XML 66 R53.htm IDEA: XBRL DOCUMENT
v3.22.0.1

Acquisition - Summary of Purchase Price (Detail) - USD ($) $ in Millions |  |  | 12 Months Ended
--- | --- | --- | ---
Jul. 15, 2021 | Feb. 01, 2019 | Dec. 31, 2021 | Dec. 31, 2019
Business Acquisition [Line Items] |  |  |  |
Total purchase price, net of cash and cash equivalents acquired |  |  | $ 268.4 | $ 988.6
Photon Control Inc [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Cash paid for outstanding shares | $ 302.7 |  |  |
Less: Cash and cash equivalents acquired | (34.3) |  |  |
Total purchase price, net of cash and cash equivalents acquired | $ 268.4 |  |  |
Electro Scientific Industries Inc [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Cash paid for outstanding shares |  | $ 1,032.7 |  |
Settlement of share-based compensation awards |  | 30.6 |  |
Total purchase price |  | 1,063.3 |  |
Less: Cash and cash equivalents acquired |  | (44.1) |  |
Total purchase price, net of cash and cash equivalents acquired |  | $ 1,019.2 |  |

X
- Definition Business combination cash paid for outstanding shares. + References No definition available. + Details
Name: | mksi_BusinessCombinationCashPaidForOutstandingShares
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Business combination cash paid in settlement of share based compensation awards. + References No definition available. + Details
Name: | mksi_BusinessCombinationCashPaidInSettlementOfShareBasedCompensationAwards
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_BusinessAcquisitionLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 8 -URI http://asc.fasb.org/extlink&oid=116859721&loc=d3e6613-128477 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=120321790&loc=d3e6927-128479 Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 7 -URI http://asc.fasb.org/extlink&oid=116859721&loc=d3e6578-128477 + Details
Name: | us-gaap_BusinessCombinationConsiderationTransferred1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition The cash inflow associated with the acquisition of business during the period (for example, cash that was held by the acquired business). + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 12 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=123570139&loc=d3e3179-108585 + Details
Name: | us-gaap_CashAcquiredFromAcquisition
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=123570139&loc=d3e3213-108585 + Details
Name: | us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_PhotonControlIncMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_ElectroScientificIndustriesIncMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |