# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-22-014195
Filing Date
2022-08-03
Accepted
2022-08-03 15:24:23
Documents
109
Period of Report
2022-06-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | mksi-20220630.htm iXBRL | 10-Q | 4311119
2 | EX-31.1 | mksi-ex31_1.htm | EX-31.1 | 20400
3 | EX-31.2 | mksi-ex31_2.htm | EX-31.2 | 20276
4 | EX-32.1 | mksi-ex32_1.htm | EX-32.1 | 17359
| Complete submission text file | 0000950170-22-014195.txt |  | 18145298

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
5 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | mksi-20220630_pre.xml | EX-101.PRE | 537816
6 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | mksi-20220630_cal.xml | EX-101.CAL | 79645
7 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | mksi-20220630_lab.xml | EX-101.LAB | 637694
8 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | mksi-20220630.xsd | EX-101.SCH | 87134
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | mksi-20220630_def.xml | EX-101.DEF | 342352
103 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-20220630_htm.xml | XML | 4768090

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 221132285
SIC: 3823 Industrial Instruments For Measurement, Display, and Control