# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-22-006906
Filing Date
2022-05-02
Accepted
2022-05-02 17:17:13
Documents
107
Period of Report
2022-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | mksi-20220331.htm iXBRL | 10-Q | 3497955
2 | EX-31.1 | mksi-ex31_1.htm | EX-31.1 | 20221
3 | EX-31.2 | mksi-ex31_2.htm | EX-31.2 | 20091
4 | EX-32.1 | mksi-ex32_1.htm | EX-32.1 | 17150
| Complete submission text file | 0000950170-22-006906.txt |  | 15915581

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
5 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | mksi-20220331_def.xml | EX-101.DEF | 342883
6 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | mksi-20220331.xsd | EX-101.SCH | 86558
7 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | mksi-20220331_lab.xml | EX-101.LAB | 635276
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | mksi-20220331_cal.xml | EX-101.CAL | 77812
9 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | mksi-20220331_pre.xml | EX-101.PRE | 539614
101 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-20220331_htm.xml | XML | 4080585

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 22883270
SIC: 3823 Industrial Instruments For Measurement, Display, and Control