v2.4.0.6

Fair Value Measurements and Disclosures (Details Textual) (USD $) | 3 Months Ended | 12 Months Ended |  |  |  | 12 Months Ended
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Mar. 31, 2012 | Dec. 29, 2012 | Nov. 21, 2011 Nanda [Member] | Dec. 29, 2012 Fair Value, Measurements, Recurring [Member] Zygo Corporation [Member] | Dec. 31, 2011 Fair Value, Measurements, Recurring [Member] Zygo Corporation [Member] | Dec. 31, 2011 Fair Value, Measurements, Recurring [Member] Nanda [Member] | Dec. 29, 2012 Real Time Metrology Inc. [Member]
Fair Value Measurements and Disclosures (Textual) [Abstract] |  |  |  |  |  |  |
Liabilities resulting from the acquisition of certain assets from Zygo Corporation measured at fair value |  |  | $ 1,603,000 | $ 2,500,000 | $ 2,600,000 | $ 600,000 |
Current liability at fair value |  |  |  | 700,000 | 700,000 |  |
Long-term liability at fair value |  |  |  | 1,800,000 | 1,900,000 |  |
Fair Value Measurements and Disclosures (Additional Textual) [Abstract] |  |  |  |  |  |  |
Reduction in fair value of royalty payments | 600,000 |  |  |  |  |  | 600,000
Reduction in fair value of goodwill | 400,000 | 500,000 |  |  |  |  | 400,000
Reduction in fair value of intangible assets | $ 200,000 |  |  |  |  |  | $ 200,000
Maximum maturity period of Available-for-sale marketable securities, classified as cash equivalents |  | 90 days |  |  |  |  |
Minimum maturity period of Available-for-sale marketable securities, classified as marketable securities |  | 90 days |  |  |  |  |
Maximum period of available for sale securities debt maturities |  | 2 years |  |  |  |  |

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