Business combination cash paid for outstanding shares.

No definition available.

Name:	mksi_BusinessCombinationCashPaidForOutstandingShares
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Value of equity interests (such as common shares, preferred shares, or partnership interest) issued or issuable to acquire the entity.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (b)(4)
-URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479

+ Details

Name:	us-gaap_BusinessAcquisitionEquityInterestIssuedOrIssuableValueAssigned
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (b)(1)
-URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479

Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 13
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585

+ Details

Name:	us-gaap_PaymentsToAcquireBusinessesGross
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 13
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585

+ Details

Name:	us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash outflow during the period from the repayment of aggregate short-term and long-term debt. Excludes payment of capital lease obligations.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 15
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585

+ Details

Name:	us-gaap_RepaymentsOfDebt
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Amount of additional cost recognized for award under share-based payment arrangement from occurrence of event accelerating recognition of cost.

+ References

No definition available.

+ Details

Name:	us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAcceleratedCompensationCost
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_AtotechLimitedMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Acquisition - Summary of Purchase Price (Detail) - USD ($) $ in Millions		6 Months Ended
	Aug. 17, 2022	Jun. 30, 2023	Jun. 30, 2022
Business Acquisition [Line Items]
Repayment of Atotech senior secured term loans		$ 45	$ 8
Atotech Limited [Member]
Business Acquisition [Line Items]
Cash paid for outstanding shares	$ 2,886
Value of MKS shares issued	1,186
Repayment of Atotech senior secured term loans	1,545
Settlement of accelerated share-based awards	47
Total purchase price, net of cash and cash equivalents acquired	5,664
Total purchase price, net of cash and cash equivalents acquired	$ 5,664