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Revenue from Contracts with Customers - Schedule of Deferred Revenue and Customer Advances by Arrangement (Detail) - USD ($) $ in Millions	3 Months Ended
	Mar. 31, 2021	Mar. 31, 2020
Change In Contract With Customer Liability [Abstract]
Beginning balance, January 1	$ 36.7	$ 24.8
Additions to deferred revenue and customer advances	25.5	17.7
Amount of deferred revenue and customer advances recognized in income	(22.3)	(17.1)
Ending balance, March 31	$ 39.9	$ 25.4

X

- Definition

Contract with customer amount of deferred revenue and customer advances recognized

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

X

- Definition

Contract with customer liability additions.

+ References

No definition available.

+ Details

Name:	mksi_ContractWithCustomerLiabilityAdditions
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

X

- References

No definition available.

+ Details

Name:	us-gaap_ChangeInContractWithCustomerLiabilityAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 45
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=121556615&loc=SL49130531-203044

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=121604090&loc=SL49130549-203045

Reference 3: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 45
-Paragraph 2
-URI http://asc.fasb.org/extlink&oid=121556615&loc=SL49130532-203044

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant