<SEC-DOCUMENT>0001127602-22-021329-index.html : 20220818
<SEC-HEADER>0001127602-22-021329.hdr.sgml : 20220818
<ACCEPTANCE-DATETIME>20220818172218
ACCESSION NUMBER:		0001127602-22-021329
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20220817
FILED AS OF DATE:		20220818
DATE AS OF CHANGE:		20220818

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			WILD GEOFFREY
		CENTRAL INDEX KEY:			0001379529

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		221178188

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>form3.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: form3.html

Document 1 - RAW XML: form3.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>doc1.txt
<DESCRIPTION>POWER OF ATTORNEY (PUBLIC): POA_WILDGEOFFREY
<TEXT>
Document 2 - file: doc1.txt

</DOCUMENT>
</SEC-DOCUMENT>