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Revenue from Contracts with Customers - Schedule of Deferred Revenue and Customer Advances by Arrangement (Detail) - USD ($) $ in Millions | 9 Months Ended
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Sep. 30, 2021 | Sep. 30, 2020
Change In Contract With Customer Liability [Abstract] |  |
Beginning balance, January 1 | $ 36.7 | $ 24.8
Additions to deferred revenue and customer advances | 68.1 | 76.3
Amount of deferred revenue and customer advances recognized in income | (63.7) | (65.6)
Ending balance, September 30 | $ 41.1 | $ 35.5

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- Definition Contract with customer amount of deferred revenue and customer advances recognized + References No definition available. + Details
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Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- Definition Contract with customer liability additions. + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- References No definition available. + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
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- Definition Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 606 -SubTopic 10 -Section 45 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=123360276&loc=SL49130531-203044 Reference 2: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 606 -SubTopic 10 -Section 50 -Paragraph 8 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=123351226&loc=SL49130549-203045 Reference 3: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 606 -SubTopic 10 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=123360276&loc=SL49130532-203044 + Details
Name: | us-gaap_ContractWithCustomerLiability
Namespace Prefix: | us-gaap_
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Balance Type: | credit
Period Type: | instant