<SEC-DOCUMENT>0001193125-22-091831-index.html : 20220331
<SEC-HEADER>0001193125-22-091831.hdr.sgml : 20220331
<ACCEPTANCE-DATETIME>20220331162111
ACCESSION NUMBER:		0001193125-22-091831
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		23
CONFORMED PERIOD OF REPORT:	20220510
FILED AS OF DATE:		20220331
DATE AS OF CHANGE:		20220331

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		22792867

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>d302172ddef14a.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: d302172ddef14a.htm
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>2 <FILENAME>g302172g00k02.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 2 - file: g302172g00k02.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>3 <FILENAME>g302172g00k03.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 3 - file: g302172g00k03.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>4 <FILENAME>g302172g19o25.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 4 - file: g302172g19o25.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>5 <FILENAME>g302172g25m01.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 5 - file: g302172g25m01.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>6 <FILENAME>g302172g25m02.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 6 - file: g302172g25m02.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>7 <FILENAME>g302172g25m04.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 7 - file: g302172g25m04.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>8 <FILENAME>g302172g25m05.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 8 - file: g302172g25m05.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>9 <FILENAME>g302172g25m06.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 9 - file: g302172g25m06.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>10 <FILENAME>g302172g25m07.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 10 - file: g302172g25m07.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>11 <FILENAME>g302172g25m08.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 11 - file: g302172g25m08.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>12 <FILENAME>g302172g25m09.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 12 - file: g302172g25m09.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>13 <FILENAME>g302172g25m10.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 13 - file: g302172g25m10.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>14 <FILENAME>g302172g25t01.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 14 - file: g302172g25t01.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>15 <FILENAME>g302172g25t02.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 15 - file: g302172g25t02.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>16 <FILENAME>g302172g25t03.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 16 - file: g302172g25t03.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>17 <FILENAME>g302172g25t04.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 17 - file: g302172g25t04.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>18 <FILENAME>g302172g25t05.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 18 - file: g302172g25t05.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>19 <FILENAME>g302172g25t06.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 19 - file: g302172g25t06.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>20 <FILENAME>g302172g25t07.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 20 - file: g302172g25t07.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>21 <FILENAME>g302172g25t08.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 21 - file: g302172g25t08.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>22 <FILENAME>g302172g50a01.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 22 - file: g302172g50a01.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>23 <FILENAME>g302172g50a02.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 23 - file: g302172g50a02.jpg
</DOCUMENT> </SEC-DOCUMENT>