# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-018281
Filing Date
2023-05-05
Accepted
2023-05-05 15:31:44
Documents
96
Period of Report
2023-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | mksi-20230331.htm iXBRL | 10-Q | 3409154
2 | EX-31.1 | mksi-ex31_1.htm | EX-31 | 20766
3 | EX-31.2 | mksi-ex31_2.htm | EX-31 | 20626
4 | EX-32.1 | mksi-ex32_1.htm | EX-32 | 17619
| Complete submission text file | 0000950170-23-018281.txt |  | 15097540

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
5 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | mksi-20230331_def.xml | EX-101.DEF | 312313
6 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | mksi-20230331_cal.xml | EX-101.CAL | 70466
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | mksi-20230331.xsd | EX-101.SCH | 86181
8 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | mksi-20230331_pre.xml | EX-101.PRE | 505256
9 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | mksi-20230331_lab.xml | EX-101.LAB | 634698
90 | EXTRACTED XBRL INSTANCE DOCUMENT | mksi-20230331_htm.xml | XML | 3810557

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 23893483
SIC: 3823 Industrial Instruments For Measurement, Display, and Control