% |  |
Newport Corporation [Member] | 2019 Term Loan Refinancing Facility [Member] | Secured Debt [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Secured term loan, face amount | $ 896.8 |  |  |  |
Term loan maturity date |  |  | Feb. 02, 2026 |  |
Debt instrument, issue discount percentage on principal |  |  | 0.25% |  |
Electro Scientific Industries Inc [Member] | Incremental Term Loan Facility [Member] | Definitive Merger Agreement [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Term loan maturity date |  | Feb. 01, 2026 |  |  |
Debt instrument, interest rate terms |  | Prior to the effectiveness of Amendment No. 6 (as defined below), the 2019 Incremental Term Loan Facility had a maturity date of February 1, 2026 and bore interest at a rate per annum equal to, at the Company’s option, a base rate or LIBOR rate (as described above) plus, in each case, an applicable margin equal to 1.25% with respect to base rate borrowings and 2.25% with respect to LIBOR borrowings. |  |  |
Debt instrument, issue discount percentage on principal |  | 1.00% |  |  |
Electro Scientific Industries Inc [Member] | Incremental Term Loan Facility [Member] | Maximum [Member] | Definitive Merger Agreement [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Business acquisition, term loan debt financing |  | $ 650.0 |  |  |
Electro Scientific Industries Inc [Member] | Incremental Term Loan Facility [Member] | LIBOR [Member] | Definitive Merger Agreement [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  | 2.25% |  |  |
Electro Scientific Industries Inc [Member] | Incremental Term Loan Facility [Member] | Base Rate [Member] | Definitive Merger Agreement [Member] |  |  |  |  |
Debt Instrument [Line Items] |  |  |  |  |
Debt instrument, interest rate |  | 1.25% |  |  |

X
- Definition Debt instrument issue discount percentage on principal. + References No definition available. + Details
Name: | mksi_DebtInstrumentIssueDiscountPercentageOnPrincipal
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Debt Instrument Outstanding Balance Repaid + References No definition available. + Details
Name: | mksi_DebtInstrumentOutstandingBalanceRepaid
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Debt instrument, periodic payment percentage. + References No definition available. + Details
Name: | mksi_DebtInstrumentPeriodicPaymentPercentage
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | instant

X
- Definition LIBOR floor rate. + References No definition available. + Details
Name: | mksi_LiborFloorRate
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | instant

X
- Definition Amount of liabilities incurred by the acquirer as part of consideration transferred in a business combination. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 7 -URI http://asc.fasb.org/extlink&oid=116859721&loc=d3e6578-128477 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 25 -Paragraph 5 -URI http://asc.fasb.org/extlink&oid=6911189&loc=d3e6405-128476 Reference 3: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b)(3) -URI http://asc.fasb.org/extlink&oid=120321790&loc=d3e6927-128479 Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 8 -URI http://asc.fasb.org/extlink&oid=116859721&loc=d3e6613-128477 + Details
Name: | us-gaap_BusinessCombinationConsiderationTransferredLiabilitiesIncurred
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Percentage points added to the reference rate to compute the variable rate on the debt instrument. + References No definition available. + Details
Name: | us-gaap_DebtInstrumentBasisSpreadOnVariableRate1
Namespace Prefix: | us-gaap_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Face (par) amount of debt instrument at time of issuance. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 835 -SubTopic 30 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=119993939&loc=d3e28551-108399 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 835 -SubTopic 30 -Section 55 -Paragraph 8 -URI http://asc.fasb.org/extlink&oid=114775985&loc=d3e28878-108400 + Details
Name: | us-gaap_DebtInstrumentFaceAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Description of the frequency of periodic payments (monthly, quarterly, annual). + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.22) -URI http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 942 -SubTopic 470 -Section 50 -Paragraph 3 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=75038535&loc=d3e64711-112823 + Details
Name: | us-gaap_DebtInstrumentFrequencyOfPeriodicPayment
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Description of the interest rate as being fixed or variable, and, if variable, identification of the index or rate on which the interest rate is based and the number of points or percentage added to that index or rate to set the rate, and other pertinent information, such as frequency of rate resets. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.22(a)(1)) -URI http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682 + Details
Name: | us-gaap_DebtInstrumentInterestRateTerms
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_DebtInstrumentLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of the required periodic payments applied to principal. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.22) -URI http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682 + Details
Name: | us-gaap_DebtInstrumentPeriodicPaymentPrincipal
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Amount, before accumulated amortization, of debt issuance costs. Includes, but is not limited to, legal, accounting, underwriting, printing, and registration costs. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 835 -SubTopic 30 -Section 45 -Paragraph 3 -URI http://asc.fasb.org/extlink&oid=119993939&loc=d3e28555-108399 + Details
Name: | us-gaap_DeferredFinanceCostsGross
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Maturity date of long-term debt, in CCYY-MM-DD format. + References Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (bbb)(2) -URI http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258 + Details
Name: | us-gaap_LongTermDebtMaturityDate
Namespace Prefix: | us-gaap_
Data Type: | xbrli:dateItemType
Balance Type: | na
Period Type: | instant

X
- Details
Name: | us-gaap_DebtInstrumentAxis=mksi_TermLoanCreditAgreementMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_CreditFacilityAxis=mksi_RepricingAmendmentMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_VariableRateAxis=us-gaap_LondonInterbankOfferedRateLIBORMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | srt_RangeAxis=srt_MaximumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | srt_RangeAxis=srt_MinimumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_VariableRateAxis=mksi_LiborFloorRateMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_CreditFacilityAxis=mksi_IncrementalTermLoanFacilityMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_NewportCorporationMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_CreditFacilityAxis=us-gaap_SecuredDebtMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_VariableRateAxis=us-gaap_InterestRateFloorMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_VariableRateAxis=us-gaap_BaseRateMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_VariableRateAxis=mksi_FederalFundsRateMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_VariableRateAxis=mksi_AdjustedOneMonthLiborMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_DebtInstrumentAxis=mksi_IncrementalTermLoanFacilityMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_CreditFacilityAxis=mksi_SecuredDebtRepricingAmendmentOneMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_DebtInstrumentAxis=mksi_TwoThousandNineteenTermLoanRefinancingFacilityMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_ElectroScientificIndustriesIncMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_TypeOfArrangementAxis=mksi_DefinitiveMergerAgreementMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |