SEC EDGAR Submission 0001193125-25-069811

<SEC-DOCUMENT>0001193125-25-069811-index.html : 20250401
<SEC-HEADER>0001193125-25-069811.hdr.sgml : 20250401
<ACCEPTANCE-DATETIME>20250401083112
ACCESSION NUMBER:		0001193125-25-069811
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		55
CONFORMED PERIOD OF REPORT:	20250512
FILED AS OF DATE:		20250401
DATE AS OF CHANGE:		20250401

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		EIN:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		25796803

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>d884344ddef14a.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: d884344ddef14a.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>2
<FILENAME>mksi-20241231.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
<TEXT>
Document 2 - file: mksi-20241231.xsd

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>3
<FILENAME>mksi-20241231_def.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION DEFINITION LINKBASE
<TEXT>
Document 3 - file: mksi-20241231_def.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>4
<FILENAME>mksi-20241231_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
<TEXT>
Document 4 - file: mksi-20241231_lab.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>5
<FILENAME>mksi-20241231_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
<TEXT>
Document 5 - file: mksi-20241231_pre.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g884344g00a06.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: g884344g00a06.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>g884344g00a08.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: g884344g00a08.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>g884344g00a10.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: g884344g00a10.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>g884344g00a12.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: g884344g00a12.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>g884344g00a14.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: g884344g00a14.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>g884344g00a16.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 11 - file: g884344g00a16.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>g884344g00a18.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: g884344g00a18.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>13
<FILENAME>g884344g00a20.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: g884344g00a20.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>14
<FILENAME>g884344g00a22.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 14 - file: g884344g00a22.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>15
<FILENAME>g884344g00a25.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 15 - file: g884344g00a25.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>16
<FILENAME>g884344g00a38.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 16 - file: g884344g00a38.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>17
<FILENAME>g884344g00b22.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 17 - file: g884344g00b22.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>18
<FILENAME>g884344g00b38.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 18 - file: g884344g00b38.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>19
<FILENAME>g884344g12f39.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 19 - file: g884344g12f39.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>20
<FILENAME>g884344g19o25.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 20 - file: g884344g19o25.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>21
<FILENAME>g884344g25m01.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 21 - file: g884344g25m01.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>22
<FILENAME>g884344g25m04.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 22 - file: g884344g25m04.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>23
<FILENAME>g884344g25m05.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 23 - file: g884344g25m05.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>24
<FILENAME>g884344g25m06.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 24 - file: g884344g25m06.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>25
<FILENAME>g884344g25m07.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 25 - file: g884344g25m07.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>26
<FILENAME>g884344g25m09.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 26 - file: g884344g25m09.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>27
<FILENAME>g884344g25m10.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 27 - file: g884344g25m10.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>28
<FILENAME>g884344g25t01.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 28 - file: g884344g25t01.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>29
<FILENAME>g884344g25t02.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 29 - file: g884344g25t02.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>30
<FILENAME>g884344g25t03.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 30 - file: g884344g25t03.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>31
<FILENAME>g884344g25t04.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 31 - file: g884344g25t04.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>32
<FILENAME>g884344g25t05.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 32 - file: g884344g25t05.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>33
<FILENAME>g884344g25t06.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 33 - file: g884344g25t06.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>34
<FILENAME>g884344g25t07.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 34 - file: g884344g25t07.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>35
<FILENAME>g884344g31g82.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 35 - file: g884344g31g82.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>36
<FILENAME>g884344g34r79.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 36 - file: g884344g34r79.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>37
<FILENAME>g884344g41q05.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 37 - file: g884344g41q05.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>38
<FILENAME>g884344g52h75.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 38 - file: g884344g52h75.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>39
<FILENAME>g884344g87h39.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 39 - file: g884344g87h39.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>40
<FILENAME>g884344g99z01.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 40 - file: g884344g99z01.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>41
<FILENAME>g884344gra001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 41 - file: g884344gra001.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>42
<FILENAME>g884344gra002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 42 - file: g884344gra002.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>49
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 49 - file: Show.js

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>50
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 50 - file: report.css

</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>55
<FILENAME>0001193125-25-069811-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 55 - file: 0001193125-25-069811-xbrl.zip

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>58
<FILENAME>d884344ddef14a_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 58 - file: d884344ddef14a_htm.html

Document 58 - RAW XML: d884344ddef14a_htm.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>59
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 59 - file: R1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>60
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 60 - file: R2.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>61
<FILENAME>R3.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 61 - file: R3.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>62
<FILENAME>R4.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 62 - file: R4.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>63
<FILENAME>R5.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 63 - file: R5.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>64
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 64 - file: FilingSummary.html

Document 64 - RAW XML: FilingSummary.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>66
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 66 - file: MetaLinks.json

</DOCUMENT>
</SEC-DOCUMENT>