v2.4.0.6

Fair Value Measurements and Disclosures (Details 1) (Level 3 [Member], USD $) In Thousands, unless otherwise specified | 12 Months Ended
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Dec. 29, 2012 | Dec. 31, 2011
Fair value measurement on recurring basis, unobservable input reconciliation |  |
Fair value, beginning balance | $ 3,194 | $ 2,652
Change in fair value related to foreign currency exchange rate |  | (25)
Change in fair value included in earnings | 129 | 413
Fair Value, ending balance | 2,462 | 3,194
Zygo Corporation [Member] |  |
Fair value measurement on recurring basis, unobservable input reconciliation |  |
Payments made to Zygo Corporation | (300) | (432)
Nanda [Member] |  |
Fair value measurement on recurring basis, unobservable input reconciliation |  |
Addition: Fair value of royalty payment to RTM related to acquisition of Nanda |  | 586
Adjustment to the purchase price allocation of royalty payments to RTM related to acquisition of Nanda Technologies GmbH | $ (561) |

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- Definition Fair Value Measurement with Unobservable Inputs Reconciliations Addition for Royalty Payments Related to Acquisition + References No definition available. + Details
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Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- Definition Fair Value Measurement with Unobservable Inputs Reconciliations Adjustment for Foreign Currency Exchange Rate + References No definition available. + Details
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Period Type: | duration

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- Definition Fair value measurement with unobservable inputs reconciliations adjustment to purchase price allocation of royalty payments related to acquisition. + References No definition available. + Details
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Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- Details
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- Definition Amount of gain (loss) recognized in earnings, arising from liabilities measured at fair value on a recurring basis using unobservable inputs (level 3). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1) -URI http://asc.fasb.org/extlink&oid=7578670&loc=d3e19207-110258 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 157 -Paragraph 32 -Subparagraph c(1) -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. + Details
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Period Type: | duration

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- Definition Settlements that have taken place during the period in relation to liabilities measured at fair value and categorized within Level 3 of the fair value hierarchy. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(2) -URI http://asc.fasb.org/extlink&oid=7578670&loc=d3e19207-110258 + Details
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Balance Type: | debit
Period Type: | duration

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- Definition This element represents a liability measured at fair value using significant unobservable inputs (Level 3) which is required for reconciliation purposes of beginning and ending balances. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=7578670&loc=d3e19207-110258 + Details
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Balance Type: | credit
Period Type: | instant