Exhibit 21.1
List of Subsidiaries
| Name |
Jurisdiction | |
| Accent Optical Technologies France |
France | |
| Accent Optical Technologies (Germany) GmbH |
Germany | |
| Nanometrics (Switzerland) GmbH |
Switzerland | |
| Nanometrics U.K. Ltd. |
United Kingdom | |
| Nanometrics China Company Ltd. |
China | |
| Nanometrics Israel, Ltd. |
Israel | |
| Nanometrics Japan K.K. |
Japan | |
| Nanometrics Korea Limited |
South Korea | |
| Nanometrics Southeast Asia Pte. Limited |
Singapore | |