The Nanometrics option plans are as follows: | | | | | Plan Name | Participants | Shares
Authorized | 2005 Equity Incentive Plan | Employees, consultants and directors | 4,692,594 |
| 2002 Non-statutory Stock Option Plan | Employees and consultants | 1,200,000 |
| 2000 Employee Stock Option Plan | Employees and consultants | 2,450,000 |
| 2000 Director Stock Option Plan | Non-employee directors | 250,000 |
| Accent Optical Technologies, Inc. Stock Incentive Plan | Employees and consultants | 205,003 |
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