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Acquisition - Summary of Purchase Price (Detail) - USD ($) $ in Millions |  | 12 Months Ended
--- | --- | ---
Aug. 17, 2022 | Dec. 31, 2024 | Dec. 31, 2023 | Dec. 31, 2022
Business Acquisition [Line Items] |  |  |  |
Repayment of Atotech senior secured term loans |  | $ 2,427 | $ 403 | $ 962
Atotech Limited [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Cash paid for outstanding shares | $ 2,886 |  |  |
Value of MKS shares issued | 1,186 |  |  |
Repayment of Atotech senior secured term loans | 1,545 |  |  |
Settlement of accelerated Atotech share-based awards | 47 |  |  |
Total purchase price, net of cash and cash equivalents acquired | $ 5,664 |  |  |

X
- Definition Business combination cash paid for outstanding shares. + References No definition available. + Details
Name: | mksi_BusinessCombinationCashPaidForOutstandingShares
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Value of equity interests (such as common shares, preferred shares, or partnership interest) issued or issuable to acquire the entity. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Topic 805 -SubTopic 30 -Name Accounting Standards Codification -Section 50 -Paragraph 1 -Subparagraph (b)(4) -Publisher FASB -URI https://asc.fasb.org/1943274/2147479581/805-30-50-1 + Details
Name: | us-gaap_BusinessAcquisitionEquityInterestIssuedOrIssuableValueAssigned
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Topic 805 -SubTopic 20 -Name Accounting Standards Codification -Section 50 -Paragraph 5 -Subparagraph (a) -Publisher FASB -URI https://asc.fasb.org/1943274/2147479907/805-20-50-5 + Details
Name: | us-gaap_BusinessAcquisitionLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Topic 805 -SubTopic 30 -Name Accounting Standards Codification -Section 50 -Paragraph 1 -Subparagraph (b)(1) -Publisher FASB -URI https://asc.fasb.org/1943274/2147479581/805-30-50-1 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -Publisher FASB -URI https://asc.fasb.org/1943274/2147482740/230-10-45-13 + Details
Name: | us-gaap_PaymentsToAcquireBusinessesGross
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Amount of cash outflow for short-term and long-term debt. Excludes payment of lease obligation. + References Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef -Topic 230 -SubTopic 10 -Name Accounting Standards Codification -Section 45 -Paragraph 15 -Subparagraph (b) -Publisher FASB -URI https://asc.fasb.org/1943274/2147482740/230-10-45-15 + Details
Name: | us-gaap_RepaymentsOfDebt
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Amount of additional cost recognized for award under share-based payment arrangement from occurrence of event accelerating recognition of cost. + References No definition available. + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAcceleratedCompensationCost
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Details
Name: | us-gaap_BusinessAcquisitionAxis=mksi_AtotechLimitedMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |