# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-041287
Filing Date
2021-08-05
Accepted
2021-08-05 11:07:54
Documents
107
Period of Report
2021-06-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | mksi-10q_20210630.htm iXBRL | 10-Q | 4316360
2 | EX-31.1 | mksi-ex311_7.htm | EX-31.1 | 19524
3 | EX-31.2 | mksi-ex312_8.htm | EX-31.2 | 19552
4 | EX-32.1 | mksi-ex321_6.htm | EX-32.1 | 11115
| Complete submission text file | 0001564590-21-041287.txt |  | 18084119

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
5 | XBRL TAXONOMY EXTENSION SCHEMA | mksi-20210630.xsd | EX-101.SCH | 80232
6 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | mksi-20210630_cal.xml | EX-101.CAL | 74976
7 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | mksi-20210630_def.xml | EX-101.DEF | 290311
8 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | mksi-20210630_lab.xml | EX-101.LAB | 567899
9 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | mksi-20210630_pre.xml | EX-101.PRE | 488014
10 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-10q_20210630_htm.xml | XML | 4989457

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 211146975
SIC: 3823 Industrial Instruments For Measurement, Display, and Control