# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-23-007851
Filing Date
2023-03-14
Accepted
2023-03-14 16:02:23
Documents
141
Period of Report
2022-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | mksi-20221231.htm iXBRL | 10-K | 6762310
2 | EX-10.5 | mksi-ex10_5.htm | EX-10 | 128868
3 | EX-21.1 | mksi-ex21_1.htm | EX-21 | 104225
4 | EX-23.1 | mksi-ex23_1.htm | EX-23 | 3657
5 | EX-31.1 | mksi-ex31_1.htm | EX-31 | 19171
6 | EX-31.2 | mksi-ex31_2.htm | EX-31 | 19207
7 | EX-32.1 | mksi-ex32_1.htm | EX-32 | 17564
8 | GRAPHIC | img121431926_0.jpg | GRAPHIC | 55267
| Complete submission text file | 0000950170-23-007851.txt |  | 28659074

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
9 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | mksi-20221231_lab.xml | EX-101.LAB | 952266
10 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | mksi-20221231.xsd | EX-101.SCH | 130656
11 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | mksi-20221231_cal.xml | EX-101.CAL | 120760
12 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | mksi-20221231_def.xml | EX-101.DEF | 458723
13 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | mksi-20221231_pre.xml | EX-101.PRE | 767728
135 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-20221231_htm.xml | XML | 7658798

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-23621 | Film No.: 23730671
SIC: 3823 Industrial Instruments For Measurement, Display, and Control