<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with WebFilings-->
<!-- -->
<xsd:schema attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://www.nanometrics.com/20130629" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:nano="http://www.nanometrics.com/20130629" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:us-types="http://fasb.org/us-types/2012-01-31" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <xsd:import namespace="http://fasb.org/us-gaap/2012-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2012-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2012/elts/us-roles-2012-01-31.xsd" />
  <xsd:import namespace="http://fasb.org/us-types/2012-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2012/elts/us-types-2012-01-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact" schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/net" schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/country/2012-01-31" schemaLocation="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/currency/2012-01-31" schemaLocation="http://xbrl.sec.gov/currency/2012/currency-2012-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/dei/2012-01-31" schemaLocation="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/exch/2012-01-31" schemaLocation="http://xbrl.sec.gov/exch/2012/exch-2012-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/invest/2012-01-31" schemaLocation="http://xbrl.sec.gov/invest/2012/invest-2012-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/naics/2011-01-31" schemaLocation="http://xbrl.sec.gov/naics/2011/naics-2011-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/sic/2011-01-31" schemaLocation="http://xbrl.sec.gov/sic/2011/sic-2011-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/stpr/2011-01-31" schemaLocation="http://xbrl.sec.gov/stpr/2011/stpr-2011-01-31.xsd" />
  <xsd:annotation>
    <xsd:appinfo>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="nano-20130629_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="nano-20130629_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="nano-20130629_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="nano-20130629_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:type="simple" />
      <link:roleType id="AccountsReceivable" roleURI="http://www.nanometrics.com/role/AccountsReceivable">
        <link:definition>2106100 - Disclosure - Accounts Receivable</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="AccountsReceivableDetailsTextual" roleURI="http://www.nanometrics.com/role/AccountsReceivableDetailsTextual">
        <link:definition>2406401 - Disclosure - Accounts Receivable (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CashAndInvestmentsCashAndInvestmentsTextualDetails" roleURI="http://www.nanometrics.com/role/CashAndInvestmentsCashAndInvestmentsTextualDetails">
        <link:definition>2404403 - Disclosure - Cash and Investments Cash and Investments Textual (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CashAndInvestmentsDetails" roleURI="http://www.nanometrics.com/role/CashAndInvestmentsDetails">
        <link:definition>2404402 - Disclosure - Cash and Investments (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CashAndInvestmentsNotes" roleURI="http://www.nanometrics.com/role/CashAndInvestmentsNotes">
        <link:definition>2104100 - Disclosure - Cash and Investments (Notes)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CashAndInvestmentsTables" roleURI="http://www.nanometrics.com/role/CashAndInvestmentsTables">
        <link:definition>2304301 - Disclosure - Cash and Investments (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsAndContingencies" roleURI="http://www.nanometrics.com/role/CommitmentsAndContingencies">
        <link:definition>2116100 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsAndContingenciesDetailsTextual" roleURI="http://www.nanometrics.com/role/CommitmentsAndContingenciesDetailsTextual">
        <link:definition>2416401 - Disclosure - Commitments and Contingencies (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedBalanceSheetsParentheticalUnaudited" roleURI="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsParentheticalUnaudited">
        <link:definition>1001501 - Statement - Condensed Consolidated Balance Sheets (Parenthetical) (Unaudited)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedBalanceSheetsUnaudited" roleURI="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsUnaudited">
        <link:definition>1001000 - Statement - Condensed Consolidated Balance Sheets (Unaudited)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfCashFlowsUnaudited" roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited">
        <link:definition>1004000 - Statement - Condensed Consolidated Statements of Cash Flows (Unaudited)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement" roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement">
        <link:definition>1003000 - Statement - Condensed Consolidated Statements of Comprehensive Income (Loss) Statement</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfOperationsUnaudited" roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited">
        <link:definition>1002000 - Statement - Condensed Consolidated Statements of Operations (Unaudited)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DocumentAndEntityInformation" roleURI="http://www.nanometrics.com/role/DocumentAndEntityInformation">
        <link:definition>0001000 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlans" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlans">
        <link:definition>2113100 - Disclosure - Equity and Stock Based Compensation Plans</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlansDetails" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails">
        <link:definition>2413402 - Disclosure - Equity and Stock Based Compensation Plans (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlansDetails1" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails1">
        <link:definition>2413403 - Disclosure - Equity and Stock Based Compensation Plans (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlansDetails2" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails2">
        <link:definition>2413405 - Disclosure - Equity and Stock Based Compensation Plans (Details 2)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlansDetails3" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails3">
        <link:definition>2413406 - Disclosure - Equity and Stock Based Compensation Plans (Details 3)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlansDetails4" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails4">
        <link:definition>2413407 - Disclosure - Equity and Stock Based Compensation Plans (Details 4)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlansDetailsTextual" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetailsTextual">
        <link:definition>2413404 - Disclosure - Equity and Stock Based Compensation Plans (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EquityAndStockBasedCompensationPlansTables" roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansTables">
        <link:definition>2313301 - Disclosure - Equity and Stock Based Compensation Plans (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueMeasurementsAndDisclosures" roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosures">
        <link:definition>2103100 - Disclosure - Fair Value Measurements and Disclosures</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueMeasurementsAndDisclosuresDetails" roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails">
        <link:definition>2403402 - Disclosure - Fair Value Measurements and Disclosures (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueMeasurementsAndDisclosuresDetails1" roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails1">
        <link:definition>2403403 - Disclosure - Fair Value Measurements and Disclosures (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueMeasurementsAndDisclosuresDetailsTextual" roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetailsTextual">
        <link:definition>2403404 - Disclosure - Fair Value Measurements and Disclosures (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="FairValueMeasurementsAndDisclosuresTables" roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresTables">
        <link:definition>2303301 - Disclosure - Fair Value Measurements and Disclosures (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GeographicAndSignificantCustomerInformation" roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformation">
        <link:definition>2117100 - Disclosure - Geographic and Significant Customer Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GeographicAndSignificantCustomerInformationDetails" roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails">
        <link:definition>2417402 - Disclosure - Geographic and Significant Customer Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GeographicAndSignificantCustomerInformationDetails1" roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails1">
        <link:definition>2417403 - Disclosure - Geographic and Significant Customer Information (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GeographicAndSignificantCustomerInformationDetails2" roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails2">
        <link:definition>2417404 - Disclosure - Geographic and Significant Customer Information (Details 2)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GeographicAndSignificantCustomerInformationDetails3" roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails3">
        <link:definition>2417405 - Disclosure - Geographic and Significant Customer Information (Details 3)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GeographicAndSignificantCustomerInformationTables" roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationTables">
        <link:definition>2317301 - Disclosure - Geographic and Significant Customer Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="GoodwillImpairmentAndLongLivedAssetImpairment" roleURI="http://www.nanometrics.com/role/GoodwillImpairmentAndLongLivedAssetImpairment">
        <link:definition>2105100 - Disclosure - Goodwill Impairment and Long-lived Asset Impairment</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxes" roleURI="http://www.nanometrics.com/role/IncomeTaxes">
        <link:definition>2115100 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesDetailsTextual" roleURI="http://www.nanometrics.com/role/IncomeTaxesDetailsTextual">
        <link:definition>2415401 - Disclosure - Income Taxes (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IntangibleAssets" roleURI="http://www.nanometrics.com/role/IntangibleAssets">
        <link:definition>2109100 - Disclosure - Intangible Assets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IntangibleAssetsDetails" roleURI="http://www.nanometrics.com/role/IntangibleAssetsDetails">
        <link:definition>2409402 - Disclosure - Intangible Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IntangibleAssetsDetailsTextual" roleURI="http://www.nanometrics.com/role/IntangibleAssetsDetailsTextual">
        <link:definition>2409403 - Disclosure - Intangible Assets (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IntangibleAssetsFutureAmortizationExpenseDetails" roleURI="http://www.nanometrics.com/role/IntangibleAssetsFutureAmortizationExpenseDetails">
        <link:definition>2409404 - Disclosure - Intangible Assets (Future Amortization Expense) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IntangibleAssetsTables" roleURI="http://www.nanometrics.com/role/IntangibleAssetsTables">
        <link:definition>2309301 - Disclosure - Intangible Assets (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="Inventories" roleURI="http://www.nanometrics.com/role/Inventories">
        <link:definition>2107100 - Disclosure - Inventories</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="InventoriesDetails" roleURI="http://www.nanometrics.com/role/InventoriesDetails">
        <link:definition>2407402 - Disclosure - Inventories (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="InventoriesTables" roleURI="http://www.nanometrics.com/role/InventoriesTables">
        <link:definition>2307301 - Disclosure - Inventories (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LineOfCreditAndDebtObligationTables" roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationTables">
        <link:definition>2311301 - Disclosure - Line of Credit and Debt Obligation (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LineOfCreditAndDebtObligations" roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligations">
        <link:definition>2111100 - Disclosure - Line of Credit and Debt Obligations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LineOfCreditAndDebtObligationsDetails" roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails">
        <link:definition>2411402 - Disclosure - Line of Credit and Debt Obligations (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LineOfCreditAndDebtObligationsDetails1" roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails1">
        <link:definition>2411404 - Disclosure - Line of Credit and Debt Obligations (Details 1)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LineOfCreditAndDebtObligationsDetailsTextual" roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetailsTextual">
        <link:definition>2411403 - Disclosure - Line of Credit and Debt Obligations (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="NatureOfBusinessAndBasisOfPresentation" roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentation">
        <link:definition>2101100 - Disclosure - Nature of Business and Basis of Presentation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="NatureOfBusinessAndBasisOfPresentationDetailsTextual" roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationDetailsTextual">
        <link:definition>2401402 - Disclosure - Nature of Business and Basis of Presentation (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="NatureOfBusinessAndBasisOfPresentationPolicies" roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationPolicies">
        <link:definition>2201201 - Disclosure - Nature of Business and Basis of Presentation (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="NetIncomeLossPerShare" roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShare">
        <link:definition>2112100 - Disclosure - Net Income/(Loss) Per Share</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="NetIncomeLossPerShareDetails" roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShareDetails">
        <link:definition>2412402 - Disclosure - Net Income/(Loss) Per Share  (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="NetIncomeLossPerShareTables" roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShareTables">
        <link:definition>2312301 - Disclosure - Net Income/(Loss) Per Share  (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="OtherCurrentLiabilities" roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilities">
        <link:definition>2110100 - Disclosure - Other Current Liabilities</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="OtherCurrentLiabilitiesDetails" roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilitiesDetails">
        <link:definition>2410402 - Disclosure - Other Current Liabilities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="OtherCurrentLiabilitiesTables" roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilitiesTables">
        <link:definition>2310301 - Disclosure - Other Current Liabilities (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="PropertyPlantAndEquipment" roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipment">
        <link:definition>2108100 - Disclosure - Property, Plant and Equipment</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="PropertyPlantAndEquipmentDetails" roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipmentDetails">
        <link:definition>2408402 - Disclosure - Property, Plant and Equipment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="PropertyPlantAndEquipmentTables" roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipmentTables">
        <link:definition>2308301 - Disclosure - Property, Plant and Equipment (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RecentAccountingPronouncements" roleURI="http://www.nanometrics.com/role/RecentAccountingPronouncements">
        <link:definition>2102100 - Disclosure - Recent Accounting Pronouncements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockRepurchase" roleURI="http://www.nanometrics.com/role/StockRepurchase">
        <link:definition>2118100 - Disclosure - Stock Repurchase</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockRepurchaseDetailsTextual" roleURI="http://www.nanometrics.com/role/StockRepurchaseDetailsTextual">
        <link:definition>2418401 - Disclosure - Stock Repurchase (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEventDetails" roleURI="http://www.nanometrics.com/role/SubsequentEventDetails">
        <link:definition>2419401 - Disclosure - Subsequent Event (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEventSubsequentEvent" roleURI="http://www.nanometrics.com/role/SubsequentEventSubsequentEvent">
        <link:definition>2119100 - Disclosure - Subsequent Event Subsequent Event</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="Warranties" roleURI="http://www.nanometrics.com/role/Warranties">
        <link:definition>2114100 - Disclosure - Warranties</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="WarrantiesDetails" roleURI="http://www.nanometrics.com/role/WarrantiesDetails">
        <link:definition>2414403 - Disclosure - Warranties (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="WarrantiesDetailsTextual" roleURI="http://www.nanometrics.com/role/WarrantiesDetailsTextual">
        <link:definition>2414402 - Disclosure - Warranties (Details Textual)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="WarrantiesTables" roleURI="http://www.nanometrics.com/role/WarrantiesTables">
        <link:definition>2314301 - Disclosure - Warranties (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:element abstract="true" id="nano_AccountsReceivableAdditionalTextualAbstract" name="AccountsReceivableAdditionalTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_AccountsReceivableTextualAbstract" name="AccountsReceivableTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_AccumulatedOtherComprehensiveIncomeLineItems" name="AccumulatedOtherComprehensiveIncomeLineItems" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_AccumulatedOtherComprehensiveIncomeLossRollForward" name="AccumulatedOtherComprehensiveIncomeLossRollForward" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_AccumulatedOtherComprehensiveIncomeTable" name="AccumulatedOtherComprehensiveIncomeTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_AcquisitionGoodwillImpairmentAndLongLivedAssetImpairmentTextBlock" name="AcquisitionGoodwillImpairmentAndLongLivedAssetImpairmentTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_AcquisitionsAndGoodwillAndLongLivedAssetImpairmentAbstract" name="AcquisitionsAndGoodwillAndLongLivedAssetImpairmentAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_AdministrativeFeesAndInterestPercent" name="AdministrativeFeesAndInterestPercent" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_AmortizationExpenseFiniteLivedIntangibleAssets" name="AmortizationExpenseFiniteLivedIntangibleAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element id="nano_AmortizationPeriodOfMortgageLoanAfterSixtyMonth" name="AmortizationPeriodOfMortgageLoanAfterSixtyMonth" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_AmortizationPeriodOfMortgageLoanForSixtyMonth" name="AmortizationPeriodOfMortgageLoanForSixtyMonth" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_CashAndInvestmentsAdditionalDisclosuresAbstract" name="CashAndInvestmentsAdditionalDisclosuresAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ChangesInFairValueOfContingentPayments" name="ChangesInFairValueOfContingentPayments" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_CommercialPaperCorporateDebtSecuritiesandMunicipalSecuritiesMember" name="CommercialPaperCorporateDebtSecuritiesandMunicipalSecuritiesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_CommitmentsAndContingenciesTextualAbstract" name="CommitmentsAndContingenciesTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_ComponentOfInventoriesAbstract" name="ComponentOfInventoriesAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_CostOfProductsAmortizationOfIntangibleAssets" name="CostOfProductsAmortizationOfIntangibleAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_CostOfProductsMember" name="CostOfProductsMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_CostOfServiceMember" name="CostOfServiceMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_DebtInstrumentInterestRateStatedPercentageAfterYearFive" name="DebtInstrumentInterestRateStatedPercentageAfterYearFive" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="instant" />
  <xsd:element id="nano_DebtInstrumentPrePayment" name="DebtInstrumentPrePayment" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_DebtObligationsAbstract" name="DebtObligationsAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_DescriptionOfBusinessPolicyTextBlock" name="DescriptionOfBusinessPolicyTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_DocumentAndEntityInformationAbstract" name="DocumentAndEntityInformationAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_DueFromUnrelatedThirdParties" name="DueFromUnrelatedThirdParties" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="nano_EarlyRepaymentPercentOfOutstandingDebt" name="EarlyRepaymentPercentOfOutstandingDebt" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_EmployeeStockPurchasePlanMember" name="EmployeeStockPurchasePlanMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_EntityWideAccountsReceivableMajorCustomerPercentage" name="EntityWideAccountsReceivableMajorCustomerPercentage" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="nano_FairValueMeasurementsAndDisclosuresTextualAbstract" name="FairValueMeasurementsAndDisclosuresTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal" name="FiniteLivedIntangibleAssetsAmortizationExpenseTotal" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="nano_FiscalYearReportingPeriod" name="FiscalYearReportingPeriod" nillable="true" substitutionGroup="xbrli:item" type="us-types:durationStringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_GeographicAndSignificantCustomerInformationAbstract" name="GeographicAndSignificantCustomerInformationAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_GeographicAndSignificantCustomerInformationTextBlock" name="GeographicAndSignificantCustomerInformationTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_IncomeTaxBenefitResearchTaxCredit" name="IncomeTaxBenefitResearchTaxCredit" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_IncomeTaxesTextualAbstract" name="IncomeTaxesTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_IncreaseDecreaseInventoriesDeliveredSystems" name="IncreaseDecreaseInventoriesDeliveredSystems" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_IntangibleAssetsAdditionalTextualAbstract" name="IntangibleAssetsAdditionalTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_IntangibleAssetsTextualAbstract" name="IntangibleAssetsTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_IntelCorporationMember" name="IntelCorporationMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_IntellectualPropertyIndemnificationObligations" name="IntellectualPropertyIndemnificationObligations" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="nano_InventoriesDeliveredSystems" name="InventoriesDeliveredSystems" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="nano_Inventory" name="Inventory" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract" name="LineOfCreditAndDebtObligationsAdditionalTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_LineOfCreditAndDebtObligationsTextualAbstract" name="LineOfCreditAndDebtObligationsTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_LineOfCreditFacilityBorrowingLimitUnderConditionTwo" name="LineOfCreditFacilityBorrowingLimitUnderConditionTwo" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageDecreased" name="LineOfCreditFacilityCommitmentFeeMinimumPercentageDecreased" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="instant" />
  <xsd:element id="nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageFurtherDecreased" name="LineOfCreditFacilityCommitmentFeeMinimumPercentageFurtherDecreased" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="instant" />
  <xsd:element id="nano_LineOfCreditFacilityExtensionOfMaturityPeriod" name="LineOfCreditFacilityExtensionOfMaturityPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_LineOfCreditFacilityMonthlyPrincipalAndInterestPaymentDescription" name="LineOfCreditFacilityMonthlyPrincipalAndInterestPaymentDescription" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_LineOfCreditFacilityStandardBorrowingLimitUnderConditionOne" name="LineOfCreditFacilityStandardBorrowingLimitUnderConditionOne" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="nano_MaturityDateLineOfCreditFacility" name="MaturityDateLineOfCreditFacility" nillable="true" substitutionGroup="xbrli:item" type="xbrli:dateItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_MaximumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsCashEquivalents" name="MaximumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsCashEquivalents" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_MaximumPeriodOfAvailableForSaleSecuritiesDebtMaturities" name="MaximumPeriodOfAvailableForSaleSecuritiesDebtMaturities" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_MaximumPeriodOfDeliveryToCustomersUnderServiceContractArrangements" name="MaximumPeriodOfDeliveryToCustomersUnderServiceContractArrangements" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_MayTwentyNineTwoThousandTwelveProgramMember" name="MayTwentyNineTwoThousandTwelveProgramMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_MicronTechnologyInc.Member" name="MicronTechnologyInc.Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_MinimumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsMarketableSecurities" name="MinimumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsMarketableSecurities" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_MortgageObligation" name="MortgageObligation" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="nano_NatureOfBusinessAndBasisOfPresentationAbstract" name="NatureOfBusinessAndBasisOfPresentationAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract" name="NatureOfBusinessAndBasisOfPresentationTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_NumberOfWeeksInFiscalQuarter" name="NumberOfWeeksInFiscalQuarter" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_OptionsAbstract" name="OptionsAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_OtherCountriesMember" name="OtherCountriesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_OtherIncomeExpenseNet" name="OtherIncomeExpenseNet" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_PercentageOfAccountsReceivableNetAbstract" name="PercentageOfAccountsReceivableNetAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ProceedsFromAccountsReceivable" name="ProceedsFromAccountsReceivable" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="nano_ProceedsFromEscrowRelatedToAcquisition" name="ProceedsFromEscrowRelatedToAcquisition" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_ProductWarrantiesTextualAbstract" name="ProductWarrantiesTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ProductWarrantyPeriod" name="ProductWarrantyPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_ProjectsInProgressMember" name="ProjectsInProgressMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_PropertyPlantAndEquipmentTextualAbstract" name="PropertyPlantAndEquipmentTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_RecentAccountingPronouncementsAbstract" name="RecentAccountingPronouncementsAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_RecentAccountingPronouncementsTextBlock" name="RecentAccountingPronouncementsTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_SamsungElectronicsMember" name="SamsungElectronicsMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ScheduleOfCashCashEquivalentsAndAvailableForSaleSecuritiesReconciliationTableTextBlock" name="ScheduleOfCashCashEquivalentsAndAvailableForSaleSecuritiesReconciliationTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ScheduleOfOtherCurrentLiabilityTableTextBlock" name="ScheduleOfOtherCurrentLiabilityTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ScheduleOfPercentageAccountsReceivableByMajorCustomersByReportingSegmentsTableTextBlock" name="ScheduleOfPercentageAccountsReceivableByMajorCustomersByReportingSegmentsTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ScheduleOfPercentageOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" name="ScheduleOfPercentageOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsReleasedInPeriodWeightedAverageGrantDateFairValue" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsReleasedInPeriodWeightedAverageGrantDateFairValue" nillable="true" substitutionGroup="xbrli:item" type="num:perShareItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAndEquityInstrumentsOtherThanOptionsReleasedInPeriod" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAndEquityInstrumentsOtherThanOptionsReleasedInPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsShareClosingPrice" name="ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsShareClosingPrice" nillable="true" substitutionGroup="xbrli:item" type="num:perShareItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_ShareBasedCompensationStockOptionsActivityAbstract" name="ShareBasedCompensationStockOptionsActivityAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_SharesUsedInPerShareCalculationAbstract" name="SharesUsedInPerShareCalculationAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_ShortTermMarketableSecuritiesMember" name="ShortTermMarketableSecuritiesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_SkHynixMember" name="SkHynixMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_StockBasedCompensationAdditionalTextualAbstract" name="StockBasedCompensationAdditionalTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_StockBasedCompensationExpenseForShareBasedCompensationsAbstract" name="StockBasedCompensationExpenseForShareBasedCompensationsAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_StockRepurchaseTextualAbstract" name="StockRepurchaseTextualAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_TaiwanSemiconductorMfgCoMember" name="TaiwanSemiconductorMfgCoMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_UsTreasuryAndGovernmentAndGovernmentAgencyDebtSecuritiesMember" name="UsTreasuryAndGovernmentAndGovernmentAgencyDebtSecuritiesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="nano_WeightedAverageRepurchasePriceOfCommonStock" name="WeightedAverageRepurchasePriceOfCommonStock" nillable="true" substitutionGroup="xbrli:item" type="num:perShareItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="nano_ZygoCorporationMember" name="ZygoCorporationMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
</xsd:schema>
