v2.4.0.6

Commitments and Contingencies (Details Textual) (USD $) | 3 Months Ended | 12 Months Ended
--- | --- | ---
Mar. 31, 2012 | Dec. 29, 2012 | Dec. 31, 2011 | Jan. 01, 2011
Commitments and Contingencies (Textual) [Abstract] |  |  |  |
Liabilities recorded for obligations |  | $ 0 | $ 0 |
One time payment to KLA | 2,500,000 |  |  |
Legal settlement in operating expense |  |  | 2,500,000 |
Rent expense |  | $ 2,200,000 | $ 1,800,000 | $ 1,400,000

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- Details
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Namespace Prefix: | nano_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition Intellectual property indemnification obligations. + References No definition available. + Details
Name: | nano_IntellectualPropertyIndemnificationObligations
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

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- Definition Rental expense incurred for leased assets including furniture and equipment which has not been recognized in costs and expenses applicable to sales and revenues; for example, cost of goods sold or other operating costs and expenses. + References No definition available. + Details
Name: | us-gaap_LeaseAndRentalExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition This element represents the expenses incurred by the entity which are directly related and attributable to receiving an award in settlement of litigation. + References No definition available. + Details
Name: | us-gaap_LitigationSettlementExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition The amount of cash paid for the settlement of litigation or for other legal issues during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 25 -Subparagraph (g) -URI http://asc.fasb.org/extlink&oid=6943989&loc=d3e3536-108585 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 95 -Paragraph 27 -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. + Details
Name: | us-gaap_PaymentsForLegalSettlements
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration