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Acquisitions - Sualab Co., Ltd. Purchase Price Allocation (Details) - USD ($) $ in Thousands | Dec. 31, 2020 | Dec. 31, 2019 | Oct. 16, 2019 | Dec. 31, 2018
--- | --- | --- | --- | ---
Business Acquisition [Line Items] |  |  |  |
Goodwill | $ 244,078 | $ 243,445 |  | $ 113,208
Sualab Co., Ltd. [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Cash and cash equivalents |  |  | $ 3,691 |
Current investments |  |  | 9,487 |
Accounts receivable |  |  | 1,200 |
Inventories |  |  | 115 |
Prepaid expenses and other current assets |  |  | 252 |
Property, plant, and equipment |  |  | 726 |
Operating lease assets |  |  | 2,792 |
Deferred income tax asset |  |  | 3,087 |
Other assets |  |  | 513 |
Accounts payable |  |  | (28) |
Accrued expenses |  |  | (2,633) |
Deferred revenue and customer deposits |  |  | (764) |
Operating lease liabilities |  |  | (448) |
Non-current operating lease liabilities |  |  | (2,344) |
Deferred income tax liabilities |  |  | (7,926) |
Other liabilities |  |  | (10) |
Goodwill |  |  | 129,138 |
Purchase price |  |  | 169,598 |
Sualab Co., Ltd. [Member] | Completed Technology [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Intangible assets |  |  | 18,300 |
Sualab Co., Ltd. [Member] | In-process Technology [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Intangible assets |  |  | 8,200 |
Sualab Co., Ltd. [Member] | Customer Relationships [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Intangible assets |  |  | 5,800 |
Sualab Co., Ltd. [Member] | Non-compete agreements |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Intangible assets |  |  | 340 |
Sualab Co., Ltd. [Member] | Trademarks [Member] |  |  |  |
Business Acquisition [Line Items] |  |  |  |
Intangible assets |  |  | $ 110 |

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