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Commitments and Contingencies (Details Textual) (USD $) In Millions, unless otherwise specified | 3 Months Ended | 12 Months Ended |  |
--- | --- | --- | --- | ---
Mar. 31, 2012 | Dec. 31, 2011 | Jun. 29, 2013 | Dec. 29, 2012
Commitments and Contingencies (Textual) [Abstract] |  |  |  |
Liabilities recorded for obligations |  |  | $ 0 | $ 0
One time payment to KLA | $ 2.5 | $ 2.5 |  |

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- Details
Name: | nano_CommitmentsAndContingenciesTextualAbstract
Namespace Prefix: | nano_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition Intellectual property indemnification obligations. + References No definition available. + Details
Name: | nano_IntellectualPropertyIndemnificationObligations
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

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- Definition The amount of cash paid for the settlement of litigation or for other legal issues during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 25 -Subparagraph (g) -URI http://asc.fasb.org/extlink&oid=6943989&loc=d3e3536-108585 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 95 -Paragraph 27 -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. + Details
Name: | us-gaap_PaymentsForLegalSettlements
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration