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Derivatives - Summary of Foreign Currency Option Contracts Purchased to Hedge Conversion (Detail) € in Millions, $ in Millions	3 Months Ended
	Mar. 31, 2022 EUR (€)	Dec. 31, 2021 USD ($)
Option Agreement [Member]
Derivative [Line Items]
Fixed Rate	1.1615%
Foreign Exchange Option [Member]
Derivative [Line Items]
Notional amount in EUR/USD	€ 300
Foreign Exchange Option [Member] | Option Agreement [Member]
Derivative [Line Items]
Trade Date	Oct. 26, 2021
Effective Date	Oct. 26, 2021
Maturity	Jan. 31, 2022
Notional amount in EUR/USD	€ 300
Fair Value Asset (Liability) | $		$ 3

X

- Definition

Derivative effective dates.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
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Balance Type:	na
Period Type:	duration

X

- Definition

Derivative trade dates.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:dateItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Fair value of the assets less the liabilities of a derivative or group of derivatives.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 825
-SubTopic 10
-Section 50
-Paragraph 10
-URI http://asc.fasb.org/extlink&oid=123594938&loc=d3e13433-108611

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

X

- Definition

Fixed interest rate related to the interest rate derivative.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

X

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Date the derivative contract matures, in YYYY-MM-DD format.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:dateItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Nominal or face amount used to calculate payment on derivative.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 1B
-URI http://asc.fasb.org/extlink&oid=125515794&loc=SL5580258-113959

Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 1A
-Subparagraph (d)
-URI http://asc.fasb.org/extlink&oid=125515794&loc=SL5579245-113959

+ Details

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Period Type:	instant

X

- Details

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Namespace Prefix:
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Period Type:

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- Details

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Period Type: