    <SEC-DOCUMENT>0001193125-23-091662-index.html : 20230405
    <SEC-HEADER>0001193125-23-091662.hdr.sgml : 20230405
    <ACCEPTANCE-DATETIME>20230405090505
    ACCESSION NUMBER:		0001193125-23-091662
    CONFORMED SUBMISSION TYPE:	ARS
    PUBLIC DOCUMENT COUNT:		1
    CONFORMED PERIOD OF REPORT:	20221231
    FILED AS OF DATE:		20230405
    DATE AS OF CHANGE:		20230405
    EFFECTIVENESS DATE:		20230405

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
    		CENTRAL INDEX KEY:			0001049502
    		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
    		IRS NUMBER:				042277512
    		STATE OF INCORPORATION:			MA
    		FISCAL YEAR END:			1231

    	FILING VALUES:
    		FORM TYPE:		ARS
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-23621
    		FILM NUMBER:		23801312

    	BUSINESS ADDRESS:
    		STREET 1:		2 TECH DRIVE
    		STREET 2:		SUITE 201
    		CITY:			ANDOVER
    		STATE:			MA
    		ZIP:			01810
    		BUSINESS PHONE:		978-645-5500

    	MAIL ADDRESS:
    		STREET 1:		2 TECH DRIVE
    		STREET 2:		SUITE 201
    		CITY:			ANDOVER
    		STATE:			MA
    		ZIP:			01810
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>ARS
    <SEQUENCE>1
    <FILENAME>d447246dars.pdf
    <DESCRIPTION>ARS
    <TEXT>
    Document 1 - file: d447246dars.pdf

    </DOCUMENT>
    </SEC-DOCUMENT>