XML 96 R86.htm IDEA: XBRL DOCUMENT
v3.21.2

Acquisition - Summary of Purchase Price (Parenthetical) (Detail) - Photon Control Inc [Member] shares in Millions | Jul. 15, 2021 $ / shares shares
--- | ---
Business Acquisition [Line Items] |
Price per share of common stock | $ / shares | $ 3.60
Number of shares received per common shares | shares | 105.2

X
- Definition Business combination share received per common stock. + References No definition available. + Details
Name: | mksi_BusinessCombinationShareReceivedPerCommonStock
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_BusinessAcquisitionLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Price of a single share of a number of saleable stocks paid or offered to be paid in a business combination. + References No definition available. + Details
Name: | us-gaap_BusinessAcquisitionSharePrice
Namespace Prefix: | us-gaap_
Data Type: | dtr-types:perShareItemType
Balance Type: | na
Period Type: | instant

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_PhotonControlIncMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |