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Revenue from Contracts with Customers - Schedule of Deferred Revenue and Customer Advances by Arrangement (Detail) - USD ($) $ in Millions | 12 Months Ended
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Dec. 31, 2021 | Dec. 31, 2020
Change In Contract With Customer Liability [Abstract] |  |
Beginning balance, January 1 | $ 36.7 | $ 24.8
Additions to deferred revenue and customer advances | 172.5 | 107.4
Amount of deferred revenue and customer advances recognized in income | (168.9) | (95.5)
Ending balance, December 31 | $ 40.3 | $ 36.7

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- Definition Contract with customer amount of deferred revenue and customer advances recognized + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- Definition Contract with customer liability additions. + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- References No definition available. + Details
Name: | us-gaap_ChangeInContractWithCustomerLiabilityAbstract
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
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- Definition Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 606 -SubTopic 10 -Section 45 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=123360276&loc=SL49130531-203044 Reference 2: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 606 -SubTopic 10 -Section 50 -Paragraph 8 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=123351226&loc=SL49130549-203045 Reference 3: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 606 -SubTopic 10 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=123360276&loc=SL49130532-203044 + Details
Name: | us-gaap_ContractWithCustomerLiability
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant