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ACCESSION NUMBER:		0001193125-22-145955
CONFORMED SUBMISSION TYPE:	S-8
PUBLIC DOCUMENT COUNT:		7
FILED AS OF DATE:		20220510
DATE AS OF CHANGE:		20220510
EFFECTIVENESS DATE:		20220510

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		S-8
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-264817
		FILM NUMBER:		22908393

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
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Document 1 - file: d358463ds8.htm

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Document 2 - file: d358463dex51.htm

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Document 3 - file: d358463dex232.htm

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<DESCRIPTION>EX-99.1
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Document 4 - file: d358463dex991.htm

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<DESCRIPTION>EX-FILING FEES
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Document 5 - file: d358463dexfilingfees.htm

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Document 7 - file: g358463g12w69.jpg

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