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Acquisition - Summary of Purchase Price (Detail) - USD ($) $ in Millions |  |  | 12 Months Ended
--- | --- | --- | ---
Aug. 17, 2022 | Jul. 15, 2021 | Dec. 31, 2023 | Dec. 31, 2022 | Dec. 31, 2021
Business Acquisition [Line Items] |  |  |  |  |
Repayment of Atotech senior secured term loans |  |  | $ 403 | $ 962 | $ 15
Total purchase price, net of cash and cash equivalents acquired |  |  | $ 0 | $ 4,473 | $ 268
Photon Control Inc [Member] |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |
Cash paid for outstanding shares |  | $ 302 |  |  |
Less: Cash and cash equivalents acquired |  | (34) |  |  |
Total purchase price, net of cash and cash equivalents acquired |  | $ 268 |  |  |
Atotech Limited [Member] |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |
Cash paid for outstanding shares | $ 2,886 |  |  |  |
Value of MKS shares issued | 1,186 |  |  |  |
Repayment of Atotech senior secured term loans | 1,545 |  |  |  |
Settlement of accelerated Atotech share-based awards | 47 |  |  |  |
Total purchase price, net of cash and cash equivalents acquired | 5,664 |  |  |  |
Total purchase price, net of cash and cash equivalents acquired | $ 5,664 |  |  |  |

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