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Acquisition, Goodwill Impairment and Long-lived Asset Impairment (Details Textual) (USD $) | 3 Months Ended | 12 Months Ended |  | 12 Months Ended |  | 0 Months Ended |  |  | 12 Months Ended |  |
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Mar. 31, 2012 | Dec. 29, 2012 | Dec. 31, 2010 | Dec. 31, 2011 | Dec. 29, 2012 Nanda [Member] | Dec. 31, 2011 Nanda [Member] | Jan. 01, 2011 Nanda [Member] | Nov. 21, 2011 Nanda [Member] | Nov. 21, 2011 Developed technology [Member] Nanda [Member] | Nov. 21, 2011 Customer relationships [Member] Nanda [Member] | Dec. 29, 2012 In-process research and development [Member] Nanda [Member] | Nov. 21, 2011 In-process research and development [Member] Nanda [Member] | Dec. 29, 2012 Maximum [Member] | Dec. 29, 2012 Maximum [Member] Developed technology [Member] | Dec. 29, 2012 Maximum [Member] Customer relationships [Member] | Dec. 29, 2012 Real Time Metrology Inc. (RTM) [Member] | Dec. 29, 2012 Real Time Metrology Inc. (RTM) [Member] Nanda [Member] | Nov. 21, 2011 Real Time Metrology Inc. (RTM) [Member] Nanda [Member]
Acquisition Goodwill Impairment and Long Lived Asset Impairment (Textual) [Abstract] |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Preliminary purchase price allocation period |  |  |  |  |  |  |  |  |  |  |  |  | 1 year |  |  |  |  |
Reduction in fair value of royalty payments | $ 600,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | $ 600,000 |  |
Reduction in fair value of goodwill | 400,000 | 500,000 |  |  |  |  |  |  |  |  |  |  |  |  |  | 400,000 |  |
Reduction in fair value of intangible assets | 200,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 200,000 |  |
Proceeds from escrow |  |  |  |  | 500,000 |  |  |  |  |  |  |  |  |  |  |  |  |
Acquired percentage of the outstanding shares of Nanda Technologies GmbH |  |  |  |  |  |  |  | 100.00% |  |  |  |  |  |  |  |  |  |
Net purchase price in cash |  |  |  |  |  |  |  | 24,600,000 |  |  |  |  |  |  |  |  |  |
Goodwill |  | 11,352,000 |  | 11,990,000 | 11,400,000 |  |  |  |  |  |  |  |  |  |  |  |  |
Intangibles aquired |  |  |  |  |  |  |  |  | 9,042,000 | 1,040,000 | 300,000 | 308,000 |  |  |  |  |  |
Finite-lived intangibles estimated lives |  |  |  |  |  |  |  |  | 5 years | 3 years |  |  | 10 years | 10 years | 10 years |  |  |
Goodwill acquired |  |  |  |  |  |  |  | 11,610,000 |  |  |  |  |  |  |  |  |  |
Royalty payments to be remitted for the first three years subsequent to the acquisition |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 100.00% |
Royalty payments to be remitted subsequent to the first three years after the acquisition |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 50.00% |
Contingent liabilities |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 600,000
Pro forma adjustments, amortization |  |  |  |  |  | 2,400,000 | 2,600,000 |  |  |  |  |  |  |  |  |  |  |
Pro forma adjustments, stock-based compensation |  |  |  |  |  | 800,000 | 1,900,000 |  |  |  |  |  |  |  |  |  |  |
Impairment of intangible assets |  |  | $ 500,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |

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- Definition Amount of cash paid to acquire the entity. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 141R -Paragraph 68 -Subparagraph f(1) -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 141 -Paragraph 51 -Subparagraph d -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. + Details
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- Definition The amount of acquisition cost of a business combination allocated to an identifiable intangible asset that will be amortized. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 141 -Paragraph 51 -Subparagraph e -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 141 -Paragraph 52 -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. + Details
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