# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001564590-22-007637
Filing Date
2022-02-28
Accepted
2022-02-28 16:28:05
Documents
143
Period of Report
2021-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | mksi-10k_20211231.htm iXBRL | 10-K | 6229198
2 | EX-2.2 | mksi-ex22_527.htm | EX-2.2 | 91972
3 | EX-21.1 | mksi-ex211_9.htm | EX-21.1 | 29827
4 | EX-23.1 | mksi-ex231_12.htm | EX-23.1 | 2565
5 | EX-31.1 | mksi-ex311_7.htm | EX-31.1 | 16633
6 | EX-31.2 | mksi-ex312_11.htm | EX-31.2 | 16647
7 | EX-32.1 | mksi-ex321_13.htm | EX-32.1 | 10350
8 | GRAPHIC | gmewoofkpnyl000001.jpg | GRAPHIC | 520377
| Complete submission text file | 0001564590-22-007637.txt |  | 27227581

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
9 | XBRL TAXONOMY EXTENSION SCHEMA | mksi-20211231.xsd | EX-101.SCH | 125836
10 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | mksi-20211231_cal.xml | EX-101.CAL | 123204
11 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | mksi-20211231_def.xml | EX-101.DEF | 459613
12 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | mksi-20211231_lab.xml | EX-101.LAB | 883949
13 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | mksi-20211231_pre.xml | EX-101.PRE | 761243
137 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-10k_20211231_htm.xml | XML | 6778365

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-23621 | Film No.: 22690120
SIC: 3823 Industrial Instruments For Measurement, Display, and Control