EX-21.1 5 mksi-ex21_1.htm EX-21.1

EXHIBIT 21.1

SUBSIDIARY | JURISDICTION OF INCORPORATION
Alpha 2 B.V. | Netherlands
Alpha 3 B.V. | Netherlands
Alpha 4 B.V. | Netherlands
Alpha Germany Bidco GmbH | Germany
Alpha Treasury Services B.V. | Netherlands
Atotech (China) Chemicals Ltd. | China
Atotech (Malaysia) Sdn. Bhd. | Malaysia
Atotech (Philippines) Chemicals, Inc. | Philippines
Atotech (Singapore) Chemicals Pte. Ltd. | Singapore
Atotech (Thailand) Co., Ltd. | Thailand
Atotech (Yangzhou) Chemicals Ltd. | China
Atotech Argentina SA | Argentina
Atotech Asia Pacific Limited | Hong Kong
Atotech Asset Management GmbH | Germany
Atotech Australia Pty. Ltd. | Australia
Atotech B.V. | Netherlands
Atotech Beteiligungs und Management GmbH & Co. KG | Germany
Atotech Bulgaria EOOD | Bulgaria
Atotech Canada Ltd. | Canada
Atotech CZ, a.s. | Czech Republic
Atotech de Mexico S.A. de C.V. | Mexico
Atotech Deutschland GmbH & Co. KG | Germany
Atotech Development Center Pte. Ltd. | India
Atotech do Brasil Galvanotecnica Ltda. | Brazil
Atotech España, S.A. | Spain
Atotech France S.A. | France
Atotech Global Services Private Ltd. | India
Atotech India Pte. Ltd. | India
Atotech Istanbul Kimya S. Ltd. Sirketi | Turkey
Atotech Italia S.r.l. | Italy
Atotech Japan K.K. | Japan
Atotech Korea Ltd. | Korea
Atotech Limited | Jersey
Atotech Manufacturing, Inc. | Delaware
Atotech Österreich GmbH | Austria
Atotech Poland Sp. z.o.o. | Poland
Atotech SK, s.r.o. | Slovakia
Atotech Skandinavien AB | Sweden
Atotech Slovenija d.d. | Slovenia
Atotech Taiwan Ltd. | Taiwan
Atotech UK Limited | United Kingdom
Atotech USA, LLC | Delaware
Atotech Vietnam Co., Ltd. | Vietnam
Atotech-Chemeta LLC | Russian Federation
Electro Scientific Industries Europe Ltd | United Kingdom

EXHIBIT 21.1

Electro Scientific Industries GmbH | Germany
Electro Scientific Industries Singapore Pte. Ltd. | Singapore
Electro Scientific Industries, Inc. | Oregon
ESI China, Inc. | Oregon
ESI Electronic Equipment (Shanghai) Co., Ltd. | China
ESI International Corporation | Oregon
ESI Japan, K.K. | Japan
ESI Korea, Inc. | Korea
ESI Vietnam Company Limited | Vietnam
High Q Laser GmbH | Austria
Hilger Analytical Limited | United Kingdom
Micro-Controle Spectra-Physics S.A.S. | France
MKS Denmark ApS | Denmark
MKS German Holding GmbH | Germany
MKS Instruments (China) Company Ltd. | China
MKS Instruments (Hong Kong) Limited | Hong Kong
MKS Instruments (Singapore) Pte. Ltd. | Singapore
MKS Instruments (Thailand) Co., Ltd. | Thailand
MKS Instruments Deutschland GmbH | Germany
MKS Instruments ESI Switzerland GmbH | Switzerland
MKS Instruments Holdings Ltd | United Kingdom
MKS Instruments Israel Ltd. | Israel
MKS Instruments Italy S.r.l. | Italy
MKS Instruments Malaysia Sdn. Bhd. | Malaysia
MKS Instruments Mexico S. de R.L. de C.V. | Mexico
MKS Instruments UK Limited | United Kingdom
MKS Japan, Inc. | Japan
MKS Korea Ltd. | Korea
MKS Spectra Holdings Limited | United Kingdom
MKS Taiwan Technology Limited | Taiwan
Newport Corporation | Nevada
Newport Instruments Canada Corporation | Canada
Newport Laser Holding GmbH | Austria
Newport Ophir Holdings Ltd. | Israel
Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. | Singapore
Newport Opto-Electronics Technologies (Wuxi) Company Limited | China
Newport Spectra-Physics B.V. | Netherlands
Newport Spectra-Physics GmbH | Germany
Newport Spectra-Physics Limited | United Kingdom
Ophir Japan Ltd. | Japan
Ophir Optics S.R.L. | Romania
Ophir Optronics Ltd. | Israel
Ophir Optronics Solutions Ltd. | Israel
Ophir Spiricon Europe GmbH | Germany
Photon Control (USA) Inc. | Delaware
Photon Control Inc. | Canada
Pt. Atotech Indonesia Chemicals | Indonesia

EXHIBIT 21.1

Spectra-Physics, K.K. | Japan
UAB Atotech-Chemeta | Lithuania
V-Gen Ltd. | Israel
Visutech Plating Ltd. | Belarus