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Acquisitions - Summary of Preliminary Purchase Price (Detail) - USD ($) $ in Millions			9 Months Ended
	Aug. 17, 2022	Jul. 15, 2021	Sep. 30, 2022	Sep. 30, 2021
Business Acquisition [Line Items]
Repayment of Atotech debt			$ 835	$ 13
Total purchase price, net of cash and cash equivalents acquired			$ 4,473	$ 268
Photon Control, Inc. [Member]
Business Acquisition [Line Items]
Cash paid for outstanding shares		$ 302
Less: Cash and cash equivalents acquired		(34)
Total purchase price, net of cash and cash equivalents acquired		$ 268
Atotech Limited [Member]
Business Acquisition [Line Items]
Cash paid for outstanding shares	$ 2,886
Value of MKS shares issued	1,186
Repayment of Atotech debt	1,545
Settlement of share-based awards	47
Total purchase price	5,664
Total purchase price, net of cash and cash equivalents acquired	$ 5,664

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