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Cover Page - USD ($)
 12 Months Ended
Dec. 31, 2024
Feb. 18, 2025
Jun. 30, 2024
Cover [Abstract]      
Amendment Flag false    
Document Type 10-K    
Document Annual Report true    
Document Fiscal Year Focus 2024    
Document Fiscal Period Focus FY    
Document Transition Report false    
Current Fiscal Year End Date --12-31    
Entity Well-known Seasoned Issuer Yes    
Entity Voluntary Filers No    
Document Period End Date Dec. 31, 2024    
Entity Interactive Data Current Yes    
Entity Current Reporting Status Yes    
Entity Registrant Name MKS INSTRUMENTS, INC.    
Entity Central Index Key 0001049502    
Trading Symbol MKSI    
Entity Filer Category Large Accelerated Filer    
Entity Shell Company false    
Entity Emerging Growth Company false    
Entity Small Business false    
Entity Common Stock, Shares Outstanding   67,377,585  
Entity Public Float     $ 8,786,410,629
Entity File Number 0-23621    
Entity Tax Identification Number 04-2277512    
Entity Address, Address Line One 2 Tech Drive, Suite 201,    
Entity Address, City or Town Andover    
Entity Address, State or Province MA    
Entity Address, Postal Zip Code 01810    
Entity Incorporation, State or Country Code MA    
City Area Code 978    
Local Phone Number 645-5500    
Security Exchange Name NASDAQ    
Title of 12(b) Security Common Stock    
ICFR Auditor Attestation Flag true    
Document Financial Statement Error Correction [Flag] false    
Auditor Firm ID 238    
Auditor Name PricewaterhouseCoopers LLP    
Auditor Location Boston, Massachusetts    
Auditor Opinion [Text Block]

Opinions on the Financial Statements and Internal Control over Financial Reporting

We have audited the accompanying consolidated balance sheets of MKS Instruments, Inc. and its subsidiaries (the "Company") as of December 31, 2024 and 2023, and the related consolidated statements of operations and comprehensive income (loss), of stockholders’ equity and of cash flows for each of the three years in the period ended December 31, 2024, including the related notes and schedule of valuation and qualifying accounts for each of the three years in the period ended December 31, 2024 appearing after Item 16 (collectively referred to as the "consolidated financial statements"). We also have audited the Company's internal control over financial reporting as of December 31, 2024, based on criteria established in Internal Control - Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission (COSO).

In our opinion, the consolidated financial statements referred to above present fairly, in all material respects, the financial position of the Company as of December 31, 2024 and 2023, and the results of its operations and its cash flows for each of the three years in the period ended December 31, 2024 in conformity with accounting principles generally accepted in the United States of America. Also in our opinion, the Company maintained, in all material respects, effective internal control over financial reporting as of December 31, 2024, based on criteria established in Internal Control - Integrated Framework (2013) issued by the COSO.

    
Documents Incorporated by Reference

Portions of the definitive Proxy Statement for our 2025 Annual Meeting of Shareholders, to be filed with the Securities and Exchange Commission no later than 120 days after the close of our fiscal year ended December 31, 2024, are incorporated by reference into Part III of this Annual Report on Form 10-K.