|
Fair Value Measurements and Disclosures (Details 1) (Level 3 [Member], USD $)
In Thousands, unless otherwise specified |
12 Months Ended | |
|---|---|---|
|
Dec. 29, 2012
|
Dec. 31, 2011
|
|
| Fair value measurement on recurring basis, unobservable input reconciliation | ||
| Fair value, beginning balance | $ 3,194 | $ 2,652 |
| Change in fair value related to foreign currency exchange rate | (25) | |
| Change in fair value included in earnings | 129 | 413 |
| Fair Value, ending balance | 2,462 | 3,194 |
|
Zygo Corporation [Member]
|
||
| Fair value measurement on recurring basis, unobservable input reconciliation | ||
| Payments made to Zygo Corporation | (300) | (432) |
|
Nanda [Member]
|
||
| Fair value measurement on recurring basis, unobservable input reconciliation | ||
| Addition: Fair value of royalty payment to RTM related to acquisition of Nanda | 586 | |
| Adjustment to the purchase price allocation of royalty payments to RTM related to acquisition of Nanda Technologies GmbH | $ (561) | |