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Acquisition - Summary of Purchase Price (Detail) - USD ($) $ in Millions		3 Months Ended
	Aug. 17, 2022	Mar. 31, 2023	Mar. 31, 2022
Business Acquisition [Line Items]
Repayment of Atotech senior secured term loans		$ 23	$ 2
Atotech Limited [Member]
Business Acquisition [Line Items]
Cash paid for outstanding shares	$ 2,886
Value of MKS shares issued	1,186
Repayment of Atotech senior secured term loans	1,545
Settlement of accelerated share-based awards	47
Total purchase price, net of cash and cash equivalents acquired	5,664
Total purchase price, net of cash and cash equivalents acquired	$ 5,664

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