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Commitments and Contingencies - Additional Information (Detail) - Atotech Limited [Member] | Aug. 17, 2022 USD ($) shares
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Commitments And Contingencies [Line Items] |
Price per share of common stock in cash | $ 16.20
Number of shares received per common shares | shares | 0.0552
Business acquisition, total cash consideration | $ 5,664,000,000

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- Definition Business combination, price per share of common stock in cash. + References No definition available. + Details
Name: | mksi_BusinessCombinationPricePerShareOfCommonStockInCash
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

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- Definition Business combination share received per common stock. + References No definition available. + Details
Name: | mksi_BusinessCombinationShareReceivedPerCommonStock
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_LossContingenciesLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b)(1) -URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585 + Details
Name: | us-gaap_PaymentsToAcquireBusinessesGross
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_AtotechLimitedMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |