XML 136 R123.htm IDEA: XBRL DOCUMENT
v3.22.0.1

Schedule II - Valuation and Qualifying Accounts (Detail) - USD ($) $ in Millions | 12 Months Ended
--- | ---
Dec. 31, 2021 | Dec. 31, 2020 | Dec. 31, 2019
Valuation Allowance for Doubtful Accounts [Member] |  |  |
Valuation and Qualifying Accounts Disclosure [Line Items] |  |  |
Balance at Beginning of Year | $ 2.0 | $ 1.8 | $ 5.2
Additions Acquisition Beginning Balance |  |  | 0.2
Additions Charged to Costs and Expenses | 1.3 | 0.1 | (0.7)
Deductions & Write-offs | 0.3 | 0.1 | (2.9)
Balance at End of Year | 3.6 | 2.0 | 1.8
Valuation Allowance for Sales Returns [Member] |  |  |
Valuation and Qualifying Accounts Disclosure [Line Items] |  |  |
Balance at Beginning of Year | 1.8 | 1.4 | 1.0
Additions Charged to Costs and Expenses | (0.1) | 0.3 | 0.2
Deductions & Write-offs | (0.1) | 0.1 | 0.2
Balance at End of Year | 1.6 | 1.8 | 1.4
Valuation Allowance on Deferred Tax Asset [Member] |  |  |
Valuation and Qualifying Accounts Disclosure [Line Items] |  |  |
Balance at Beginning of Year | 30.6 | 27.4 | 17.9
Additions Acquisition Beginning Balance |  |  | 5.9
Additions Charged to Costs and Expenses | 2.3 | 4.2 | 4.9
Deductions & Write-offs | (6.7) | (1.0) | (1.3)
Balance at End of Year | $ 26.2 | $ 30.6 | $ 27.4

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | srt_ValuationAndQualifyingAccountsDisclosureLineItems
Namespace Prefix: | srt_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of valuation and qualifying accounts and reserves. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column B)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 Reference 2: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column E)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 + Details
Name: | us-gaap_ValuationAllowancesAndReservesBalance
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Amount of increase in valuation and qualifying accounts and reserves from charge to cost and expense. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column C)(1)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 + Details
Name: | us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Amount of decrease in valuation and qualifying accounts and reserves. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column D)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 + Details
Name: | us-gaap_ValuationAllowancesAndReservesDeductions
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Amount of increase in valuation and qualifying accounts and reserves from business combination. + References Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column C)(2)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 + Details
Name: | us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Details
Name: | us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_AllowanceForCreditLossMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_ValuationAllowancesAndReservesTypeAxis=mksi_AllowanceForSalesReturnMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |