Acquisition - Schedule of Revenue and Net Income (Details) - Atotech Limited [Member] - USD ($) $ in Millions	3 Months Ended	6 Months Ended
Jun. 30, 2022	Jun. 30, 2022
Business Acquisition [Line Items]
Total net revenues	$ 1,123	$ 2,223
Net income	$ 69	$ 174

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

This element represents the amount of earnings or loss of the acquiree since the acquisition date included in the consolidated income statement for the reporting period.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (h)(1)
-URI https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463

+ Details

Name:	us-gaap_BusinessCombinationProFormaInformationEarningsOrLossOfAcquireeSinceAcquisitionDateActual
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

This element represents the amount of revenue of the acquiree since the acquisition date included in the consolidated income statement for the reporting period.

+ References

+ Details

Name:	us-gaap_BusinessCombinationProFormaInformationRevenueOfAcquireeSinceAcquisitionDateActual
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_AtotechLimitedMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: