Exhibit 21.1
List of Subsidiaries

Name |  | Jurisdiction
Nanometrics France S.A.S |  | France
Accent Optical Technologies (Germany) GmbH |  | Germany
Nanometrics (Switzerland) GmbH |  | Switzerland
Nanometrics U.K. Ltd. |  | United Kingdom
Nanometrics China Company Ltd. |  | China
Nanometrics Israel, Ltd. |  | Israel
Nanometrics Japan K.K. |  | Japan
Nanometrics Korea Limited |  | South Korea
Nanometrics Southeast Asia Pte. Limited |  | Singapore
Nanda Technologies GmbH |  | Germany