<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with WebFilings-->
<!-- -->
<linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <roleRef roleURI="http://www.nanometrics.com/role/AccountsReceivable" xlink:href="nano-20130629.xsd#AccountsReceivable" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/AccountsReceivableDetailsTextual" xlink:href="nano-20130629.xsd#AccountsReceivableDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsCashAndInvestmentsTextualDetails" xlink:href="nano-20130629.xsd#CashAndInvestmentsCashAndInvestmentsTextualDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsDetails" xlink:href="nano-20130629.xsd#CashAndInvestmentsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsNotes" xlink:href="nano-20130629.xsd#CashAndInvestmentsNotes" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsTables" xlink:href="nano-20130629.xsd#CashAndInvestmentsTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CommitmentsAndContingencies" xlink:href="nano-20130629.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CommitmentsAndContingenciesDetailsTextual" xlink:href="nano-20130629.xsd#CommitmentsAndContingenciesDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsParentheticalUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedBalanceSheetsParentheticalUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedBalanceSheetsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement" xlink:href="nano-20130629.xsd#CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/DocumentAndEntityInformation" xlink:href="nano-20130629.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlans" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlans" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails1" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails2" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails2" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails3" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails3" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails4" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails4" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetailsTextual" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansTables" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosures" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosures" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails1" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetailsTextual" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresTables" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformation" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails1" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails2" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails2" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails3" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails3" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationTables" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GoodwillImpairmentAndLongLivedAssetImpairment" xlink:href="nano-20130629.xsd#GoodwillImpairmentAndLongLivedAssetImpairment" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IncomeTaxes" xlink:href="nano-20130629.xsd#IncomeTaxes" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IncomeTaxesDetailsTextual" xlink:href="nano-20130629.xsd#IncomeTaxesDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssets" xlink:href="nano-20130629.xsd#IntangibleAssets" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsDetails" xlink:href="nano-20130629.xsd#IntangibleAssetsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsDetailsTextual" xlink:href="nano-20130629.xsd#IntangibleAssetsDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsFutureAmortizationExpenseDetails" xlink:href="nano-20130629.xsd#IntangibleAssetsFutureAmortizationExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsTables" xlink:href="nano-20130629.xsd#IntangibleAssetsTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/Inventories" xlink:href="nano-20130629.xsd#Inventories" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/InventoriesDetails" xlink:href="nano-20130629.xsd#InventoriesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/InventoriesTables" xlink:href="nano-20130629.xsd#InventoriesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationTables" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligations" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligations" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails1" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationsDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetailsTextual" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationsDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentation" xlink:href="nano-20130629.xsd#NatureOfBusinessAndBasisOfPresentation" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationDetailsTextual" xlink:href="nano-20130629.xsd#NatureOfBusinessAndBasisOfPresentationDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationPolicies" xlink:href="nano-20130629.xsd#NatureOfBusinessAndBasisOfPresentationPolicies" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShare" xlink:href="nano-20130629.xsd#NetIncomeLossPerShare" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShareDetails" xlink:href="nano-20130629.xsd#NetIncomeLossPerShareDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShareTables" xlink:href="nano-20130629.xsd#NetIncomeLossPerShareTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilities" xlink:href="nano-20130629.xsd#OtherCurrentLiabilities" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilitiesDetails" xlink:href="nano-20130629.xsd#OtherCurrentLiabilitiesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilitiesTables" xlink:href="nano-20130629.xsd#OtherCurrentLiabilitiesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipment" xlink:href="nano-20130629.xsd#PropertyPlantAndEquipment" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipmentDetails" xlink:href="nano-20130629.xsd#PropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipmentTables" xlink:href="nano-20130629.xsd#PropertyPlantAndEquipmentTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/RecentAccountingPronouncements" xlink:href="nano-20130629.xsd#RecentAccountingPronouncements" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/StockRepurchase" xlink:href="nano-20130629.xsd#StockRepurchase" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/StockRepurchaseDetailsTextual" xlink:href="nano-20130629.xsd#StockRepurchaseDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/SubsequentEventDetails" xlink:href="nano-20130629.xsd#SubsequentEventDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/SubsequentEventSubsequentEvent" xlink:href="nano-20130629.xsd#SubsequentEventSubsequentEvent" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/Warranties" xlink:href="nano-20130629.xsd#Warranties" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/WarrantiesDetails" xlink:href="nano-20130629.xsd#WarrantiesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/WarrantiesDetailsTextual" xlink:href="nano-20130629.xsd#WarrantiesDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/WarrantiesTables" xlink:href="nano-20130629.xsd#WarrantiesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple" />
  <roleRef roleURI="http://www.xbrl.org/2009/role/netLabel" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" xlink:type="simple" />
  <presentationLink xlink:role="http://www.nanometrics.com/role/AccountsReceivable" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ReceivablesAbstract" xlink:label="loc_us-gaap_ReceivablesAbstract_9A88D5A9A971E894172CB47ADAC9293C" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TransfersAndServicingOfFinancialAssetsTextBlock" xlink:label="loc_us-gaap_TransfersAndServicingOfFinancialAssetsTextBlock_B5A2EF677655D1306F35B47ADAC99613" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ReceivablesAbstract_9A88D5A9A971E894172CB47ADAC9293C" xlink:to="loc_us-gaap_TransfersAndServicingOfFinancialAssetsTextBlock_B5A2EF677655D1306F35B47ADAC99613" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/AccountsReceivableDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ReceivablesAbstract" xlink:label="loc_us-gaap_ReceivablesAbstract_7C71FC4CD0A831669F4E373BFA61929F" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTable" xlink:label="loc_us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTable_7928AED0B44B60726F23373BFA6257FD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ReceivablesAbstract_7C71FC4CD0A831669F4E373BFA61929F" xlink:to="loc_us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTable_7928AED0B44B60726F23373BFA6257FD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_1004F5AB47AAE70918C6373BFA621417" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTable_7928AED0B44B60726F23373BFA6257FD" xlink:to="loc_us-gaap_RangeAxis_1004F5AB47AAE70918C6373BFA621417" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_108FD9E21ABF0638274B373BFA62E0FE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_1004F5AB47AAE70918C6373BFA621417" xlink:to="loc_us-gaap_RangeMember_108FD9E21ABF0638274B373BFA62E0FE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_B5DA30318E2D7699CBFE373BFA6287C0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_108FD9E21ABF0638274B373BFA62E0FE" xlink:to="loc_us-gaap_MinimumMember_B5DA30318E2D7699CBFE373BFA6287C0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_21F39DB84488F41D577E373BFA62D4D9" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_108FD9E21ABF0638274B373BFA62E0FE" xlink:to="loc_us-gaap_MaximumMember_21F39DB84488F41D577E373BFA62D4D9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountsNotesAndLoansReceivableLineItems" xlink:label="loc_us-gaap_AccountsNotesAndLoansReceivableLineItems_1CC1E864555F48166754373BFA62FFB4" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTable_7928AED0B44B60726F23373BFA6257FD" xlink:to="loc_us-gaap_AccountsNotesAndLoansReceivableLineItems_1CC1E864555F48166754373BFA62FFB4" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AccountsReceivableTextualAbstract" xlink:label="loc_nano_AccountsReceivableTextualAbstract_303C44CDA9E7555234B5373BFA62F68C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AccountsNotesAndLoansReceivableLineItems_1CC1E864555F48166754373BFA62FFB4" xlink:to="loc_nano_AccountsReceivableTextualAbstract_303C44CDA9E7555234B5373BFA62F68C" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AdministrativeFeesAndInterestPercent" xlink:label="loc_nano_AdministrativeFeesAndInterestPercent_D765DBA250DED33EB727373BFA62EA21" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccountsReceivableTextualAbstract_303C44CDA9E7555234B5373BFA62F68C" xlink:to="loc_nano_AdministrativeFeesAndInterestPercent_D765DBA250DED33EB727373BFA62EA21" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AccountsReceivableAdditionalTextualAbstract" xlink:label="loc_nano_AccountsReceivableAdditionalTextualAbstract_F2D829426F0DD36EAB64373BFA62E265" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ReceivablesAbstract_7C71FC4CD0A831669F4E373BFA61929F" xlink:to="loc_nano_AccountsReceivableAdditionalTextualAbstract_F2D829426F0DD36EAB64373BFA62E265" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ProceedsFromAccountsReceivable" xlink:label="loc_nano_ProceedsFromAccountsReceivable_61B3424FEA1E67CB34EE373BFA6245D0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccountsReceivableAdditionalTextualAbstract_F2D829426F0DD36EAB64373BFA62E265" xlink:to="loc_nano_ProceedsFromAccountsReceivable_61B3424FEA1E67CB34EE373BFA6245D0" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_DueFromUnrelatedThirdParties" xlink:label="loc_nano_DueFromUnrelatedThirdParties_BCE13C330FDE0C2425B5373BFA624596" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccountsReceivableAdditionalTextualAbstract_F2D829426F0DD36EAB64373BFA62E265" xlink:to="loc_nano_DueFromUnrelatedThirdParties_BCE13C330FDE0C2425B5373BFA624596" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsCashAndInvestmentsTextualDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_AB498996FDAFC3811185B47ADAC9FE3E" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_CashAndInvestmentsAdditionalDisclosuresAbstract" xlink:label="loc_nano_CashAndInvestmentsAdditionalDisclosuresAbstract_FBCF88B54BC8EAB40873B47ADAC90361" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_AB498996FDAFC3811185B47ADAC9FE3E" xlink:to="loc_nano_CashAndInvestmentsAdditionalDisclosuresAbstract_FBCF88B54BC8EAB40873B47ADAC90361" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MaximumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsCashEquivalents" xlink:label="loc_nano_MaximumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsCashEquivalents_5E636640F82850606740B47ADAC919C3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_CashAndInvestmentsAdditionalDisclosuresAbstract_FBCF88B54BC8EAB40873B47ADAC90361" xlink:to="loc_nano_MaximumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsCashEquivalents_5E636640F82850606740B47ADAC919C3" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MinimumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsMarketableSecurities" xlink:label="loc_nano_MinimumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsMarketableSecurities_DA16E873337A73F2AF18B47ADAC9849F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_CashAndInvestmentsAdditionalDisclosuresAbstract_FBCF88B54BC8EAB40873B47ADAC90361" xlink:to="loc_nano_MinimumMaturityPeriodOfAvailableForSaleMarketableSecuritiesClassifiedAsMarketableSecurities_DA16E873337A73F2AF18B47ADAC9849F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MarketableSecuritiesUnrealizedGainLoss" xlink:label="loc_us-gaap_MarketableSecuritiesUnrealizedGainLoss_B5F9A6218956074077E2B47ADAC93733" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_CashAndInvestmentsAdditionalDisclosuresAbstract_FBCF88B54BC8EAB40873B47ADAC90361" xlink:to="loc_us-gaap_MarketableSecuritiesUnrealizedGainLoss_B5F9A6218956074077E2B47ADAC93733" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MaximumPeriodOfAvailableForSaleSecuritiesDebtMaturities" xlink:label="loc_nano_MaximumPeriodOfAvailableForSaleSecuritiesDebtMaturities_813CB9D1C15B7C3D397CB47ADAC9FE79" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_CashAndInvestmentsAdditionalDisclosuresAbstract_FBCF88B54BC8EAB40873B47ADAC90361" xlink:to="loc_nano_MaximumPeriodOfAvailableForSaleSecuritiesDebtMaturities_813CB9D1C15B7C3D397CB47ADAC9FE79" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_E161F62A8670B16FB04B2C458FD0CAE9" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesTable" xlink:label="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesTable_0C8A0CC14EB65A5897CD2C458FD1E00F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_E161F62A8670B16FB04B2C458FD0CAE9" xlink:to="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesTable_0C8A0CC14EB65A5897CD2C458FD1E00F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="loc_us-gaap_BalanceSheetLocationAxis_9277C20B10682B7B29C92C458FD207C6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesTable_0C8A0CC14EB65A5897CD2C458FD1E00F" xlink:to="loc_us-gaap_BalanceSheetLocationAxis_9277C20B10682B7B29C92C458FD207C6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="loc_us-gaap_BalanceSheetLocationDomain_7504EEBB5C6CC6B032582C458FD25548" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationAxis_9277C20B10682B7B29C92C458FD207C6" xlink:to="loc_us-gaap_BalanceSheetLocationDomain_7504EEBB5C6CC6B032582C458FD25548" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsMember" xlink:label="loc_us-gaap_CashAndCashEquivalentsMember_F32052DE550D1BEAB4252C458FD2379B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_7504EEBB5C6CC6B032582C458FD25548" xlink:to="loc_us-gaap_CashAndCashEquivalentsMember_F32052DE550D1BEAB4252C458FD2379B" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ShortTermMarketableSecuritiesMember" xlink:label="loc_nano_ShortTermMarketableSecuritiesMember_13379144AAC714A45AED2C458FD28007" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_7504EEBB5C6CC6B032582C458FD25548" xlink:to="loc_nano_ShortTermMarketableSecuritiesMember_13379144AAC714A45AED2C458FD28007" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MajorTypesOfDebtAndEquitySecuritiesAxis" xlink:label="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesAxis_13CE2B889C3B06FD3A5B2C458FD2656A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesTable_0C8A0CC14EB65A5897CD2C458FD1E00F" xlink:to="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesAxis_13CE2B889C3B06FD3A5B2C458FD2656A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain" xlink:label="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesAxis_13CE2B889C3B06FD3A5B2C458FD2656A" xlink:to="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashMember" xlink:label="loc_us-gaap_CashMember_4735F985C19AB1C4D6852C458FD224D9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_CashMember_4735F985C19AB1C4D6852C458FD224D9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MoneyMarketFundsMember" xlink:label="loc_us-gaap_MoneyMarketFundsMember_3B586C9141DD01B119812C458FD248FB" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_MoneyMarketFundsMember_3B586C9141DD01B119812C458FD248FB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommercialPaperMember" xlink:label="loc_us-gaap_CommercialPaperMember_5990DCF1F87E58EFA45E2C458FD26120" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_CommercialPaperMember_5990DCF1F87E58EFA45E2C458FD26120" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommercialPaperNotIncludedWithCashAndCashEquivalentsMember" xlink:label="loc_us-gaap_CommercialPaperNotIncludedWithCashAndCashEquivalentsMember_29626A55252BFE0B55822C458FD37D97" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_CommercialPaperNotIncludedWithCashAndCashEquivalentsMember_29626A55252BFE0B55822C458FD37D97" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="loc_us-gaap_USTreasurySecuritiesMember_2CDCC0E3E9FC042957622C458FD38872" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_USTreasurySecuritiesMember_2CDCC0E3E9FC042957622C458FD38872" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="loc_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_CAFD1734E5FBBC1F36932C458FD33736" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_CAFD1734E5FBBC1F36932C458FD33736" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MunicipalNotesMember" xlink:label="loc_us-gaap_MunicipalNotesMember_0B3AEE5858DC4EB741E82C458FD3B14C" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_MunicipalNotesMember_0B3AEE5858DC4EB741E82C458FD3B14C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CorporateDebtSecuritiesMember" xlink:label="loc_us-gaap_CorporateDebtSecuritiesMember_5764C974F928C04A868C2C458FD3E139" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorTypesOfDebtAndEquitySecuritiesDomain_E9F9BAD9252B16678CD22C458FD206A8" xlink:to="loc_us-gaap_CorporateDebtSecuritiesMember_5764C974F928C04A868C2C458FD3E139" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:label="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_3B5523056540FFF0DBE42C458FD39AA0" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesTable_0C8A0CC14EB65A5897CD2C458FD1E00F" xlink:to="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_3B5523056540FFF0DBE42C458FD39AA0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesAmortizedCost" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesAmortizedCost_736C3759ACB076D12F8B2C458FD34DE9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_3B5523056540FFF0DBE42C458FD39AA0" xlink:to="loc_us-gaap_AvailableForSaleSecuritiesAmortizedCost_736C3759ACB076D12F8B2C458FD34DE9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableforsaleSecuritiesGrossUnrealizedGain" xlink:label="loc_us-gaap_AvailableforsaleSecuritiesGrossUnrealizedGain_0C86EF217DA6CE0CEB7B2C458FD3F8A1" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_3B5523056540FFF0DBE42C458FD39AA0" xlink:to="loc_us-gaap_AvailableforsaleSecuritiesGrossUnrealizedGain_0C86EF217DA6CE0CEB7B2C458FD3F8A1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesGrossUnrealizedLosses1" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesGrossUnrealizedLosses1_E45B4945473C660022592C458FD340B6" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_3B5523056540FFF0DBE42C458FD39AA0" xlink:to="loc_us-gaap_AvailableForSaleSecuritiesGrossUnrealizedLosses1_E45B4945473C660022592C458FD340B6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesFairValueDisclosure" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_CB99656F360C7038D2812C458FD38ABA" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_3B5523056540FFF0DBE42C458FD39AA0" xlink:to="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_CB99656F360C7038D2812C458FD38ABA" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsNotes" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_C3DBFF045C583392050FB47AD9B05A94" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock" xlink:label="loc_us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_FCBC32AA2341E911C6DBB47AD9B0F410" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_C3DBFF045C583392050FB47AD9B05A94" xlink:to="loc_us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_FCBC32AA2341E911C6DBB47AD9B0F410" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_CADFD86D8EDDA87F92EFB47ADA3D1C19" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_ScheduleOfCashCashEquivalentsAndAvailableForSaleSecuritiesReconciliationTableTextBlock" xlink:label="loc_nano_ScheduleOfCashCashEquivalentsAndAvailableForSaleSecuritiesReconciliationTableTextBlock_D783E6CC4216B7A1BB7BB47ADA3DF659" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_CADFD86D8EDDA87F92EFB47ADA3D1C19" xlink:to="loc_nano_ScheduleOfCashCashEquivalentsAndAvailableForSaleSecuritiesReconciliationTableTextBlock_D783E6CC4216B7A1BB7BB47ADA3DF659" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CommitmentsAndContingencies" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_2D9806746F365502B4C0B47AD962218D" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_021B02D4181A87EEE179B47AD96201AF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_2D9806746F365502B4C0B47AD962218D" xlink:to="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_021B02D4181A87EEE179B47AD96201AF" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CommitmentsAndContingenciesDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_527A7E9FFCFE9E305F63B47AD9B0E1A2" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_CommitmentsAndContingenciesTextualAbstract" xlink:label="loc_nano_CommitmentsAndContingenciesTextualAbstract_6F9608988700F8CEB773B47AD9B01871" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_527A7E9FFCFE9E305F63B47AD9B0E1A2" xlink:to="loc_nano_CommitmentsAndContingenciesTextualAbstract_6F9608988700F8CEB773B47AD9B01871" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IntellectualPropertyIndemnificationObligations" xlink:label="loc_nano_IntellectualPropertyIndemnificationObligations_70D5DAF74B49409D3902B47AD9B0CFEA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_CommitmentsAndContingenciesTextualAbstract_6F9608988700F8CEB773B47AD9B01871" xlink:to="loc_nano_IntellectualPropertyIndemnificationObligations_70D5DAF74B49409D3902B47AD9B0CFEA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsForLegalSettlements" xlink:label="loc_us-gaap_PaymentsForLegalSettlements_E13A91E554E827F7061AB47AD9B0A816" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_CommitmentsAndContingenciesTextualAbstract_6F9608988700F8CEB773B47AD9B01871" xlink:to="loc_us-gaap_PaymentsForLegalSettlements_E13A91E554E827F7061AB47AD9B0A816" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsParentheticalUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_974E5399CA0AC0E294F535FB2957820F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_974E5399CA0AC0E294F535FB2957820F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PreferredStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_PreferredStockParOrStatedValuePerShare_0D57E873464920189B5535FB29576C9D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_PreferredStockParOrStatedValuePerShare_0D57E873464920189B5535FB29576C9D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="loc_us-gaap_PreferredStockSharesAuthorized_F4B0D6022E23D634ACBA35FB2957080C" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_PreferredStockSharesAuthorized_F4B0D6022E23D634ACBA35FB2957080C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="loc_us-gaap_PreferredStockSharesIssued_33B6F5FD25271E392F4035FB295749EE" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_PreferredStockSharesIssued_33B6F5FD25271E392F4035FB295749EE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PreferredStockSharesOutstanding" xlink:label="loc_us-gaap_PreferredStockSharesOutstanding_7F01A4F61BEED2316AC035FB295781A4" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_PreferredStockSharesOutstanding_7F01A4F61BEED2316AC035FB295781A4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_2234E03A1FA9DA18729A35FB2957ADF4" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_2234E03A1FA9DA18729A35FB2957ADF4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="loc_us-gaap_CommonStockSharesAuthorized_F3500A3D834CCC73FB8935FB2966A68E" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_CommonStockSharesAuthorized_F3500A3D834CCC73FB8935FB2966A68E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="loc_us-gaap_CommonStockSharesIssued_C1C140DCBF2B383CC32935FB2966465E" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_CommonStockSharesIssued_C1C140DCBF2B383CC32935FB2966465E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="loc_us-gaap_CommonStockSharesOutstanding_2D99C7117D2255005D1F35FB29666C3C" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_AEF717D87E5CD1A07C5735FB2957889A" xlink:to="loc_us-gaap_CommonStockSharesOutstanding_2D99C7117D2255005D1F35FB29666C3C" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_82EAA93719423C2AACE72C4AB9E1908B" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_82EAA93719423C2AACE72C4AB9E1908B" xlink:to="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:to="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_7E532CE7AB93BC405F642C4AB9E1E6DA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_7E532CE7AB93BC405F642C4AB9E1E6DA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShortTermInvestments" xlink:label="loc_us-gaap_ShortTermInvestments_172BB4A5985ADE75E8852C4AB9E1F4B7" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_us-gaap_ShortTermInvestments_172BB4A5985ADE75E8852C4AB9E1F4B7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_24BE7BED43212C05D2D82C4AB9E1D67A" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_us-gaap_AccountsReceivableNetCurrent_24BE7BED43212C05D2D82C4AB9E1D67A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_69F531DABE792C1CB7962C4AB9E23D8B" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_us-gaap_InventoryNet_69F531DABE792C1CB7962C4AB9E23D8B" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_InventoriesDeliveredSystems" xlink:label="loc_nano_InventoriesDeliveredSystems_34F192C6DA665E50515C2C4AB9E24389" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_nano_InventoriesDeliveredSystems_34F192C6DA665E50515C2C4AB9E24389" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="loc_us-gaap_PrepaidExpenseAndOtherAssetsCurrent_A362C609F204CE6FD2B02C4AB9E24D78" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_us-gaap_PrepaidExpenseAndOtherAssetsCurrent_A362C609F204CE6FD2B02C4AB9E24D78" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredTaxAssetsNetCurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetCurrent_0FA76EF6BC5BFBDD40782C4AB9E2E75E" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_us-gaap_DeferredTaxAssetsNetCurrent_0FA76EF6BC5BFBDD40782C4AB9E2E75E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_A8959B5071E58C81CA982C4AB9E3CB57" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_5ABB0F56075BDD73F5432C4AB9E138D0" xlink:to="loc_us-gaap_AssetsCurrent_A8959B5071E58C81CA982C4AB9E3CB57" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_4E4C6495FB46183916D62C4AB9E311C3" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_4E4C6495FB46183916D62C4AB9E311C3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_C6E147BF85D5843FF1CA2C4AB9E3841C" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:to="loc_us-gaap_Goodwill_C6E147BF85D5843FF1CA2C4AB9E3841C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_17FF266D4373754C4C292C4AB9E32FE8" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:to="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_17FF266D4373754C4C292C4AB9E32FE8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_6A0BA915E7F034BE2C592C4AB9E307AF" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:to="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_6A0BA915E7F034BE2C592C4AB9E307AF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_5282AD64BC25DAD88FD82C4AB9E31F71" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:to="loc_us-gaap_OtherAssetsNoncurrent_5282AD64BC25DAD88FD82C4AB9E31F71" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_C9DC7AD73E0700D1D5D12C4AB9E3DAC6" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_B49C52E557096B5651392C4AB9E14E65" xlink:to="loc_us-gaap_Assets_C9DC7AD73E0700D1D5D12C4AB9E3DAC6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_82EAA93719423C2AACE72C4AB9E1908B" xlink:to="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_A742CCCBC47CEBA06A2B2C4AB9E36B71" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:to="loc_us-gaap_AccountsPayableCurrent_A742CCCBC47CEBA06A2B2C4AB9E36B71" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_C41B5E8F3351C3CE06132C4AB9E31CEA" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:to="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_C41B5E8F3351C3CE06132C4AB9E31CEA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredRevenueCurrent" xlink:label="loc_us-gaap_DeferredRevenueCurrent_8DDE0E5CD0A7326274E42C4AB9E3167E" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:to="loc_us-gaap_DeferredRevenueCurrent_8DDE0E5CD0A7326274E42C4AB9E3167E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="loc_us-gaap_OtherLiabilitiesCurrent_E17DD33F1428DE5836C92C4AB9E32309" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:to="loc_us-gaap_OtherLiabilitiesCurrent_E17DD33F1428DE5836C92C4AB9E32309" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_653BEC85BFE3CF714FD22C4AB9E32A07" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:to="loc_us-gaap_AccruedIncomeTaxesCurrent_653BEC85BFE3CF714FD22C4AB9E32A07" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_07AC72443063C57932202C4AB9E30D80" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:to="loc_us-gaap_LongTermDebtCurrent_07AC72443063C57932202C4AB9E30D80" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_F0F2599A23F60A40F9982C4AB9E3D36A" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_C16A74F4EF081C8FA7D12C4AB9E36370" xlink:to="loc_us-gaap_LiabilitiesCurrent_F0F2599A23F60A40F9982C4AB9E3D36A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredRevenueNoncurrent" xlink:label="loc_us-gaap_DeferredRevenueNoncurrent_D804BC8A568E958C2FF72C4AB9E42A45" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_DeferredRevenueNoncurrent_D804BC8A568E958C2FF72C4AB9E42A45" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TaxesPayableCurrent" xlink:label="loc_us-gaap_TaxesPayableCurrent_CF7BBA6AAECB8F48481C2C4AB9E49DF3" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_TaxesPayableCurrent_CF7BBA6AAECB8F48481C2C4AB9E49DF3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="loc_us-gaap_OtherLiabilitiesNoncurrent_D51A182B8FB10394FAD92C4AB9E4596A" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_OtherLiabilitiesNoncurrent_D51A182B8FB10394FAD92C4AB9E4596A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_88D413164DCC9D4D684D2C4AB9E4724A" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_88D413164DCC9D4D684D2C4AB9E4724A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_B1B903913225AA336C1F2C4AB9E41334" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_Liabilities_B1B903913225AA336C1F2C4AB9E41334" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_DA78164F0B60CB6B8A092C4AB9E47840" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_CommitmentsAndContingencies_DA78164F0B60CB6B8A092C4AB9E47840" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_9324F0FB6C960271390D2C4AB9E465E1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:to="loc_us-gaap_PreferredStockValue_9324F0FB6C960271390D2C4AB9E465E1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_41705EFEFDE03267D35C2C4AB9E4E8AC" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:to="loc_us-gaap_CommonStockValue_41705EFEFDE03267D35C2C4AB9E4E8AC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_08893DA750FD57B392002C4AB9E45994" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:to="loc_us-gaap_AdditionalPaidInCapital_08893DA750FD57B392002C4AB9E45994" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_5ED7EBE18CEB6464EDE62C4AB9E4F5A7" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:to="loc_us-gaap_RetainedEarningsAccumulatedDeficit_5ED7EBE18CEB6464EDE62C4AB9E4F5A7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_0B8F34F5A3351EB4D6A12C4AB9E42030" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_0B8F34F5A3351EB4D6A12C4AB9E42030" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_2EDE9D885A3C66EE300C2C4AB9E4F3CC" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityAbstract_7DA87C481E758056224B2C4AB9E4A655" xlink:to="loc_us-gaap_StockholdersEquity_2EDE9D885A3C66EE300C2C4AB9E4F3CC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_DACE3C49B94FAC636C062C4AB9E413DD" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_2F317F2B530249179B792C4AB9E3DA41" xlink:to="loc_us-gaap_LiabilitiesAndStockholdersEquity_DACE3C49B94FAC636C062C4AB9E413DD" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_A161B086F5DD3E0F13692C6A75ED982C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_A161B086F5DD3E0F13692C6A75ED982C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_0F39CBFFD878B00DBB1D2C6A75EEB689" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_A161B086F5DD3E0F13692C6A75ED982C" xlink:to="loc_us-gaap_NetIncomeLoss_0F39CBFFD878B00DBB1D2C6A75EEB689" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_A161B086F5DD3E0F13692C6A75ED982C" xlink:to="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_47766BA57B70A263C91D2C6A75EE7783" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_us-gaap_DepreciationDepletionAndAmortization_47766BA57B70A263C91D2C6A75EE7783" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_0B9D2CBB69D88BC752AE2C6A75EE0418" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_us-gaap_ShareBasedCompensation_0B9D2CBB69D88BC752AE2C6A75EE0418" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities" xlink:label="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities_1935B9345D3C3B1268C42C6A75EE13A0" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities_1935B9345D3C3B1268C42C6A75EE13A0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GainLossOnDispositionOfAssets" xlink:label="loc_us-gaap_GainLossOnDispositionOfAssets_7F7A3DD28B35DCC91D062C6A75EEDA2F" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_us-gaap_GainLossOnDispositionOfAssets_7F7A3DD28B35DCC91D062C6A75EEDA2F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_2A27A07823D3AD438A382C6A75EEBD2B" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_us-gaap_InventoryWriteDown_2A27A07823D3AD438A382C6A75EEBD2B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_DeferredIncomeTaxExpenseBenefit_ED1BD52D994FDB80211A2C6A75EE1CA9" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_us-gaap_DeferredIncomeTaxExpenseBenefit_ED1BD52D994FDB80211A2C6A75EE1CA9" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ChangesInFairValueOfContingentPayments" xlink:label="loc_nano_ChangesInFairValueOfContingentPayments_0DABCF0FDBC93D7D68352C6A75EEF0EB" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_nano_ChangesInFairValueOfContingentPayments_0DABCF0FDBC93D7D68352C6A75EEF0EB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_E2B66C3B448BBD95B93D2C6A75EE533D" xlink:to="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_DF72B8E2CFABC957A6562C6A75EEB818" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_DF72B8E2CFABC957A6562C6A75EEB818" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_013094D09BD8BD69AE502C6A75EEC8F0" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_us-gaap_IncreaseDecreaseInInventories_013094D09BD8BD69AE502C6A75EEC8F0" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IncreaseDecreaseInventoriesDeliveredSystems" xlink:label="loc_nano_IncreaseDecreaseInventoriesDeliveredSystems_7FE744AC79C5D56E34512C6A75EF9EFE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_nano_IncreaseDecreaseInventoriesDeliveredSystems_7FE744AC79C5D56E34512C6A75EF9EFE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_D57EA93A186EE5C26A532C6A75EF53CB" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_D57EA93A186EE5C26A532C6A75EF53CB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_C1AEEA339E49FA037B2D2C6A75EFCDBC" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_C1AEEA339E49FA037B2D2C6A75EFCDBC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredRevenue" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredRevenue_83C8168107006977AFE72C6A75EF112A" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_us-gaap_IncreaseDecreaseInDeferredRevenue_83C8168107006977AFE72C6A75EF112A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_232FD39D83B9E74CF3C32C6A75EF1713" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_232FD39D83B9E74CF3C32C6A75EF1713" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_EADEF9C120E0449AE1012C6A75EF8669" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_E419630300E3B38E95A62C6A75EE1D54" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_EADEF9C120E0449AE1012C6A75EF8669" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_7FFD4BD2E095ED629A762C6A75EF713D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_7FFD4BD2E095ED629A762C6A75EF713D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" xlink:label="loc_us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities_51A34A61CDB8B270B41E2C6A75EF0425" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_7FFD4BD2E095ED629A762C6A75EF713D" xlink:to="loc_us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities_51A34A61CDB8B270B41E2C6A75EF0425" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ProceedsFromEscrowRelatedToAcquisition" xlink:label="loc_nano_ProceedsFromEscrowRelatedToAcquisition_C5305562E905E3A3F9152C7C1B401B49" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_7FFD4BD2E095ED629A762C6A75EF713D" xlink:to="loc_nano_ProceedsFromEscrowRelatedToAcquisition_C5305562E905E3A3F9152C7C1B401B49" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsToAcquireMarketableSecurities" xlink:label="loc_us-gaap_PaymentsToAcquireMarketableSecurities_9732B148378EDE067B962C6A75EF6D23" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_7FFD4BD2E095ED629A762C6A75EF713D" xlink:to="loc_us-gaap_PaymentsToAcquireMarketableSecurities_9732B148378EDE067B962C6A75EF6D23" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_D2B550FEFE45B6294B482C6A75EF0144" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_7FFD4BD2E095ED629A762C6A75EF713D" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_D2B550FEFE45B6294B482C6A75EF0144" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_D95A70F4D82E4C350D022C6A75EF2920" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_7FFD4BD2E095ED629A762C6A75EF713D" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_D95A70F4D82E4C350D022C6A75EF2920" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsOfMergerRelatedCostsFinancingActivities" xlink:label="loc_us-gaap_PaymentsOfMergerRelatedCostsFinancingActivities_D11812FB4968C17604CF2C6A75EFC7C2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:to="loc_us-gaap_PaymentsOfMergerRelatedCostsFinancingActivities_D11812FB4968C17604CF2C6A75EFC7C2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_B08FB6DDD5889CF264F92C6A75EFB012" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_B08FB6DDD5889CF264F92C6A75EFB012" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions_1B4C5F3A733E176C03392C6A75EF13C7" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions_1B4C5F3A733E176C03392C6A75EF13C7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities" xlink:label="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_DB77D2F6EFE57CC2B7352C6A75F00D95" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:to="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_DB77D2F6EFE57CC2B7352C6A75F00D95" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:label="loc_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_0B86EE447EF5648417C82C6A75F0E654" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:to="loc_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_0B86EE447EF5648417C82C6A75F0E654" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="loc_us-gaap_PaymentsForRepurchaseOfCommonStock_64A45359BD90DEA0090F2C6A75F0D607" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:to="loc_us-gaap_PaymentsForRepurchaseOfCommonStock_64A45359BD90DEA0090F2C6A75F0D607" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_7BF2AAF8EABDDA171CBC2C6A75F03602" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_0A7BBCB0C42B196B50202C6A75EF5D94" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_7BF2AAF8EABDDA171CBC2C6A75F03602" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_253488620D0753413E9D2C6A75F09BC2" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:to="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_253488620D0753413E9D2C6A75F09BC2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_AD3BE3BB679EF90F3F822C6A75F0ABA4" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:to="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_AD3BE3BB679EF90F3F822C6A75F0ABA4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_313FF2AA56EAD86A31982C6A75F0F338" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_313FF2AA56EAD86A31982C6A75F0F338" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_B6ED653E1858599DB2E42C6A75F0397B" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_47547E6052235EB0B4692C6A75ED761D" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_B6ED653E1858599DB2E42C6A75F0397B" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_921B9B338F7AD964C55F373BFB054A54" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_12E4A0A1730AA556E3A3373BFB059048" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_921B9B338F7AD964C55F373BFB054A54" xlink:to="loc_us-gaap_NetIncomeLoss_12E4A0A1730AA556E3A3373BFB059048" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract_F69CA4CDAF6D849A2B92373BFB05C00E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_921B9B338F7AD964C55F373BFB054A54" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract_F69CA4CDAF6D849A2B92373BFB05C00E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_BB247EDE24B4F9B6536F373BFB05D25B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract_F69CA4CDAF6D849A2B92373BFB05C00E" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_BB247EDE24B4F9B6536F373BFB05D25B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax_CBBF2AF8E1471B694390373BFB05B48B" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract_F69CA4CDAF6D849A2B92373BFB05C00E" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax_CBBF2AF8E1471B694390373BFB05B48B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_D8D6289B92871F3646CE373BFB05B673" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPeriodIncreaseDecreaseAbstract_F69CA4CDAF6D849A2B92373BFB05C00E" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_D8D6289B92871F3646CE373BFB05B673" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_8D4BA707DFF05EB3D3F3373BFB0530B7" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_921B9B338F7AD964C55F373BFB054A54" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTax_8D4BA707DFF05EB3D3F3373BFB0530B7" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueNetAbstract" xlink:label="loc_us-gaap_SalesRevenueNetAbstract_B25DEAE70C376FD2FDDB2C6A75FC2A51" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_SalesRevenueNetAbstract_B25DEAE70C376FD2FDDB2C6A75FC2A51" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueGoodsNet" xlink:label="loc_us-gaap_SalesRevenueGoodsNet_80F11EA02E58BA4006AC2C6A75FC1FDF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SalesRevenueNetAbstract_B25DEAE70C376FD2FDDB2C6A75FC2A51" xlink:to="loc_us-gaap_SalesRevenueGoodsNet_80F11EA02E58BA4006AC2C6A75FC1FDF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueServicesNet" xlink:label="loc_us-gaap_SalesRevenueServicesNet_D3FC5311D16ED884830F2C6A75FC2E53" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SalesRevenueNetAbstract_B25DEAE70C376FD2FDDB2C6A75FC2A51" xlink:to="loc_us-gaap_SalesRevenueServicesNet_D3FC5311D16ED884830F2C6A75FC2E53" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_A69303CB0C96E6E06CF02C6A75FC850B" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SalesRevenueNetAbstract_B25DEAE70C376FD2FDDB2C6A75FC2A51" xlink:to="loc_us-gaap_SalesRevenueNet_A69303CB0C96E6E06CF02C6A75FC850B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfGoodsAndServicesSoldAbstract" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSoldAbstract_AEB70327248313DF65EC2C6A75FC89B6" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_CostOfGoodsAndServicesSoldAbstract_AEB70327248313DF65EC2C6A75FC89B6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfGoodsSold" xlink:label="loc_us-gaap_CostOfGoodsSold_D61ACE27C4AC37BD565F2C6A75FC0C4F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSoldAbstract_AEB70327248313DF65EC2C6A75FC89B6" xlink:to="loc_us-gaap_CostOfGoodsSold_D61ACE27C4AC37BD565F2C6A75FC0C4F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfServices" xlink:label="loc_us-gaap_CostOfServices_FE32387FAEDE818142942C6A75FCC934" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSoldAbstract_AEB70327248313DF65EC2C6A75FC89B6" xlink:to="loc_us-gaap_CostOfServices_FE32387FAEDE818142942C6A75FCC934" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_CostOfProductsAmortizationOfIntangibleAssets" xlink:label="loc_nano_CostOfProductsAmortizationOfIntangibleAssets_60E5B23D83AA7E72ABE62C6A75FCCDB0" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSoldAbstract_AEB70327248313DF65EC2C6A75FC89B6" xlink:to="loc_nano_CostOfProductsAmortizationOfIntangibleAssets_60E5B23D83AA7E72ABE62C6A75FCCDB0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_652A612A85944619B0B42C6A75FCC277" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSoldAbstract_AEB70327248313DF65EC2C6A75FC89B6" xlink:to="loc_us-gaap_CostOfGoodsAndServicesSold_652A612A85944619B0B42C6A75FCC277" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_CFA03B7805FFFE4B819C2C6A75FC3C05" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSoldAbstract_AEB70327248313DF65EC2C6A75FC89B6" xlink:to="loc_us-gaap_GrossProfit_CFA03B7805FFFE4B819C2C6A75FC3C05" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="loc_us-gaap_OperatingExpensesAbstract_309AF14A67C0738D41D92C6A75FCE258" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_OperatingExpensesAbstract_309AF14A67C0738D41D92C6A75FCE258" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_5C459F76EA83BB98FE322C6A75FC7217" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OperatingExpensesAbstract_309AF14A67C0738D41D92C6A75FCE258" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpense_5C459F76EA83BB98FE322C6A75FC7217" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="loc_us-gaap_SellingAndMarketingExpense_9367DC507ADFB7E6A1CA2C6A75FC7544" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OperatingExpensesAbstract_309AF14A67C0738D41D92C6A75FCE258" xlink:to="loc_us-gaap_SellingAndMarketingExpense_9367DC507ADFB7E6A1CA2C6A75FC7544" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_GeneralAndAdministrativeExpense_37689DCEC3E51913D53C2C6A75FC855D" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OperatingExpensesAbstract_309AF14A67C0738D41D92C6A75FCE258" xlink:to="loc_us-gaap_GeneralAndAdministrativeExpense_37689DCEC3E51913D53C2C6A75FC855D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="loc_us-gaap_AmortizationOfIntangibleAssets_5014D9C0BD52EE6EB6F32C6A75FCA8AF" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OperatingExpensesAbstract_309AF14A67C0738D41D92C6A75FCE258" xlink:to="loc_us-gaap_AmortizationOfIntangibleAssets_5014D9C0BD52EE6EB6F32C6A75FCA8AF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingExpenses" xlink:label="loc_us-gaap_OperatingExpenses_7EFCDDCDA16B56EDBAB52C6A75FCD9A8" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OperatingExpensesAbstract_309AF14A67C0738D41D92C6A75FCE258" xlink:to="loc_us-gaap_OperatingExpenses_7EFCDDCDA16B56EDBAB52C6A75FCD9A8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_89F98253045996095F062C6A75FD2D27" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_OperatingIncomeLoss_89F98253045996095F062C6A75FD2D27" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="loc_us-gaap_NonoperatingIncomeExpenseAbstract_91015BD5C91F0DFA4FD32C6A75FDF40C" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_NonoperatingIncomeExpenseAbstract_91015BD5C91F0DFA4FD32C6A75FDF40C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="loc_us-gaap_InvestmentIncomeInterest_A2D88B89AD7BDCE13E5E2C6A75FD9244" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NonoperatingIncomeExpenseAbstract_91015BD5C91F0DFA4FD32C6A75FDF40C" xlink:to="loc_us-gaap_InvestmentIncomeInterest_A2D88B89AD7BDCE13E5E2C6A75FD9244" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InterestExpense" xlink:label="loc_us-gaap_InterestExpense_06C135473C6BCB058E972C6A75FDC72E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NonoperatingIncomeExpenseAbstract_91015BD5C91F0DFA4FD32C6A75FDF40C" xlink:to="loc_us-gaap_InterestExpense_06C135473C6BCB058E972C6A75FDC72E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_4A1EF77E56D82F17280B2C6A75FD0065" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NonoperatingIncomeExpenseAbstract_91015BD5C91F0DFA4FD32C6A75FDF40C" xlink:to="loc_us-gaap_OtherNonoperatingIncomeExpense_4A1EF77E56D82F17280B2C6A75FD0065" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_OtherIncomeExpenseNet" xlink:label="loc_nano_OtherIncomeExpenseNet_4AC81090265FFA2AB9322C6A75FDAE36" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NonoperatingIncomeExpenseAbstract_91015BD5C91F0DFA4FD32C6A75FDF40C" xlink:to="loc_nano_OtherIncomeExpenseNet_4AC81090265FFA2AB9322C6A75FDAE36" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_C8DB02D89B17139826752C6A75FD5F96" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_C8DB02D89B17139826752C6A75FD5F96" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_C1F2CF8BA76E2ABC5BEA2C6A75FDC4D0" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_IncomeTaxExpenseBenefit_C1F2CF8BA76E2ABC5BEA2C6A75FDC4D0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_FB8972C4AA185A104E9E2C6A75FD78E4" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_NetIncomeLoss_FB8972C4AA185A104E9E2C6A75FD78E4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareBasicAndDilutedAbstract" xlink:label="loc_us-gaap_EarningsPerShareBasicAndDilutedAbstract_0A3E44F55DF5AA852E2C2C6A75FDEF78" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_us-gaap_EarningsPerShareBasicAndDilutedAbstract_0A3E44F55DF5AA852E2C2C6A75FDEF78" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_BB48C6CBA6CD52A4D8BE2C6A75FD142F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareBasicAndDilutedAbstract_0A3E44F55DF5AA852E2C2C6A75FDEF78" xlink:to="loc_us-gaap_EarningsPerShareBasic_BB48C6CBA6CD52A4D8BE2C6A75FD142F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_7A9EF0CDF67F1EE2DBD92C6A75FD135D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareBasicAndDilutedAbstract_0A3E44F55DF5AA852E2C2C6A75FDEF78" xlink:to="loc_us-gaap_EarningsPerShareDiluted_7A9EF0CDF67F1EE2DBD92C6A75FD135D" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_SharesUsedInPerShareCalculationAbstract" xlink:label="loc_nano_SharesUsedInPerShareCalculationAbstract_6DED2C5828C211F94FC82C6A75FD883D" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_6E61713F274F3E9DFCF82C6A75FB6F57" xlink:to="loc_nano_SharesUsedInPerShareCalculationAbstract_6DED2C5828C211F94FC82C6A75FD883D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_43F8D974477CDFD88FCB2C6A75FD799A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_SharesUsedInPerShareCalculationAbstract_6DED2C5828C211F94FC82C6A75FD883D" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_43F8D974477CDFD88FCB2C6A75FD799A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_26ACEBD79DB4A661FC0C2C6A75FD1326" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_SharesUsedInPerShareCalculationAbstract_6DED2C5828C211F94FC82C6A75FD883D" xlink:to="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_26ACEBD79DB4A661FC0C2C6A75FD1326" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/DocumentAndEntityInformation" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_DocumentAndEntityInformationAbstract" xlink:label="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:type="locator" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityRegistrantName" xlink:label="loc_dei_EntityRegistrantName_91B141B07241B77BD85FB47AD8B7255A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_EntityRegistrantName_91B141B07241B77BD85FB47AD8B7255A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="loc_dei_EntityCentralIndexKey_71DE27A546E4FB989A14B47AD8B7203A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_EntityCentralIndexKey_71DE27A546E4FB989A14B47AD8B7203A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentType" xlink:label="loc_dei_DocumentType_7A3028E8368C5D83F431B47AD8B7EADB" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_DocumentType_7A3028E8368C5D83F431B47AD8B7EADB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="loc_dei_DocumentPeriodEndDate_A2497F0168DC94EEDF9DB47AD8B7FEFF" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_DocumentPeriodEndDate_A2497F0168DC94EEDF9DB47AD8B7FEFF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_AmendmentFlag" xlink:label="loc_dei_AmendmentFlag_F08F2E9C2B141A027400B47AD8B7D484" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_AmendmentFlag_F08F2E9C2B141A027400B47AD8B7D484" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="loc_dei_DocumentFiscalYearFocus_87878421B80DFBF284DEB47AD8B74F9B" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_DocumentFiscalYearFocus_87878421B80DFBF284DEB47AD8B74F9B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="loc_dei_DocumentFiscalPeriodFocus_F89CAEFA25A28B3B12F7B47AD8B74D71" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_DocumentFiscalPeriodFocus_F89CAEFA25A28B3B12F7B47AD8B74D71" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="loc_dei_CurrentFiscalYearEndDate_D8AC3AB768BE0E4A9B9AB47AD8B7E661" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_CurrentFiscalYearEndDate_D8AC3AB768BE0E4A9B9AB47AD8B7E661" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityFilerCategory" xlink:label="loc_dei_EntityFilerCategory_02CD87669C2EE26D9A2AB47AD8B727E5" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_EntityFilerCategory_02CD87669C2EE26D9A2AB47AD8B727E5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="loc_dei_EntityCommonStockSharesOutstanding_0CA2A83B699C923C8596B47AD8B702E1" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DocumentAndEntityInformationAbstract_FA367799E96C1CD97B84B47AD8B77DD0" xlink:to="loc_dei_EntityCommonStockSharesOutstanding_0CA2A83B699C923C8596B47AD8B702E1" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlans" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_F01E8D1186D6818DA196B47AD8C65A1B" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareholdersEquityAndShareBasedPaymentsTextBlock" xlink:label="loc_us-gaap_ShareholdersEquityAndShareBasedPaymentsTextBlock_D5900EE97E4D4A5C60F8B47AD8C65CE4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_F01E8D1186D6818DA196B47AD8C65A1B" xlink:to="loc_us-gaap_ShareholdersEquityAndShareBasedPaymentsTextBlock_D5900EE97E4D4A5C60F8B47AD8C65CE4" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_C7904D6BF69A1233773C373BFA125ACC" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_202E3CDC9939094CE180373BFA128592" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_C7904D6BF69A1233773C373BFA125ACC" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_202E3CDC9939094CE180373BFA128592" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_E67C65DBDA25EA989A6A373BFA126FC3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_202E3CDC9939094CE180373BFA128592" xlink:to="loc_us-gaap_AwardTypeAxis_E67C65DBDA25EA989A6A373BFA126FC3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_9E1198A2C791447E201E373BFA12C73D" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AwardTypeAxis_E67C65DBDA25EA989A6A373BFA126FC3" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_9E1198A2C791447E201E373BFA12C73D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockOptionsMember" xlink:label="loc_us-gaap_StockOptionsMember_1CCBC9340D44A2303985373BFA129A32" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_9E1198A2C791447E201E373BFA12C73D" xlink:to="loc_us-gaap_StockOptionsMember_1CCBC9340D44A2303985373BFA129A32" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_EmployeeStockPurchasePlanMember" xlink:label="loc_nano_EmployeeStockPurchasePlanMember_87B5BDAA222E0090DB1A373BFA12F262" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_9E1198A2C791447E201E373BFA12C73D" xlink:to="loc_nano_EmployeeStockPurchasePlanMember_87B5BDAA222E0090DB1A373BFA12F262" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_2E7F1A23A14EA79DD438373BFA12AEDF" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_202E3CDC9939094CE180373BFA128592" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_2E7F1A23A14EA79DD438373BFA12AEDF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_8F2395B0840029939EEF373BFA12A5C8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_2E7F1A23A14EA79DD438373BFA12AEDF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_8F2395B0840029939EEF373BFA12A5C8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_40ADE545D75EB4BBB5D3373BFA1252C0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_8F2395B0840029939EEF373BFA12A5C8" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_40ADE545D75EB4BBB5D3373BFA1252C0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_BBAF9303CD48DA0D9DB4373BFA12CA24" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_8F2395B0840029939EEF373BFA12A5C8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_BBAF9303CD48DA0D9DB4373BFA12CA24" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_75FAD17AAFAA61457051373BFA139EC4" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_8F2395B0840029939EEF373BFA12A5C8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_75FAD17AAFAA61457051373BFA139EC4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_33518B54FB432A24597C373BFA139715" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_8F2395B0840029939EEF373BFA12A5C8" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_33518B54FB432A24597C373BFA139715" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails1" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_4A12DDE7ABB0B0D207152CC5B7FDD728" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_ShareBasedCompensationStockOptionsActivityAbstract" xlink:label="loc_nano_ShareBasedCompensationStockOptionsActivityAbstract_81881422F3546B9D44DD2CC5B7FDA5B6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_4A12DDE7ABB0B0D207152CC5B7FDD728" xlink:to="loc_nano_ShareBasedCompensationStockOptionsActivityAbstract_81881422F3546B9D44DD2CC5B7FDA5B6" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_OptionsAbstract" xlink:label="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ShareBasedCompensationStockOptionsActivityAbstract_81881422F3546B9D44DD2CC5B7FDA5B6" xlink:to="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_DB9D2427AC21132E9CEB2CE7A380C8CE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_DB9D2427AC21132E9CEB2CE7A380C8CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_5DA394776F22FDE8D37D2CC5B7FD3451" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_DB9D2427AC21132E9CEB2CE7A380C8CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_5DA394776F22FDE8D37D2CC5B7FD3451" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_CEB92BFAC18205FE0DAA2CC5B7FE42D3" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_DB9D2427AC21132E9CEB2CE7A380C8CE" xlink:to="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_CEB92BFAC18205FE0DAA2CC5B7FE42D3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_F77F43FAF85CEDB0CABE2CC5B7FEB3CE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_DB9D2427AC21132E9CEB2CE7A380C8CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_F77F43FAF85CEDB0CABE2CC5B7FEB3CE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_B16759F7BBB1BE76B16B2CC5B7FE0243" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_DB9D2427AC21132E9CEB2CE7A380C8CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_B16759F7BBB1BE76B16B2CC5B7FE0243" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_0C206120A517AB5132FF2CC5B7FE409B" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_DB9D2427AC21132E9CEB2CE7A380C8CE" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_0C206120A517AB5132FF2CC5B7FE409B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_49E667788BE8612DC56D2CC5B7FE1671" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_49E667788BE8612DC56D2CC5B7FE1671" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_A6BD822DEA7F8F94F73E2CE82DF1EFF1" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_A6BD822DEA7F8F94F73E2CE82DF1EFF1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_A5D476D53CB6497106EE2CC5B7FEF61E" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_A6BD822DEA7F8F94F73E2CE82DF1EFF1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_A5D476D53CB6497106EE2CC5B7FEF61E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_70977466E161A561CD5C2CC5B7FE4EF2" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_A6BD822DEA7F8F94F73E2CE82DF1EFF1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_70977466E161A561CD5C2CC5B7FE4EF2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_5D5D7A8C877CA255CA622CC5B7FE9874" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_A6BD822DEA7F8F94F73E2CE82DF1EFF1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_5D5D7A8C877CA255CA622CC5B7FE9874" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_24F657542DE65EC88F9F2CC5B7FED508" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_A6BD822DEA7F8F94F73E2CE82DF1EFF1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_24F657542DE65EC88F9F2CC5B7FED508" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_CC889F70878FF89EAC4E2CC5B7FE0D2E" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_A6BD822DEA7F8F94F73E2CE82DF1EFF1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_CC889F70878FF89EAC4E2CC5B7FE0D2E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_306A85AE811D1682E6612CC5B7FE959F" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_306A85AE811D1682E6612CC5B7FE959F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_5DC0B57C0201DA74D4B32CC5B7FEDF2B" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_5DC0B57C0201DA74D4B32CC5B7FEDF2B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_D8F2ED3E00F5FDD5EC622CC5B7FE4EB6" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_D8F2ED3E00F5FDD5EC622CC5B7FE4EB6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_910652DE373F1FAD4C3E2CC5B7FE548F" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_910652DE373F1FAD4C3E2CC5B7FE548F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_EC00608B10BD939E2C3B2CC5B7FEDFAE" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_EC00608B10BD939E2C3B2CC5B7FEDFAE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_E1CC540F87275C0ECE9C2CC5B7FE0BD4" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_E1CC540F87275C0ECE9C2CC5B7FE0BD4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_B76FA200040F875397F72CC5B7FE2DB9" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_OptionsAbstract_3A177E010C61C80959592CC5B7FD9BD7" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_B76FA200040F875397F72CC5B7FE2DB9" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails2" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_D6C948AB99C4D9A5B90E2CC5B7E88EFF" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_1AE80ED69DDD9511C30C2CC5B7E8D387" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_D6C948AB99C4D9A5B90E2CC5B7E88EFF" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_1AE80ED69DDD9511C30C2CC5B7E8D387" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_286027DE7F72C70557B82CC5B7E898DC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_1AE80ED69DDD9511C30C2CC5B7E8D387" xlink:to="loc_us-gaap_AwardTypeAxis_286027DE7F72C70557B82CC5B7E898DC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_8A77A572B45C1A625B892CC5B7E8D189" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AwardTypeAxis_286027DE7F72C70557B82CC5B7E898DC" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_8A77A572B45C1A625B892CC5B7E8D189" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="loc_us-gaap_RestrictedStockUnitsRSUMember_1EA37876508D85CCB6DD2CC5B7ED46E4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_8A77A572B45C1A625B892CC5B7E8D189" xlink:to="loc_us-gaap_RestrictedStockUnitsRSUMember_1EA37876508D85CCB6DD2CC5B7ED46E4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_A2F2C39BB358BF22131C2CC5B7EDDC16" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_1AE80ED69DDD9511C30C2CC5B7E8D387" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_A2F2C39BB358BF22131C2CC5B7EDDC16" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_E004CB13BD330E4CBD592CE6A85105F9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_A2F2C39BB358BF22131C2CC5B7EDDC16" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_E004CB13BD330E4CBD592CE6A85105F9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_ABF6D9CE026D84DF61842CC5B7ED0A7C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_E004CB13BD330E4CBD592CE6A85105F9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_ABF6D9CE026D84DF61842CC5B7ED0A7C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_84D05B9FE80B23A71E442CC5B7EDA4FB" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_E004CB13BD330E4CBD592CE6A85105F9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_84D05B9FE80B23A71E442CC5B7EDA4FB" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAndEquityInstrumentsOtherThanOptionsReleasedInPeriod" xlink:label="loc_nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAndEquityInstrumentsOtherThanOptionsReleasedInPeriod_B7B0325A044B3955C6722CC5B7EE3DE0" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_E004CB13BD330E4CBD592CE6A85105F9" xlink:to="loc_nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAndEquityInstrumentsOtherThanOptionsReleasedInPeriod_B7B0325A044B3955C6722CC5B7EE3DE0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_89398E4948D3903149642CC5B7EE6659" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_E004CB13BD330E4CBD592CE6A85105F9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_89398E4948D3903149642CC5B7EE6659" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_18BCF78B13C7BCFCE8BB2CC5B7EE91B3" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_E004CB13BD330E4CBD592CE6A85105F9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_18BCF78B13C7BCFCE8BB2CC5B7EE91B3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_C43923C0FE36E9BAE4F12CE702F4F9C6" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_A2F2C39BB358BF22131C2CC5B7EDDC16" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_C43923C0FE36E9BAE4F12CE702F4F9C6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_E6BE2766FC3180502E432CC5B7EE917C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_C43923C0FE36E9BAE4F12CE702F4F9C6" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_E6BE2766FC3180502E432CC5B7EE917C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_436439F7C97E202B60DC2CC5B7EEFA80" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_C43923C0FE36E9BAE4F12CE702F4F9C6" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_436439F7C97E202B60DC2CC5B7EEFA80" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsReleasedInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsReleasedInPeriodWeightedAverageGrantDateFairValue_1F0E4D1EC284D6E1BC222CC5B7EEC7B0" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_C43923C0FE36E9BAE4F12CE702F4F9C6" xlink:to="loc_nano_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsReleasedInPeriodWeightedAverageGrantDateFairValue_1F0E4D1EC284D6E1BC222CC5B7EEC7B0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_12AC3C8A98ADC31A75132CC5B7EEF1C4" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_C43923C0FE36E9BAE4F12CE702F4F9C6" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_12AC3C8A98ADC31A75132CC5B7EEF1C4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_EA4FD9AE70F83B2C8BC72CC5B7EED27A" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_C43923C0FE36E9BAE4F12CE702F4F9C6" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_EA4FD9AE70F83B2C8BC72CC5B7EED27A" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails3" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_F4B90E1CAF36AE4E73AA2CC5B7D82D86" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:label="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable_648576257354BCEFE3092CC5B7D8077B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_F4B90E1CAF36AE4E73AA2CC5B7D82D86" xlink:to="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable_648576257354BCEFE3092CC5B7D8077B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsByReportLineAxis" xlink:label="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsByReportLineAxis_BCF7F3ACF92BC6A0F4C12CC5B7D8EF50" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable_648576257354BCEFE3092CC5B7D8077B" xlink:to="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsByReportLineAxis_BCF7F3ACF92BC6A0F4C12CC5B7D8EF50" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain_74179A2941FD501FE5762CC5B7D848DB" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsByReportLineAxis_BCF7F3ACF92BC6A0F4C12CC5B7D8EF50" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain_74179A2941FD501FE5762CC5B7D848DB" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_CostOfProductsMember" xlink:label="loc_nano_CostOfProductsMember_B39D64B096E9C5F807732CC5B7DE4613" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain_74179A2941FD501FE5762CC5B7D848DB" xlink:to="loc_nano_CostOfProductsMember_B39D64B096E9C5F807732CC5B7DE4613" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_CostOfServiceMember" xlink:label="loc_nano_CostOfServiceMember_5B6AB612A2B8B2D0A1342CC5B7DEBFFE" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain_74179A2941FD501FE5762CC5B7D848DB" xlink:to="loc_nano_CostOfServiceMember_5B6AB612A2B8B2D0A1342CC5B7DEBFFE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpenseMember_D3E8E62B94E74E4822982CC5B7DE97F9" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain_74179A2941FD501FE5762CC5B7D848DB" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpenseMember_D3E8E62B94E74E4822982CC5B7DE97F9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SellingAndMarketingExpenseMember" xlink:label="loc_us-gaap_SellingAndMarketingExpenseMember_98428E93F5AF733EA7FA2CC5B7DE856A" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain_74179A2941FD501FE5762CC5B7D848DB" xlink:to="loc_us-gaap_SellingAndMarketingExpenseMember_98428E93F5AF733EA7FA2CC5B7DE856A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GeneralAndAdministrativeExpenseMember" xlink:label="loc_us-gaap_GeneralAndAdministrativeExpenseMember_D536CD7264D7405F273B2CC5B7DE9BC4" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsReportLineDomain_74179A2941FD501FE5762CC5B7D848DB" xlink:to="loc_us-gaap_GeneralAndAdministrativeExpenseMember_D536CD7264D7405F273B2CC5B7DE9BC4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems_5C3447F3B894A8703ABC2CC5B7DEB41F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable_648576257354BCEFE3092CC5B7D8077B" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems_5C3447F3B894A8703ABC2CC5B7DEB41F" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_StockBasedCompensationExpenseForShareBasedCompensationsAbstract" xlink:label="loc_nano_StockBasedCompensationExpenseForShareBasedCompensationsAbstract_5CD8D8500D33A512B7AB2CC5B7DE5FDC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems_5C3447F3B894A8703ABC2CC5B7DEB41F" xlink:to="loc_nano_StockBasedCompensationExpenseForShareBasedCompensationsAbstract_5CD8D8500D33A512B7AB2CC5B7DE5FDC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_4C3C813F13C3FAC7B4AB2CC5B7DE006B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockBasedCompensationExpenseForShareBasedCompensationsAbstract_5CD8D8500D33A512B7AB2CC5B7DE5FDC" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpense_4C3C813F13C3FAC7B4AB2CC5B7DE006B" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails4" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityAbstract" xlink:label="loc_us-gaap_EquityAbstract_CE27AEE980F08CCEB3A0373BF9AB896D" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_AccumulatedOtherComprehensiveIncomeTable" xlink:label="loc_nano_AccumulatedOtherComprehensiveIncomeTable_AAA6665BFFDC5D78DE9D373BF9AB27C9" xlink:type="locator" />
    <presentationArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityAbstract_CE27AEE980F08CCEB3A0373BF9AB896D" xlink:to="loc_nano_AccumulatedOtherComprehensiveIncomeTable_AAA6665BFFDC5D78DE9D373BF9AB27C9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="loc_us-gaap_StatementEquityComponentsAxis_EECDE39B5DA222ECBF16373BF9ABEAD1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccumulatedOtherComprehensiveIncomeTable_AAA6665BFFDC5D78DE9D373BF9AB27C9" xlink:to="loc_us-gaap_StatementEquityComponentsAxis_EECDE39B5DA222ECBF16373BF9ABEAD1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="loc_us-gaap_EquityComponentDomain_B52EA672B339FA47036A373BF9AB0B00" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementEquityComponentsAxis_EECDE39B5DA222ECBF16373BF9ABEAD1" xlink:to="loc_us-gaap_EquityComponentDomain_B52EA672B339FA47036A373BF9AB0B00" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="loc_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_381AACC400D3258D0D54373BF9ABD064" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityComponentDomain_B52EA672B339FA47036A373BF9AB0B00" xlink:to="loc_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_381AACC400D3258D0D54373BF9ABD064" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="loc_us-gaap_AccumulatedTranslationAdjustmentMember_ED68D215BD07A83764FD373BF9B0AB9F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityComponentDomain_B52EA672B339FA47036A373BF9AB0B00" xlink:to="loc_us-gaap_AccumulatedTranslationAdjustmentMember_ED68D215BD07A83764FD373BF9B0AB9F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:label="loc_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_A86FBA9E32EEBD05978A373BF9B045C1" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityComponentDomain_B52EA672B339FA47036A373BF9AB0B00" xlink:to="loc_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_A86FBA9E32EEBD05978A373BF9B045C1" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AccumulatedOtherComprehensiveIncomeLineItems" xlink:label="loc_nano_AccumulatedOtherComprehensiveIncomeLineItems_A28C5BEA6957F3B6DDCD373BF9B03C19" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccumulatedOtherComprehensiveIncomeTable_AAA6665BFFDC5D78DE9D373BF9AB27C9" xlink:to="loc_nano_AccumulatedOtherComprehensiveIncomeLineItems_A28C5BEA6957F3B6DDCD373BF9B03C19" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AccumulatedOtherComprehensiveIncomeLossRollForward" xlink:label="loc_nano_AccumulatedOtherComprehensiveIncomeLossRollForward_4ACFF448470D460AC0D3373BF9B0F4BE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccumulatedOtherComprehensiveIncomeLineItems_A28C5BEA6957F3B6DDCD373BF9B03C19" xlink:to="loc_nano_AccumulatedOtherComprehensiveIncomeLossRollForward_4ACFF448470D460AC0D3373BF9B0F4BE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_7A88CE87C92C391D6CFC373BF9B10CD2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccumulatedOtherComprehensiveIncomeLossRollForward_4ACFF448470D460AC0D3373BF9B0F4BE" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_7A88CE87C92C391D6CFC373BF9B10CD2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTax_EFB04B37C332BBAD2C42373BF9B14759" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccumulatedOtherComprehensiveIncomeLossRollForward_4ACFF448470D460AC0D3373BF9B0F4BE" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTax_EFB04B37C332BBAD2C42373BF9B14759" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_31B2530A6BDCE6873452373BF9B1004C" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AccumulatedOtherComprehensiveIncomeLossRollForward_4ACFF448470D460AC0D3373BF9B0F4BE" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_31B2530A6BDCE6873452373BF9B1004C" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_488C133CBF87358D5A022CC5B7C19F04" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_StockBasedCompensationAdditionalTextualAbstract" xlink:label="loc_nano_StockBasedCompensationAdditionalTextualAbstract_2400109E8F23A9822A672CC5B7C10AF0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_488C133CBF87358D5A022CC5B7C19F04" xlink:to="loc_nano_StockBasedCompensationAdditionalTextualAbstract_2400109E8F23A9822A672CC5B7C10AF0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_3D5D63286FDE4CFC91692CC5B7C1AEE8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockBasedCompensationAdditionalTextualAbstract_2400109E8F23A9822A672CC5B7C10AF0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_3D5D63286FDE4CFC91692CC5B7C1AEE8" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsShareClosingPrice" xlink:label="loc_nano_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsShareClosingPrice_C382C56CF1FAC7D7F8352CC5B7C1577F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockBasedCompensationAdditionalTextualAbstract_2400109E8F23A9822A672CC5B7C10AF0" xlink:to="loc_nano_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsShareClosingPrice_C382C56CF1FAC7D7F8352CC5B7C1577F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_D6ADC33F202CE4E2D1162CC5B7C69043" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockBasedCompensationAdditionalTextualAbstract_2400109E8F23A9822A672CC5B7C10AF0" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_D6ADC33F202CE4E2D1162CC5B7C69043" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_8CA26E5978747B22411DB47AD8F5AEE9" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_DCDA290F574A77419BEEB47AD8F56561" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_8CA26E5978747B22411DB47AD8F5AEE9" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_DCDA290F574A77419BEEB47AD8F56561" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_3A89C3C218F6688642B1B47AD8F58953" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_DCDA290F574A77419BEEB47AD8F56561" xlink:to="loc_us-gaap_AwardTypeAxis_3A89C3C218F6688642B1B47AD8F58953" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_0278E68468577FEF15B4B47AD8F537C8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AwardTypeAxis_3A89C3C218F6688642B1B47AD8F58953" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_0278E68468577FEF15B4B47AD8F537C8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockOptionsMember" xlink:label="loc_us-gaap_StockOptionsMember_3C3F3E5FA957638254FEB47AD8F5FB81" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_0278E68468577FEF15B4B47AD8F537C8" xlink:to="loc_us-gaap_StockOptionsMember_3C3F3E5FA957638254FEB47AD8F5FB81" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="loc_us-gaap_RestrictedStockUnitsRSUMember_E1B956200C0DAAE71D9BB47AD8F5B0D8" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_0278E68468577FEF15B4B47AD8F537C8" xlink:to="loc_us-gaap_RestrictedStockUnitsRSUMember_E1B956200C0DAAE71D9BB47AD8F5B0D8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_5D17843BCCEE9CA3879AB47AD8F53507" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_DCDA290F574A77419BEEB47AD8F56561" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_5D17843BCCEE9CA3879AB47AD8F53507" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_290246656BDEF0B98404B47AD8F564BA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_5D17843BCCEE9CA3879AB47AD8F53507" xlink:to="loc_us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_290246656BDEF0B98404B47AD8F564BA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_4CA9891B9682319156D9B47AD8F5F81C" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_5D17843BCCEE9CA3879AB47AD8F53507" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_4CA9891B9682319156D9B47AD8F5F81C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:label="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_F4A62F318FD2595D3286B47AD8F5FE37" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_5D17843BCCEE9CA3879AB47AD8F53507" xlink:to="loc_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_F4A62F318FD2595D3286B47AD8F5FE37" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_1CDCEF2035C4303F333AB47AD8F510B6" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_5D17843BCCEE9CA3879AB47AD8F53507" xlink:to="loc_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_1CDCEF2035C4303F333AB47AD8F510B6" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosures" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="loc_us-gaap_FairValueDisclosuresAbstract_3C5482887BED9FB653C3B47ADA6B1C21" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="loc_us-gaap_FairValueDisclosuresTextBlock_0FBE6C4394A23E9204CCB47ADA6BE689" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueDisclosuresAbstract_3C5482887BED9FB653C3B47ADA6B1C21" xlink:to="loc_us-gaap_FairValueDisclosuresTextBlock_0FBE6C4394A23E9204CCB47ADA6BE689" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="loc_us-gaap_FairValueDisclosuresAbstract_F58983C0E4CBC3A10F6935F615199350" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_86D73237EFD8CCC2DF5835F61519BD0F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueDisclosuresAbstract_F58983C0E4CBC3A10F6935F615199350" xlink:to="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_86D73237EFD8CCC2DF5835F61519BD0F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="loc_us-gaap_FairValueByMeasurementFrequencyAxis_C0A6E70152741D4753EA35F61519C705" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_86D73237EFD8CCC2DF5835F61519BD0F" xlink:to="loc_us-gaap_FairValueByMeasurementFrequencyAxis_C0A6E70152741D4753EA35F61519C705" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="loc_us-gaap_FairValueMeasurementFrequencyDomain_4BC94C30650507D87E0235F61519B50B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueByMeasurementFrequencyAxis_C0A6E70152741D4753EA35F61519C705" xlink:to="loc_us-gaap_FairValueMeasurementFrequencyDomain_4BC94C30650507D87E0235F61519B50B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="loc_us-gaap_FairValueMeasurementsRecurringMember_8935786F1054C247A39C35F615196FBD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueMeasurementFrequencyDomain_4BC94C30650507D87E0235F61519B50B" xlink:to="loc_us-gaap_FairValueMeasurementsRecurringMember_8935786F1054C247A39C35F615196FBD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="loc_us-gaap_FairValueByFairValueHierarchyLevelAxis_9FC8AB483FDB0DC6D9A335F615199DAE" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_86D73237EFD8CCC2DF5835F61519BD0F" xlink:to="loc_us-gaap_FairValueByFairValueHierarchyLevelAxis_9FC8AB483FDB0DC6D9A335F615199DAE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_D4C5096DC01221F10C2135F61519A1F4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueByFairValueHierarchyLevelAxis_9FC8AB483FDB0DC6D9A335F615199DAE" xlink:to="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_D4C5096DC01221F10C2135F61519A1F4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="loc_us-gaap_FairValueInputsLevel1Member_6D81802A171D2129349835F61519DC86" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_D4C5096DC01221F10C2135F61519A1F4" xlink:to="loc_us-gaap_FairValueInputsLevel1Member_6D81802A171D2129349835F61519DC86" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="loc_us-gaap_FairValueInputsLevel2Member_E220D7CD19EDB1656EDD35F61519F58E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_D4C5096DC01221F10C2135F61519A1F4" xlink:to="loc_us-gaap_FairValueInputsLevel2Member_E220D7CD19EDB1656EDD35F61519F58E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueInputsLevel3Member" xlink:label="loc_us-gaap_FairValueInputsLevel3Member_14A7A4AE25258C54E52435F615194C46" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_D4C5096DC01221F10C2135F61519A1F4" xlink:to="loc_us-gaap_FairValueInputsLevel3Member_14A7A4AE25258C54E52435F615194C46" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:label="loc_us-gaap_EstimateOfFairValueFairValueDisclosureMember_5B15E9837F5BBDDDC26C35F64BFFC0BC" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_D4C5096DC01221F10C2135F61519A1F4" xlink:to="loc_us-gaap_EstimateOfFairValueFairValueDisclosureMember_5B15E9837F5BBDDDC26C35F64BFFC0BC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="loc_us-gaap_FairValueByAssetClassAxis_BE0F424EC7558B6B292235F6151AEB4B" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_86D73237EFD8CCC2DF5835F61519BD0F" xlink:to="loc_us-gaap_FairValueByAssetClassAxis_BE0F424EC7558B6B292235F6151AEB4B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueByAssetClassAxis_BE0F424EC7558B6B292235F6151AEB4B" xlink:to="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MoneyMarketFundsMember" xlink:label="loc_us-gaap_MoneyMarketFundsMember_1158996A0B80DE49CB2335F6151A96D2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:to="loc_us-gaap_MoneyMarketFundsMember_1158996A0B80DE49CB2335F6151A96D2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommercialPaperMember" xlink:label="loc_us-gaap_CommercialPaperMember_8E022C3A0D95A17A1A6E35F6151A022A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:to="loc_us-gaap_CommercialPaperMember_8E022C3A0D95A17A1A6E35F6151A022A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MunicipalBondsMember" xlink:label="loc_us-gaap_MunicipalBondsMember_856A0B405490D213E3CF35F6151A9AE9" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:to="loc_us-gaap_MunicipalBondsMember_856A0B405490D213E3CF35F6151A9AE9" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_UsTreasuryAndGovernmentAndGovernmentAgencyDebtSecuritiesMember" xlink:label="loc_nano_UsTreasuryAndGovernmentAndGovernmentAgencyDebtSecuritiesMember_846DB44E63AEB9536CE535F6151A9A23" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:to="loc_nano_UsTreasuryAndGovernmentAndGovernmentAgencyDebtSecuritiesMember_846DB44E63AEB9536CE535F6151A9A23" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_CommercialPaperCorporateDebtSecuritiesandMunicipalSecuritiesMember" xlink:label="loc_nano_CommercialPaperCorporateDebtSecuritiesandMunicipalSecuritiesMember_74D58544DEC978F2ED2335F6151AF6D0" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:to="loc_nano_CommercialPaperCorporateDebtSecuritiesandMunicipalSecuritiesMember_74D58544DEC978F2ED2335F6151AF6D0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashMember" xlink:label="loc_us-gaap_CashMember_BAA877532985D5A9610635F6151A8D3B" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_BCFFDE26966C126B6DCC35F6151A2A06" xlink:to="loc_us-gaap_CashMember_BAA877532985D5A9610635F6151A8D3B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_CA38AF6FB36FAF3C99AC35F6151A243B" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_86D73237EFD8CCC2DF5835F61519BD0F" xlink:to="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_CA38AF6FB36FAF3C99AC35F6151A243B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisAbstract" xlink:label="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisAbstract_2E25BE658ABA8E6C6E3F35F6151AEC9A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_CA38AF6FB36FAF3C99AC35F6151A243B" xlink:to="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisAbstract_2E25BE658ABA8E6C6E3F35F6151AEC9A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsFairValueDisclosureAbstract" xlink:label="loc_us-gaap_AssetsFairValueDisclosureAbstract_999F2525A9D79EC4758135F6151A2FC5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisAbstract_2E25BE658ABA8E6C6E3F35F6151AEC9A" xlink:to="loc_us-gaap_AssetsFairValueDisclosureAbstract_999F2525A9D79EC4758135F6151A2FC5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="loc_us-gaap_CashAndCashEquivalentsFairValueDisclosure_CA1393017D03EAAFBDFB35F6151A7DFC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsFairValueDisclosureAbstract_999F2525A9D79EC4758135F6151A2FC5" xlink:to="loc_us-gaap_CashAndCashEquivalentsFairValueDisclosure_CA1393017D03EAAFBDFB35F6151A7DFC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesFairValueDisclosure" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_4DE271A645A38692830B35F6151A6E87" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsFairValueDisclosureAbstract_999F2525A9D79EC4758135F6151A2FC5" xlink:to="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_4DE271A645A38692830B35F6151A6E87" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsFairValueDisclosure" xlink:label="loc_us-gaap_AssetsFairValueDisclosure_53276339FEE5036027E535F6151AE130" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsFairValueDisclosureAbstract_999F2525A9D79EC4758135F6151A2FC5" xlink:to="loc_us-gaap_AssetsFairValueDisclosure_53276339FEE5036027E535F6151AE130" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesFairValueDisclosureAbstract" xlink:label="loc_us-gaap_LiabilitiesFairValueDisclosureAbstract_65BC543473C7109048A235F6151A9A2B" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisAbstract_2E25BE658ABA8E6C6E3F35F6151AEC9A" xlink:to="loc_us-gaap_LiabilitiesFairValueDisclosureAbstract_65BC543473C7109048A235F6151A9A2B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesFairValueDisclosure" xlink:label="loc_us-gaap_LiabilitiesFairValueDisclosure_3496331AD95F64E6C1A435F6151A4AE9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesFairValueDisclosureAbstract_65BC543473C7109048A235F6151A9A2B" xlink:to="loc_us-gaap_LiabilitiesFairValueDisclosure_3496331AD95F64E6C1A435F6151A4AE9" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails1" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="loc_us-gaap_FairValueDisclosuresAbstract_4BB69E1A6E0BE95AE5AF2C7DABAB0CB9" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTable" xlink:label="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTable_336EB2B2B71DA660204A2C7DABABCC54" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueDisclosuresAbstract_4BB69E1A6E0BE95AE5AF2C7DABAB0CB9" xlink:to="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTable_336EB2B2B71DA660204A2C7DABABCC54" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="loc_us-gaap_FairValueByFairValueHierarchyLevelAxis_E8D53A431AFF707BDFF72C7DABAB39A3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTable_336EB2B2B71DA660204A2C7DABABCC54" xlink:to="loc_us-gaap_FairValueByFairValueHierarchyLevelAxis_E8D53A431AFF707BDFF72C7DABAB39A3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_BDB847F1B9D9D431B1742C7DABAC322A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueByFairValueHierarchyLevelAxis_E8D53A431AFF707BDFF72C7DABAB39A3" xlink:to="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_BDB847F1B9D9D431B1742C7DABAC322A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueInputsLevel3Member" xlink:label="loc_us-gaap_FairValueInputsLevel3Member_747492E696F8EB8652AE2C7DABAC1066" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueMeasurementsFairValueHierarchyDomain_BDB847F1B9D9D431B1742C7DABAC322A" xlink:to="loc_us-gaap_FairValueInputsLevel3Member_747492E696F8EB8652AE2C7DABAC1066" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationLineItems" xlink:label="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationLineItems_37FE91ABCF2C77CA93152C7DABAC2158" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTable_336EB2B2B71DA660204A2C7DABABCC54" xlink:to="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationLineItems_37FE91ABCF2C77CA93152C7DABAC2158" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationCalculationRollForward" xlink:label="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationCalculationRollForward_A0F86E7A98BB76DD51FC2C7DABACE1A2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationLineItems_37FE91ABCF2C77CA93152C7DABAC2158" xlink:to="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationCalculationRollForward_A0F86E7A98BB76DD51FC2C7DABACE1A2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue" xlink:label="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue_56C73A1B6E2484517D2D2C7DABACEC46" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationCalculationRollForward_A0F86E7A98BB76DD51FC2C7DABACE1A2" xlink:to="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue_56C73A1B6E2484517D2D2C7DABACEC46" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilitySettlements" xlink:label="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilitySettlements_63D6499705C7F6C2F76D2C7DABACC6E0" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationCalculationRollForward_A0F86E7A98BB76DD51FC2C7DABACE1A2" xlink:to="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilitySettlements_63D6499705C7F6C2F76D2C7DABACC6E0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilityGainLossIncludedInEarnings" xlink:label="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilityGainLossIncludedInEarnings_D44FFE10ABAAD72CA4792C7DABAC13E6" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationCalculationRollForward_A0F86E7A98BB76DD51FC2C7DABACE1A2" xlink:to="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilityGainLossIncludedInEarnings_D44FFE10ABAAD72CA4792C7DABAC13E6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue" xlink:label="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue_8F5CD45B8FB8B12388CF2C7DABACEBC8" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationCalculationRollForward_A0F86E7A98BB76DD51FC2C7DABACE1A2" xlink:to="loc_us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue_8F5CD45B8FB8B12388CF2C7DABACEBC8" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="loc_us-gaap_FairValueDisclosuresAbstract_B223CC85662BA629AC3DB47ADAAAEDD4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_B6E6CAB4941271941118B47ADAAA76E3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueDisclosuresAbstract_B223CC85662BA629AC3DB47ADAAAEDD4" xlink:to="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_B6E6CAB4941271941118B47ADAAA76E3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="loc_us-gaap_FairValueByMeasurementFrequencyAxis_814D53343019F8D62B38B47ADAAABEA9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_B6E6CAB4941271941118B47ADAAA76E3" xlink:to="loc_us-gaap_FairValueByMeasurementFrequencyAxis_814D53343019F8D62B38B47ADAAABEA9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="loc_us-gaap_FairValueMeasurementFrequencyDomain_35288B29920D505C49E7B47ADAAADD59" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueByMeasurementFrequencyAxis_814D53343019F8D62B38B47ADAAABEA9" xlink:to="loc_us-gaap_FairValueMeasurementFrequencyDomain_35288B29920D505C49E7B47ADAAADD59" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="loc_us-gaap_FairValueMeasurementsRecurringMember_02938854AE5B63FEE2CEB47ADAAA2865" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueMeasurementFrequencyDomain_35288B29920D505C49E7B47ADAAADD59" xlink:to="loc_us-gaap_FairValueMeasurementsRecurringMember_02938854AE5B63FEE2CEB47ADAAA2865" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_A2A4BB19679AFE06C729B47ADAAABB48" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_B6E6CAB4941271941118B47ADAAA76E3" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_A2A4BB19679AFE06C729B47ADAAABB48" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FDEB8D9F764638C90F83B47ADAAA7724" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_A2A4BB19679AFE06C729B47ADAAABB48" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FDEB8D9F764638C90F83B47ADAAA7724" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ZygoCorporationMember" xlink:label="loc_nano_ZygoCorporationMember_16C8E4682DC90CAAB863B47ADAAA6470" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FDEB8D9F764638C90F83B47ADAAA7724" xlink:to="loc_nano_ZygoCorporationMember_16C8E4682DC90CAAB863B47ADAAA6470" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_DEF9C14CF297E8732CD1B47ADAAA3EF2" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_B6E6CAB4941271941118B47ADAAA76E3" xlink:to="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_DEF9C14CF297E8732CD1B47ADAAA3EF2" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_FairValueMeasurementsAndDisclosuresTextualAbstract" xlink:label="loc_nano_FairValueMeasurementsAndDisclosuresTextualAbstract_E9AE8177785FAA9E53E1B47ADAAA59EF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_DEF9C14CF297E8732CD1B47ADAAA3EF2" xlink:to="loc_nano_FairValueMeasurementsAndDisclosuresTextualAbstract_E9AE8177785FAA9E53E1B47ADAAA59EF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BusinessAcquisitionPurchasePriceAllocationLiabilitiesAssumed" xlink:label="loc_us-gaap_BusinessAcquisitionPurchasePriceAllocationLiabilitiesAssumed_F4E93BC079D3874F2FC2B47ADAAA44B3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_FairValueMeasurementsAndDisclosuresTextualAbstract_E9AE8177785FAA9E53E1B47ADAAA59EF" xlink:to="loc_us-gaap_BusinessAcquisitionPurchasePriceAllocationLiabilitiesAssumed_F4E93BC079D3874F2FC2B47ADAAA44B3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BusinessAcquisitionPurchasePriceAllocationCurrentLiabilitiesAccruedLiabilities" xlink:label="loc_us-gaap_BusinessAcquisitionPurchasePriceAllocationCurrentLiabilitiesAccruedLiabilities_CD314F4454C7CA3AD957B47ADAAA3802" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_FairValueMeasurementsAndDisclosuresTextualAbstract_E9AE8177785FAA9E53E1B47ADAAA59EF" xlink:to="loc_us-gaap_BusinessAcquisitionPurchasePriceAllocationCurrentLiabilitiesAccruedLiabilities_CD314F4454C7CA3AD957B47ADAAA3802" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BusinessAcquisitionPurchasePriceAllocationNoncurrentLiabilities" xlink:label="loc_us-gaap_BusinessAcquisitionPurchasePriceAllocationNoncurrentLiabilities_D496D8E37283DE936EC3B47ADAAABCF7" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_FairValueMeasurementsAndDisclosuresTextualAbstract_E9AE8177785FAA9E53E1B47ADAAA59EF" xlink:to="loc_us-gaap_BusinessAcquisitionPurchasePriceAllocationNoncurrentLiabilities_D496D8E37283DE936EC3B47ADAAABCF7" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="loc_us-gaap_FairValueDisclosuresAbstract_ACCDCF63CD30EE4FBCD8B47ADAD90587" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_713A99DAC454761B6CEEB47ADAD90446" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueDisclosuresAbstract_ACCDCF63CD30EE4FBCD8B47ADAD90587" xlink:to="loc_us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_713A99DAC454761B6CEEB47ADAD90446" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTextBlock" xlink:label="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTextBlock_3737A8200929CDF27D10B47ADAD9AC2E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FairValueDisclosuresAbstract_ACCDCF63CD30EE4FBCD8B47ADAD90587" xlink:to="loc_us-gaap_FairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationTextBlock_3737A8200929CDF27D10B47ADAD9AC2E" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformation" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_GeographicAndSignificantCustomerInformationAbstract" xlink:label="loc_nano_GeographicAndSignificantCustomerInformationAbstract_80B5CDDFAB27A9EC964DB47ADAD9E4DD" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_GeographicAndSignificantCustomerInformationTextBlock" xlink:label="loc_nano_GeographicAndSignificantCustomerInformationTextBlock_3DF1880D8C24F8A15A5CB47ADAD9673F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_80B5CDDFAB27A9EC964DB47ADAD9E4DD" xlink:to="loc_nano_GeographicAndSignificantCustomerInformationTextBlock_3DF1880D8C24F8A15A5CB47ADAD9673F" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_GeographicAndSignificantCustomerInformationAbstract" xlink:label="loc_nano_GeographicAndSignificantCustomerInformationAbstract_D2A2FD96D71B6A064FEC35F65C016238" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="loc_us-gaap_NumberOfOperatingSegments_8055CCAAAFC10CB91B293600B071A74B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_D2A2FD96D71B6A064FEC35F65C016238" xlink:to="loc_us-gaap_NumberOfOperatingSegments_8055CCAAAFC10CB91B293600B071A74B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_105DD321C9C5E3403B4335F65C014DF0" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_D2A2FD96D71B6A064FEC35F65C016238" xlink:to="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_105DD321C9C5E3403B4335F65C014DF0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_B4B4136D6C682B7445BC35F65C015393" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_105DD321C9C5E3403B4335F65C014DF0" xlink:to="loc_us-gaap_StatementGeographicalAxis_B4B4136D6C682B7445BC35F65C015393" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementGeographicalAxis_B4B4136D6C682B7445BC35F65C015393" xlink:to="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_US" xlink:label="loc_country_US_A56ADC2E73AA235FB96435F65C0226AE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:to="loc_country_US_A56ADC2E73AA235FB96435F65C0226AE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_CN" xlink:label="loc_country_CN_D999608FF9504795D2F435F65C02B873" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:to="loc_country_CN_D999608FF9504795D2F435F65C02B873" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_JP" xlink:label="loc_country_JP_6CB8C9D52614FC9E883035F65C0223A9" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:to="loc_country_JP_6CB8C9D52614FC9E883035F65C0223A9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_KP" xlink:label="loc_country_KP_B0D745763D8B86613D8A35F65C02525A" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:to="loc_country_KP_B0D745763D8B86613D8A35F65C02525A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_IL" xlink:label="loc_country_IL_EA677623C0075EC1EA7335F65C02C08A" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:to="loc_country_IL_EA677623C0075EC1EA7335F65C02C08A" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_OtherCountriesMember" xlink:label="loc_nano_OtherCountriesMember_026EA18614CF547D486535F65C0277FE" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_56E09F179B770D2BF05035F65C0151EF" xlink:to="loc_nano_OtherCountriesMember_026EA18614CF547D486535F65C0277FE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="loc_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_D34700D3447E4A073C2B35F65C02AD5E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_105DD321C9C5E3403B4335F65C014DF0" xlink:to="loc_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_D34700D3447E4A073C2B35F65C02AD5E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueNetAbstract" xlink:label="loc_us-gaap_SalesRevenueNetAbstract_F03B6BEEF63A2641F92035F65C023838" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_D34700D3447E4A073C2B35F65C02AD5E" xlink:to="loc_us-gaap_SalesRevenueNetAbstract_F03B6BEEF63A2641F92035F65C023838" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_1F4636CC10BD28ADEEEA35F65C025229" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SalesRevenueNetAbstract_F03B6BEEF63A2641F92035F65C023838" xlink:to="loc_us-gaap_SalesRevenueNet_1F4636CC10BD28ADEEEA35F65C025229" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails1" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_GeographicAndSignificantCustomerInformationAbstract" xlink:label="loc_nano_GeographicAndSignificantCustomerInformationAbstract_07DA406160B87412821B373BF9277C19" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_CB2FDDCC44C4C6DD69B9373BF9285C0A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_07DA406160B87412821B373BF9277C19" xlink:to="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_CB2FDDCC44C4C6DD69B9373BF9285C0A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_B39A41972C48457F6FCA373BF92829DA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_CB2FDDCC44C4C6DD69B9373BF9285C0A" xlink:to="loc_us-gaap_StatementGeographicalAxis_B39A41972C48457F6FCA373BF92829DA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_6E99E7BE5F4880FFE9BF373BF9288F93" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementGeographicalAxis_B39A41972C48457F6FCA373BF92829DA" xlink:to="loc_us-gaap_SegmentGeographicalDomain_6E99E7BE5F4880FFE9BF373BF9288F93" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_US" xlink:label="loc_country_US_0374E4F99276E1EAB459373BF92842F6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_6E99E7BE5F4880FFE9BF373BF9288F93" xlink:to="loc_country_US_0374E4F99276E1EAB459373BF92842F6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_JP" xlink:label="loc_country_JP_821E44EA950598A285E7373BF92DA0EC" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_6E99E7BE5F4880FFE9BF373BF9288F93" xlink:to="loc_country_JP_821E44EA950598A285E7373BF92DA0EC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_KP" xlink:label="loc_country_KP_261597D2A73FC758D25C373BF92DA5A5" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_6E99E7BE5F4880FFE9BF373BF9288F93" xlink:to="loc_country_KP_261597D2A73FC758D25C373BF92DA5A5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.sec.gov/country/2012/country-2012-01-31.xsd#country_IL" xlink:label="loc_country_IL_7F8B6F066A9455F0E246373BF92D118A" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_6E99E7BE5F4880FFE9BF373BF9288F93" xlink:to="loc_country_IL_7F8B6F066A9455F0E246373BF92D118A" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_OtherCountriesMember" xlink:label="loc_nano_OtherCountriesMember_367366D3EEF60A90C77D373BF92DFE4D" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_6E99E7BE5F4880FFE9BF373BF9288F93" xlink:to="loc_nano_OtherCountriesMember_367366D3EEF60A90C77D373BF92DFE4D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="loc_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_156C69B75FB756B2D85F373BF92E4911" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_CB2FDDCC44C4C6DD69B9373BF9285C0A" xlink:to="loc_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_156C69B75FB756B2D85F373BF92E4911" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GeographicAreasLongLivedAssetsAbstract" xlink:label="loc_us-gaap_GeographicAreasLongLivedAssetsAbstract_0D7EF15EB0AF2C5BD95B373BF92EE899" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_156C69B75FB756B2D85F373BF92E4911" xlink:to="loc_us-gaap_GeographicAreasLongLivedAssetsAbstract_0D7EF15EB0AF2C5BD95B373BF92EE899" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EntityWideDisclosureOnGeographicAreasLongLivedAssetsInEntitysCountryOfDomicile" xlink:label="loc_us-gaap_EntityWideDisclosureOnGeographicAreasLongLivedAssetsInEntitysCountryOfDomicile_C762CE932F1D004175E2373BF92E02B6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GeographicAreasLongLivedAssetsAbstract_0D7EF15EB0AF2C5BD95B373BF92EE899" xlink:to="loc_us-gaap_EntityWideDisclosureOnGeographicAreasLongLivedAssetsInEntitysCountryOfDomicile_C762CE932F1D004175E2373BF92E02B6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EntityWideDisclosureOnGeographicAreasLongLivedAssetsInForeignCountries" xlink:label="loc_us-gaap_EntityWideDisclosureOnGeographicAreasLongLivedAssetsInForeignCountries_8E277492E98D9AC53DB7373BF92E0534" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GeographicAreasLongLivedAssetsAbstract_0D7EF15EB0AF2C5BD95B373BF92EE899" xlink:to="loc_us-gaap_EntityWideDisclosureOnGeographicAreasLongLivedAssetsInForeignCountries_8E277492E98D9AC53DB7373BF92E0534" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_A304B4FF90F5E659E8B7373BF92E1FC2" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GeographicAreasLongLivedAssetsAbstract_0D7EF15EB0AF2C5BD95B373BF92EE899" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_A304B4FF90F5E659E8B7373BF92E1FC2" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails2" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_GeographicAndSignificantCustomerInformationAbstract" xlink:label="loc_nano_GeographicAndSignificantCustomerInformationAbstract_FC5613FBCE8842465FCF2C7DAA8451D7" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable" xlink:label="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_C8D50515C3E8C2D255AC2C7DAA84B279" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_FC5613FBCE8842465FCF2C7DAA8451D7" xlink:to="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_C8D50515C3E8C2D255AC2C7DAA84B279" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_BD8F6D78F6F06AFEC7BB2C7DAA849809" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_C8D50515C3E8C2D255AC2C7DAA84B279" xlink:to="loc_us-gaap_MajorCustomersAxis_BD8F6D78F6F06AFEC7BB2C7DAA849809" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_CB4AFACDE6704FFD32582C7DAA84CB7E" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorCustomersAxis_BD8F6D78F6F06AFEC7BB2C7DAA849809" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_CB4AFACDE6704FFD32582C7DAA84CB7E" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IntelCorporationMember" xlink:label="loc_nano_IntelCorporationMember_FF7902837A246A3843FF2C7DAA84141C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_CB4AFACDE6704FFD32582C7DAA84CB7E" xlink:to="loc_nano_IntelCorporationMember_FF7902837A246A3843FF2C7DAA84141C" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_SkHynixMember" xlink:label="loc_nano_SkHynixMember_54B634A66CC1CA8F9EAE2C7DAA8410E8" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_CB4AFACDE6704FFD32582C7DAA84CB7E" xlink:to="loc_nano_SkHynixMember_54B634A66CC1CA8F9EAE2C7DAA8410E8" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_SamsungElectronicsMember" xlink:label="loc_nano_SamsungElectronicsMember_0A2F49EAA4E14ACFF2FD2C7DAA84F11C" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_CB4AFACDE6704FFD32582C7DAA84CB7E" xlink:to="loc_nano_SamsungElectronicsMember_0A2F49EAA4E14ACFF2FD2C7DAA84F11C" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MicronTechnologyInc.Member" xlink:label="loc_nano_MicronTechnologyInc.Member_F06BDEA983B8D20B7C142C7DAA841407" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_CB4AFACDE6704FFD32582C7DAA84CB7E" xlink:to="loc_nano_MicronTechnologyInc.Member_F06BDEA983B8D20B7C142C7DAA841407" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_TaiwanSemiconductorMfgCoMember" xlink:label="loc_nano_TaiwanSemiconductorMfgCoMember_FE8175CE33FAA9D5B4572C7DAA84CFE8" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_CB4AFACDE6704FFD32582C7DAA84CB7E" xlink:to="loc_nano_TaiwanSemiconductorMfgCoMember_FE8175CE33FAA9D5B4572C7DAA84CFE8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_944142CD803552353CE72C7DAA8405E6" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_C8D50515C3E8C2D255AC2C7DAA84B279" xlink:to="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_944142CD803552353CE72C7DAA8405E6" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_PercentageOfAccountsReceivableNetAbstract" xlink:label="loc_nano_PercentageOfAccountsReceivableNetAbstract_33EC19C139DE1AEAF84D2C7DAA85C712" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_944142CD803552353CE72C7DAA8405E6" xlink:to="loc_nano_PercentageOfAccountsReceivableNetAbstract_33EC19C139DE1AEAF84D2C7DAA85C712" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_EntityWideAccountsReceivableMajorCustomerPercentage" xlink:label="loc_nano_EntityWideAccountsReceivableMajorCustomerPercentage_10064DC5536AD3DF89132C7DAA859D94" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_PercentageOfAccountsReceivableNetAbstract_33EC19C139DE1AEAF84D2C7DAA85C712" xlink:to="loc_nano_EntityWideAccountsReceivableMajorCustomerPercentage_10064DC5536AD3DF89132C7DAA859D94" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails3" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_GeographicAndSignificantCustomerInformationAbstract" xlink:label="loc_nano_GeographicAndSignificantCustomerInformationAbstract_535688E48C480A6963852C7DAA7FA222" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable" xlink:label="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_7670884047ABA87973A42C7DAA7FC3C6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_535688E48C480A6963852C7DAA7FA222" xlink:to="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_7670884047ABA87973A42C7DAA7FC3C6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_4E162B114196E49DC1EF2C7DAA7FC79E" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_7670884047ABA87973A42C7DAA7FC3C6" xlink:to="loc_us-gaap_MajorCustomersAxis_4E162B114196E49DC1EF2C7DAA7FC79E" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_629C08E656C1E08668D82C7DAA808A48" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorCustomersAxis_4E162B114196E49DC1EF2C7DAA7FC79E" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_629C08E656C1E08668D82C7DAA808A48" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IntelCorporationMember" xlink:label="loc_nano_IntelCorporationMember_9356B974CC04EBB60F2D2C7DAA80F63A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_629C08E656C1E08668D82C7DAA808A48" xlink:to="loc_nano_IntelCorporationMember_9356B974CC04EBB60F2D2C7DAA80F63A" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_SkHynixMember" xlink:label="loc_nano_SkHynixMember_C775A298EE8476AA8AA82C7DAA806E73" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_629C08E656C1E08668D82C7DAA808A48" xlink:to="loc_nano_SkHynixMember_C775A298EE8476AA8AA82C7DAA806E73" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_SamsungElectronicsMember" xlink:label="loc_nano_SamsungElectronicsMember_AD729512058CC5965F772C7DAA80AC23" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_629C08E656C1E08668D82C7DAA808A48" xlink:to="loc_nano_SamsungElectronicsMember_AD729512058CC5965F772C7DAA80AC23" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_17E22281811657EF39AA2C7DAA80E76C" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEntityWideRevenueByMajorCustomersByReportingSegmentsTable_7670884047ABA87973A42C7DAA7FC3C6" xlink:to="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_17E22281811657EF39AA2C7DAA80E76C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueNetAbstract" xlink:label="loc_us-gaap_SalesRevenueNetAbstract_0F40C6316E8F96700F202C7DAA80BEAE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_17E22281811657EF39AA2C7DAA80E76C" xlink:to="loc_us-gaap_SalesRevenueNetAbstract_0F40C6316E8F96700F202C7DAA80BEAE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerPercentage" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerPercentage_084CE75FEA950A639C222C7DAA806377" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SalesRevenueNetAbstract_0F40C6316E8F96700F202C7DAA80BEAE" xlink:to="loc_us-gaap_EntityWideRevenueMajorCustomerPercentage_084CE75FEA950A639C222C7DAA806377" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationTables" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_GeographicAndSignificantCustomerInformationAbstract" xlink:label="loc_nano_GeographicAndSignificantCustomerInformationAbstract_8999987E46A7A3B5D9ABB47ADAB9EEC2" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock" xlink:label="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_C3391F6F59AD21B0548FB47ADAB9E8B0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_8999987E46A7A3B5D9ABB47ADAB9EEC2" xlink:to="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_C3391F6F59AD21B0548FB47ADAB9E8B0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_57D27A7B5332DAD51C35B47ADAB9880F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_8999987E46A7A3B5D9ABB47ADAB9EEC2" xlink:to="loc_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_57D27A7B5332DAD51C35B47ADAB9880F" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ScheduleOfPercentageAccountsReceivableByMajorCustomersByReportingSegmentsTableTextBlock" xlink:label="loc_nano_ScheduleOfPercentageAccountsReceivableByMajorCustomersByReportingSegmentsTableTextBlock_5538B264B1AEE257E963B47ADAB97D22" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_8999987E46A7A3B5D9ABB47ADAB9EEC2" xlink:to="loc_nano_ScheduleOfPercentageAccountsReceivableByMajorCustomersByReportingSegmentsTableTextBlock_5538B264B1AEE257E963B47ADAB97D22" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ScheduleOfPercentageOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xlink:label="loc_nano_ScheduleOfPercentageOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_6CB56CD79121AFCEC878B47ADAB9770C" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_GeographicAndSignificantCustomerInformationAbstract_8999987E46A7A3B5D9ABB47ADAB9EEC2" xlink:to="loc_nano_ScheduleOfPercentageOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_6CB56CD79121AFCEC878B47ADAB9770C" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/GoodwillImpairmentAndLongLivedAssetImpairment" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_AcquisitionsAndGoodwillAndLongLivedAssetImpairmentAbstract" xlink:label="loc_nano_AcquisitionsAndGoodwillAndLongLivedAssetImpairmentAbstract_EC3516E802FAA9C1D5EDB47AD9EF6827" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_AcquisitionGoodwillImpairmentAndLongLivedAssetImpairmentTextBlock" xlink:label="loc_nano_AcquisitionGoodwillImpairmentAndLongLivedAssetImpairmentTextBlock_2407A9119D829A5BDA42B47AD9EF3CFB" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_AcquisitionsAndGoodwillAndLongLivedAssetImpairmentAbstract_EC3516E802FAA9C1D5EDB47AD9EF6827" xlink:to="loc_nano_AcquisitionGoodwillImpairmentAndLongLivedAssetImpairmentTextBlock_2407A9119D829A5BDA42B47AD9EF3CFB" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/IncomeTaxes" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_C7D8B0C501B11F775AEEB47AD8A7C63A" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="loc_us-gaap_IncomeTaxDisclosureTextBlock_CD9B2CCD472E4C4D2D6BB47AD8A749C4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_C7D8B0C501B11F775AEEB47AD8A7C63A" xlink:to="loc_us-gaap_IncomeTaxDisclosureTextBlock_CD9B2CCD472E4C4D2D6BB47AD8A749C4" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/IncomeTaxesDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_2C12C91C29F8470103F33A7939A0FA49" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_IncomeTaxesTextualAbstract" xlink:label="loc_nano_IncomeTaxesTextualAbstract_D21578BF10053FA7BE7B3A7939A20AAD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_2C12C91C29F8470103F33A7939A0FA49" xlink:to="loc_nano_IncomeTaxesTextualAbstract_D21578BF10053FA7BE7B3A7939A20AAD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_B6AA102160411859DB4F3A7939A3819A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_IncomeTaxesTextualAbstract_D21578BF10053FA7BE7B3A7939A20AAD" xlink:to="loc_us-gaap_IncomeTaxExpenseBenefit_B6AA102160411859DB4F3A7939A3819A" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IncomeTaxBenefitResearchTaxCredit" xlink:label="loc_nano_IncomeTaxBenefitResearchTaxCredit_6B9634259116187E59B23A7939A3072D" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_IncomeTaxesTextualAbstract_D21578BF10053FA7BE7B3A7939A20AAD" xlink:to="loc_nano_IncomeTaxBenefitResearchTaxCredit_6B9634259116187E59B23A7939A3072D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SignificantChangeInUnrecognizedTaxBenefitsIsReasonablyPossibleEstimatedRangeOfChangeUpperBound" xlink:label="loc_us-gaap_SignificantChangeInUnrecognizedTaxBenefitsIsReasonablyPossibleEstimatedRangeOfChangeUpperBound_9DC1C0981C58D91130C23A7939A3847D" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_IncomeTaxesTextualAbstract_D21578BF10053FA7BE7B3A7939A20AAD" xlink:to="loc_us-gaap_SignificantChangeInUnrecognizedTaxBenefitsIsReasonablyPossibleEstimatedRangeOfChangeUpperBound_9DC1C0981C58D91130C23A7939A3847D" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssets" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_EB767B1AD68D5A906AEEB47ADA4C83E3" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsDisclosureTextBlock" xlink:label="loc_us-gaap_IntangibleAssetsDisclosureTextBlock_065CA951E9BC9FB79DD6B47ADA4CE374" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_EB767B1AD68D5A906AEEB47ADA4C83E3" xlink:to="loc_us-gaap_IntangibleAssetsDisclosureTextBlock_065CA951E9BC9FB79DD6B47ADA4CE374" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_EB63537FE86E35793BC82C7DAB731F86" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:label="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_1A5C2CC2B761058FC2C72C7DAB7312C8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_EB63537FE86E35793BC82C7DAB731F86" xlink:to="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_1A5C2CC2B761058FC2C72C7DAB7312C8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F50623BA156DB6AC78AE2C7DAB734EF8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_1A5C2CC2B761058FC2C72C7DAB7312C8" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F50623BA156DB6AC78AE2C7DAB734EF8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_85B4C0611F25D71B65EE2C7DAB73F754" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_F50623BA156DB6AC78AE2C7DAB734EF8" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_85B4C0611F25D71B65EE2C7DAB73F754" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DevelopedTechnologyRightsMember" xlink:label="loc_us-gaap_DevelopedTechnologyRightsMember_FB790E03BA3D8BDDA16D2C7DAB73B094" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_85B4C0611F25D71B65EE2C7DAB73F754" xlink:to="loc_us-gaap_DevelopedTechnologyRightsMember_FB790E03BA3D8BDDA16D2C7DAB73B094" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="loc_us-gaap_CustomerRelationshipsMember_339282587BA1F5870D242C7DAB739218" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_85B4C0611F25D71B65EE2C7DAB73F754" xlink:to="loc_us-gaap_CustomerRelationshipsMember_339282587BA1F5870D242C7DAB739218" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_092DF2EC451DD338B9D22C7DAB73C897" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_85B4C0611F25D71B65EE2C7DAB73F754" xlink:to="loc_us-gaap_TradeNamesMember_092DF2EC451DD338B9D22C7DAB73C897" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PatentedTechnologyMember" xlink:label="loc_us-gaap_PatentedTechnologyMember_B9F98F6807D5F10885272C7DAB73E7C4" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_85B4C0611F25D71B65EE2C7DAB73F754" xlink:to="loc_us-gaap_PatentedTechnologyMember_B9F98F6807D5F10885272C7DAB73E7C4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TrademarksMember" xlink:label="loc_us-gaap_TrademarksMember_4BF0310F3A1FED4452072C7DAB731E57" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_85B4C0611F25D71B65EE2C7DAB73F754" xlink:to="loc_us-gaap_TrademarksMember_4BF0310F3A1FED4452072C7DAB731E57" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsLineItems_DE310BF9E525970BE2662C7DAB7387D5" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_1A5C2CC2B761058FC2C72C7DAB7312C8" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsLineItems_DE310BF9E525970BE2662C7DAB7387D5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNetAbstract" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNetAbstract_9E9901A733E14E785DAE2C7DAB73F548" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsLineItems_DE310BF9E525970BE2662C7DAB7387D5" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsNetAbstract_9E9901A733E14E785DAE2C7DAB73F548" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_BA2EEC741F99AE94C4192C7DAB732B27" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNetAbstract_9E9901A733E14E785DAE2C7DAB73F548" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_BA2EEC741F99AE94C4192C7DAB732B27" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_74F727A9B19611D6E9422C7DAB741DDE" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNetAbstract_9E9901A733E14E785DAE2C7DAB73F548" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_74F727A9B19611D6E9422C7DAB741DDE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_DA96A16D0C13F78F35C72C7DAB745148" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNetAbstract_9E9901A733E14E785DAE2C7DAB73F548" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsNet_DA96A16D0C13F78F35C72C7DAB745148" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_256F835F1CE56586CD4035F65C5647F7" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:label="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_E7709ED44482FA1D62DA35F65C56F3A1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_256F835F1CE56586CD4035F65C5647F7" xlink:to="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_E7709ED44482FA1D62DA35F65C56F3A1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_ECCD6C15E82B182F18E835F65C56648B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_E7709ED44482FA1D62DA35F65C56F3A1" xlink:to="loc_us-gaap_RangeAxis_ECCD6C15E82B182F18E835F65C56648B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_5F7E87481DC76B54848635F65C56DCD4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_ECCD6C15E82B182F18E835F65C56648B" xlink:to="loc_us-gaap_RangeMember_5F7E87481DC76B54848635F65C56DCD4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_6AFB58A43E08A142B93F35F65C574751" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_5F7E87481DC76B54848635F65C56DCD4" xlink:to="loc_us-gaap_MinimumMember_6AFB58A43E08A142B93F35F65C574751" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_961304D62C46CE76243435F65C57BA80" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_5F7E87481DC76B54848635F65C56DCD4" xlink:to="loc_us-gaap_MaximumMember_961304D62C46CE76243435F65C57BA80" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsLineItems_752C306DE121712F0ABB35F65C5780C6" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_E7709ED44482FA1D62DA35F65C56F3A1" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsLineItems_752C306DE121712F0ABB35F65C5780C6" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IntangibleAssetsTextualAbstract" xlink:label="loc_nano_IntangibleAssetsTextualAbstract_31FB6CC6D3DDCA1EFDA935F65C576ACE" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsLineItems_752C306DE121712F0ABB35F65C5780C6" xlink:to="loc_nano_IntangibleAssetsTextualAbstract_31FB6CC6D3DDCA1EFDA935F65C576ACE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_DCEFFB43ADD10877762635F65C57B7BC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_IntangibleAssetsTextualAbstract_31FB6CC6D3DDCA1EFDA935F65C576ACE" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_DCEFFB43ADD10877762635F65C57B7BC" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IntangibleAssetsAdditionalTextualAbstract" xlink:label="loc_nano_IntangibleAssetsAdditionalTextualAbstract_072944AA114ED822FE1335F65C57155F" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_256F835F1CE56586CD4035F65C5647F7" xlink:to="loc_nano_IntangibleAssetsAdditionalTextualAbstract_072944AA114ED822FE1335F65C57155F" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AmortizationExpenseFiniteLivedIntangibleAssets" xlink:label="loc_nano_AmortizationExpenseFiniteLivedIntangibleAssets_9668FDD93C64A89E287135F65C576D21" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_IntangibleAssetsAdditionalTextualAbstract_072944AA114ED822FE1335F65C57155F" xlink:to="loc_nano_AmortizationExpenseFiniteLivedIntangibleAssets_9668FDD93C64A89E287135F65C576D21" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsFutureAmortizationExpenseDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear_EFD9786305432C65E9F13AA24E6B64D2" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear_EFD9786305432C65E9F13AA24E6B64D2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_B1E8836E81F78BE132383AA24E6BC8E0" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_B1E8836E81F78BE132383AA24E6BC8E0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_3CBBABE24A0DBE74BFB03AA24E6BE74D" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_3CBBABE24A0DBE74BFB03AA24E6BE74D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_F980647D38116E1DC3253AA24E6BADCD" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_F980647D38116E1DC3253AA24E6BADCD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_F5C255F8B558897F967A3AA24E6B2CB4" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_F5C255F8B558897F967A3AA24E6B2CB4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_499383CE90F1E4EB14F53AA24E6B41A0" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_499383CE90F1E4EB14F53AA24E6B41A0" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal" xlink:label="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_9400DCCAFDE6FA9E523D3AA5E5D363B3" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_B7BD20C16EA26843D4C63AA24E6B34EF" xlink:to="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_9400DCCAFDE6FA9E523D3AA5E5D363B3" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_FEE899BBA90FF6346FB82CC5B8AFD494" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_FED1BF60F1996EA58D362CC5B8AFE0B4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_FEE899BBA90FF6346FB82CC5B8AFD494" xlink:to="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_FED1BF60F1996EA58D362CC5B8AFE0B4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xlink:label="loc_us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_EEE7C37382BF5B355CF12CD2256D4814" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwillAbstract_FEE899BBA90FF6346FB82CC5B8AFD494" xlink:to="loc_us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_EEE7C37382BF5B355CF12CD2256D4814" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/Inventories" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="loc_us-gaap_InventoryDisclosureAbstract_682592A688543AFE250EB47AD8B744DE" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="loc_us-gaap_InventoryDisclosureTextBlock_D021AC72BB30C825235DB47AD8B7E41C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryDisclosureAbstract_682592A688543AFE250EB47AD8B744DE" xlink:to="loc_us-gaap_InventoryDisclosureTextBlock_D021AC72BB30C825235DB47AD8B7E41C" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/InventoriesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="loc_us-gaap_InventoryDisclosureAbstract_B05B4E91BEB2C5E4E14BB47AD991C4FC" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_ComponentOfInventoriesAbstract" xlink:label="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryDisclosureAbstract_B05B4E91BEB2C5E4E14BB47AD991C4FC" xlink:to="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryRawMaterials" xlink:label="loc_us-gaap_InventoryRawMaterials_8C8837E64CB1AEF741BEB47AD991B22D" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:to="loc_us-gaap_InventoryRawMaterials_8C8837E64CB1AEF741BEB47AD991B22D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryWorkInProcess" xlink:label="loc_us-gaap_InventoryWorkInProcess_FE18DAED4298A4F35E61B47AD9911FFF" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:to="loc_us-gaap_InventoryWorkInProcess_FE18DAED4298A4F35E61B47AD9911FFF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryFinishedGoods" xlink:label="loc_us-gaap_InventoryFinishedGoods_75BA366EC4458141BF81B47AD99155A9" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:to="loc_us-gaap_InventoryFinishedGoods_75BA366EC4458141BF81B47AD99155A9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_64FFF7F70698CA690B4DB47AD9915134" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:to="loc_us-gaap_InventoryNet_64FFF7F70698CA690B4DB47AD9915134" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_InventoriesDeliveredSystems" xlink:label="loc_nano_InventoriesDeliveredSystems_CD8E995FFD24536F81A1B47AD991A9E0" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:to="loc_nano_InventoriesDeliveredSystems_CD8E995FFD24536F81A1B47AD991A9E0" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_Inventory" xlink:label="loc_nano_Inventory_65E3663CA0FD96622C0EB47AD991F04E" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ComponentOfInventoriesAbstract_DE12CB81A2948B454391B47AD991CECC" xlink:to="loc_nano_Inventory_65E3663CA0FD96622C0EB47AD991F04E" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/InventoriesTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="loc_us-gaap_InventoryDisclosureAbstract_E8ABDA3AE62354458509B47ADAD9610B" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_5FD156B0F9D8BCB6F94AB47ADAD9C5C5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryDisclosureAbstract_E8ABDA3AE62354458509B47ADAD9610B" xlink:to="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_5FD156B0F9D8BCB6F94AB47ADAD9C5C5" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_D011E188705B32050D7AB47ADAD99431" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfDebtTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfDebtTableTextBlock_5A18A2E1CD27A59AC7A6B47ADAD9832A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_D011E188705B32050D7AB47ADAD99431" xlink:to="loc_us-gaap_ScheduleOfDebtTableTextBlock_5A18A2E1CD27A59AC7A6B47ADAD9832A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock_8BD489580BC93C772C53B47ADAD9B438" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_D011E188705B32050D7AB47ADAD99431" xlink:to="loc_us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock_8BD489580BC93C772C53B47ADAD9B438" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligations" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_7A0EB1DB672EFD63514CB47ADAAAD388" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="loc_us-gaap_DebtDisclosureTextBlock_E524580345E292B0AB16B47ADAAA7C77" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_7A0EB1DB672EFD63514CB47ADAAAD388" xlink:to="loc_us-gaap_DebtDisclosureTextBlock_E524580345E292B0AB16B47ADAAA7C77" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_5852EC992DA901E3CE472CC5B8690839" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtByComponentsCurrentAndNoncurrentAlternativeAbstract" xlink:label="loc_us-gaap_LongTermDebtByComponentsCurrentAndNoncurrentAlternativeAbstract_546E08C186EAAB8C2F4B2CC5B869D683" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_5852EC992DA901E3CE472CC5B8690839" xlink:to="loc_us-gaap_LongTermDebtByComponentsCurrentAndNoncurrentAlternativeAbstract_546E08C186EAAB8C2F4B2CC5B869D683" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongtermLineOfCreditCurrentAndNoncurrentAbstract" xlink:label="loc_us-gaap_LongtermLineOfCreditCurrentAndNoncurrentAbstract_2E9D09EE314BF4A598BA2CC5B86FA94D" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByComponentsCurrentAndNoncurrentAlternativeAbstract_546E08C186EAAB8C2F4B2CC5B869D683" xlink:to="loc_us-gaap_LongtermLineOfCreditCurrentAndNoncurrentAbstract_2E9D09EE314BF4A598BA2CC5B86FA94D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCredit" xlink:label="loc_us-gaap_LineOfCredit_665431CFD5590FFD730A2CC5B86FA806" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongtermLineOfCreditCurrentAndNoncurrentAbstract_2E9D09EE314BF4A598BA2CC5B86FA94D" xlink:to="loc_us-gaap_LineOfCredit_665431CFD5590FFD730A2CC5B86FA806" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_DebtObligationsAbstract" xlink:label="loc_nano_DebtObligationsAbstract_2E66CDF5ADFDDF689D872CC5B86F167A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByComponentsCurrentAndNoncurrentAlternativeAbstract_546E08C186EAAB8C2F4B2CC5B869D683" xlink:to="loc_nano_DebtObligationsAbstract_2E66CDF5ADFDDF689D872CC5B86F167A" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MortgageObligation" xlink:label="loc_nano_MortgageObligation_6B92765FBE20901E8F7D2CC5B86F225F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DebtObligationsAbstract_2E66CDF5ADFDDF689D872CC5B86F167A" xlink:to="loc_nano_MortgageObligation_6B92765FBE20901E8F7D2CC5B86F225F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_87D4485C14D921D23F082CC5B86F8EB4" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DebtObligationsAbstract_2E66CDF5ADFDDF689D872CC5B86F167A" xlink:to="loc_us-gaap_LongTermDebt_87D4485C14D921D23F082CC5B86F8EB4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_3DA42895E8FA3D6CB0C52CC5B86F1CB0" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DebtObligationsAbstract_2E66CDF5ADFDDF689D872CC5B86F167A" xlink:to="loc_us-gaap_LongTermDebtCurrent_3DA42895E8FA3D6CB0C52CC5B86F1CB0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_BB9B2610A721FDDC83622CC5B86F4106" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_DebtObligationsAbstract_2E66CDF5ADFDDF689D872CC5B86F167A" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_BB9B2610A721FDDC83622CC5B86F4106" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails1" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_0AB2BB39A06F2F3B4B713711BD65E952" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtByMaturityAbstract" xlink:label="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_0AB2BB39A06F2F3B4B713711BD65E952" xlink:to="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear_2B8652964F7EAD7E90DC372B034BF71B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear_2B8652964F7EAD7E90DC372B034BF71B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_46675ABC3775DA3593B33711BD6628FF" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_46675ABC3775DA3593B33711BD6628FF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_8C30DA054F34D0915F633711BD661781" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_8C30DA054F34D0915F633711BD661781" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_1D77CE8AB537CB18875E3711BD6673D9" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_1D77CE8AB537CB18875E3711BD6673D9" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_805728B58818B5E3306A3711BD662E77" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_805728B58818B5E3306A3711BD662E77" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_CBC6561B51A3D08DE7803711BD6673B8" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_CBC6561B51A3D08DE7803711BD6673B8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_198F8EA3D513DA972DC43711BD662604" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongTermDebtByMaturityAbstract_641054C260C0EB35557A3711BD654F0A" xlink:to="loc_us-gaap_LongTermDebt_198F8EA3D513DA972DC43711BD662604" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_4467CB95640797BB4D723711BD662D7E" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_0AB2BB39A06F2F3B4B713711BD65E952" xlink:to="loc_us-gaap_LongTermDebtCurrent_4467CB95640797BB4D723711BD662D7E" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_6B1FDB8BB8B2DC21F65C373BFA2ECA64" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="loc_us-gaap_DebtInstrumentTable_9DD306C4C96D14BEABB2373BFA2EEC69" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_6B1FDB8BB8B2DC21F65C373BFA2ECA64" xlink:to="loc_us-gaap_DebtInstrumentTable_9DD306C4C96D14BEABB2373BFA2EEC69" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_672C406F6E77A5AAD125373BFA2EADBF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_9DD306C4C96D14BEABB2373BFA2EEC69" xlink:to="loc_us-gaap_SubsequentEventTypeAxis_672C406F6E77A5AAD125373BFA2EADBF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_C3F52F87202DEE082646373BFA2E8FC1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_672C406F6E77A5AAD125373BFA2EADBF" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_C3F52F87202DEE082646373BFA2E8FC1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_3A3D10EB94096080A77E373BFA2F3E40" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_C3F52F87202DEE082646373BFA2E8FC1" xlink:to="loc_us-gaap_SubsequentEventMember_3A3D10EB94096080A77E373BFA2F3E40" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="loc_us-gaap_LongtermDebtTypeAxis_0A08D601EA193B69933D373BFA2F2DD2" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_9DD306C4C96D14BEABB2373BFA2EEC69" xlink:to="loc_us-gaap_LongtermDebtTypeAxis_0A08D601EA193B69933D373BFA2F2DD2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="loc_us-gaap_LongtermDebtTypeDomain_47D22809A0AF039617A5373BFA2FB35F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongtermDebtTypeAxis_0A08D601EA193B69933D373BFA2F2DD2" xlink:to="loc_us-gaap_LongtermDebtTypeDomain_47D22809A0AF039617A5373BFA2FB35F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ResidentialMortgageMember" xlink:label="loc_us-gaap_ResidentialMortgageMember_EA89FF4DA1E6CC280CCF373BFA2FE504" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongtermDebtTypeDomain_47D22809A0AF039617A5373BFA2FB35F" xlink:to="loc_us-gaap_ResidentialMortgageMember_EA89FF4DA1E6CC280CCF373BFA2FE504" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CreditFacilityAxis" xlink:label="loc_us-gaap_CreditFacilityAxis_955EE7C328084C707D81373BFA2FB0B1" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_9DD306C4C96D14BEABB2373BFA2EEC69" xlink:to="loc_us-gaap_CreditFacilityAxis_955EE7C328084C707D81373BFA2FB0B1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CreditFacilityDomain" xlink:label="loc_us-gaap_CreditFacilityDomain_DA4B888DDDA887F79909373BFA2F3C82" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CreditFacilityAxis_955EE7C328084C707D81373BFA2FB0B1" xlink:to="loc_us-gaap_CreditFacilityDomain_DA4B888DDDA887F79909373BFA2F3C82" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="loc_us-gaap_RevolvingCreditFacilityMember_DEF2A485F1DC2F229EC1373BFA2FF7C5" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CreditFacilityDomain_DA4B888DDDA887F79909373BFA2F3C82" xlink:to="loc_us-gaap_RevolvingCreditFacilityMember_DEF2A485F1DC2F229EC1373BFA2FF7C5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_E4B5111B88004A0F5715373BFA2F047B" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_9DD306C4C96D14BEABB2373BFA2EEC69" xlink:to="loc_us-gaap_RangeAxis_E4B5111B88004A0F5715373BFA2F047B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_52A1F326BEAB1D2A09D6373BFA2F2719" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_E4B5111B88004A0F5715373BFA2F047B" xlink:to="loc_us-gaap_RangeMember_52A1F326BEAB1D2A09D6373BFA2F2719" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_018D8C8ED05F129A42FE373BFA2FB7F8" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_52A1F326BEAB1D2A09D6373BFA2F2719" xlink:to="loc_us-gaap_MinimumMember_018D8C8ED05F129A42FE373BFA2FB7F8" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="loc_us-gaap_DebtInstrumentLineItems_A19A60E12AB9E3313609373BFA2F4692" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_9DD306C4C96D14BEABB2373BFA2EEC69" xlink:to="loc_us-gaap_DebtInstrumentLineItems_A19A60E12AB9E3313609373BFA2F4692" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditAndDebtObligationsTextualAbstract" xlink:label="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_A19A60E12AB9E3313609373BFA2F4692" xlink:to="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditFacilityExtensionOfMaturityPeriod" xlink:label="loc_nano_LineOfCreditFacilityExtensionOfMaturityPeriod_1706B285EE88F60455D7373BFA2FFB8C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_nano_LineOfCreditFacilityExtensionOfMaturityPeriod_1706B285EE88F60455D7373BFA2FFB8C" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageFurtherDecreased" xlink:label="loc_nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageFurtherDecreased_984C53B35464E819378D373BFA2F70A1" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageFurtherDecreased_984C53B35464E819378D373BFA2F70A1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCreditFacilityInterestRateDuringPeriod" xlink:label="loc_us-gaap_LineOfCreditFacilityInterestRateDuringPeriod_2DE8BA7227220F295DDA373BFA3098C1" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_us-gaap_LineOfCreditFacilityInterestRateDuringPeriod_2DE8BA7227220F295DDA373BFA3098C1" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCreditFacilityInterestRateAtPeriodEnd" xlink:label="loc_us-gaap_LineOfCreditFacilityInterestRateAtPeriodEnd_4D87FF994756073847F4373BFA30CC4D" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_us-gaap_LineOfCreditFacilityInterestRateAtPeriodEnd_4D87FF994756073847F4373BFA30CC4D" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_D114621D9DBF90CFE2E6373BFA30EF2F" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_us-gaap_LongTermDebt_D114621D9DBF90CFE2E6373BFA30EF2F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCreditFacilityInterestRateDescription" xlink:label="loc_us-gaap_LineOfCreditFacilityInterestRateDescription_029E267D31D8E30716B2373BFA300D75" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_us-gaap_LineOfCreditFacilityInterestRateDescription_029E267D31D8E30716B2373BFA300D75" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_E7F0F084BEB7BF92A67F373BFA30B1FC" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_E7F0F084BEB7BF92A67F373BFA30B1FC" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_DebtInstrumentInterestRateStatedPercentageAfterYearFive" xlink:label="loc_nano_DebtInstrumentInterestRateStatedPercentageAfterYearFive_C4B748EB97D818C554AD373BFA30D5E2" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_nano_DebtInstrumentInterestRateStatedPercentageAfterYearFive_C4B748EB97D818C554AD373BFA30D5E2" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_DB02D4F1D329D1497BB1373BFA3078A5" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsTextualAbstract_3D31BEA1D488FAE8E320373BFA2F1FB9" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_DB02D4F1D329D1497BB1373BFA3078A5" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract" xlink:label="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_6B1FDB8BB8B2DC21F65C373BFA2ECA64" xlink:to="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MaturityDateLineOfCreditFacility" xlink:label="loc_nano_MaturityDateLineOfCreditFacility_E018839525E20ED79A92373BFA303E71" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_MaturityDateLineOfCreditFacility_E018839525E20ED79A92373BFA303E71" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageDecreased" xlink:label="loc_nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageDecreased_B33F79D69CE4FC27B471373BFA308540" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_LineOfCreditFacilityCommitmentFeeMinimumPercentageDecreased_B33F79D69CE4FC27B471373BFA308540" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditFacilityStandardBorrowingLimitUnderConditionOne" xlink:label="loc_nano_LineOfCreditFacilityStandardBorrowingLimitUnderConditionOne_A06B263ACBF242C8EFF1373BFA302ED2" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_LineOfCreditFacilityStandardBorrowingLimitUnderConditionOne_A06B263ACBF242C8EFF1373BFA302ED2" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditFacilityBorrowingLimitUnderConditionTwo" xlink:label="loc_nano_LineOfCreditFacilityBorrowingLimitUnderConditionTwo_CB42D134C35A15B2769B373BFA30AAFA" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_LineOfCreditFacilityBorrowingLimitUnderConditionTwo_CB42D134C35A15B2769B373BFA30AAFA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCreditFacilityCurrentBorrowingCapacity" xlink:label="loc_us-gaap_LineOfCreditFacilityCurrentBorrowingCapacity_61AE6222B50A894D0A21373BFA30B965" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_us-gaap_LineOfCreditFacilityCurrentBorrowingCapacity_61AE6222B50A894D0A21373BFA30B965" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCreditFacilityAmountOutstanding" xlink:label="loc_us-gaap_LineOfCreditFacilityAmountOutstanding_72CA8F36C66A418EF1A0373BFA30AC9D" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_us-gaap_LineOfCreditFacilityAmountOutstanding_72CA8F36C66A418EF1A0373BFA30AC9D" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_LineOfCreditFacilityMonthlyPrincipalAndInterestPaymentDescription" xlink:label="loc_nano_LineOfCreditFacilityMonthlyPrincipalAndInterestPaymentDescription_4E79023E3C0BE3793427373BFA301B0E" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_LineOfCreditFacilityMonthlyPrincipalAndInterestPaymentDescription_4E79023E3C0BE3793427373BFA301B0E" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AmortizationPeriodOfMortgageLoanForSixtyMonth" xlink:label="loc_nano_AmortizationPeriodOfMortgageLoanForSixtyMonth_454C190883A897DC950B373BFA3074E4" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_AmortizationPeriodOfMortgageLoanForSixtyMonth_454C190883A897DC950B373BFA3074E4" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_AmortizationPeriodOfMortgageLoanAfterSixtyMonth" xlink:label="loc_nano_AmortizationPeriodOfMortgageLoanAfterSixtyMonth_63BF6C2CB92CB61AA17F373BFA31F4DD" xlink:type="locator" />
    <presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_AmortizationPeriodOfMortgageLoanAfterSixtyMonth_63BF6C2CB92CB61AA17F373BFA31F4DD" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_DebtInstrumentPrePayment" xlink:label="loc_nano_DebtInstrumentPrePayment_042323D9F9860AC837FE373BFA310506" xlink:type="locator" />
    <presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_DebtInstrumentPrePayment_042323D9F9860AC837FE373BFA310506" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_EarlyRepaymentPercentOfOutstandingDebt" xlink:label="loc_nano_EarlyRepaymentPercentOfOutstandingDebt_69FC4A55E707A93645F4373BFA31E962" xlink:type="locator" />
    <presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_nano_EarlyRepaymentPercentOfOutstandingDebt_69FC4A55E707A93645F4373BFA31E962" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtInstrumentFairValue" xlink:label="loc_us-gaap_DebtInstrumentFairValue_BA7F8B6F0F43058490EC373BFA311FE1" xlink:type="locator" />
    <presentationArc order="12" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_LineOfCreditAndDebtObligationsAdditionalTextualAbstract_3CAF7F29D2B5365F4D6B373BFA30B8E3" xlink:to="loc_us-gaap_DebtInstrumentFairValue_BA7F8B6F0F43058490EC373BFA311FE1" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentation" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_NatureOfBusinessAndBasisOfPresentationAbstract" xlink:label="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_B1FFB9F03C9F28966574B47AD9627F50" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:label="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_7020FE27D2D053CD7840B47AD9627917" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_B1FFB9F03C9F28966574B47AD9627F50" xlink:to="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_7020FE27D2D053CD7840B47AD9627917" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationDetailsTextual" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_NatureOfBusinessAndBasisOfPresentationAbstract" xlink:label="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_E0DE6A9284B0CD502A632C7DABBDAEF5" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract" xlink:label="loc_nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract_167F0D960743012410F12C7DABBD848F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_E0DE6A9284B0CD502A632C7DABBDAEF5" xlink:to="loc_nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract_167F0D960743012410F12C7DABBD848F" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_FiscalYearReportingPeriod" xlink:label="loc_nano_FiscalYearReportingPeriod_C473C9B4C956C810A65E2C7DABBDB46E" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract_167F0D960743012410F12C7DABBD848F" xlink:to="loc_nano_FiscalYearReportingPeriod_C473C9B4C956C810A65E2C7DABBDB46E" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_NumberOfWeeksInFiscalQuarter" xlink:label="loc_nano_NumberOfWeeksInFiscalQuarter_CEDCC7DD4EE1036C96C82C7DABBDA941" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract_167F0D960743012410F12C7DABBD848F" xlink:to="loc_nano_NumberOfWeeksInFiscalQuarter_CEDCC7DD4EE1036C96C82C7DABBDA941" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ForeignCurrencyTransactionGainLossBeforeTax" xlink:label="loc_us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_F6A1F0B0292ABA1902CD2C7DABBDDF92" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract_167F0D960743012410F12C7DABBD848F" xlink:to="loc_us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_F6A1F0B0292ABA1902CD2C7DABBDDF92" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MaximumPeriodOfDeliveryToCustomersUnderServiceContractArrangements" xlink:label="loc_nano_MaximumPeriodOfDeliveryToCustomersUnderServiceContractArrangements_782E02C07AE742656E602C7DABBDC132" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationTextualAbstract_167F0D960743012410F12C7DABBD848F" xlink:to="loc_nano_MaximumPeriodOfDeliveryToCustomersUnderServiceContractArrangements_782E02C07AE742656E602C7DABBDC132" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationPolicies" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_NatureOfBusinessAndBasisOfPresentationAbstract" xlink:label="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_DescriptionOfBusinessPolicyTextBlock" xlink:label="loc_nano_DescriptionOfBusinessPolicyTextBlock_C996648CCBD04B61A055B47ADA1DA5CF" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_nano_DescriptionOfBusinessPolicyTextBlock_C996648CCBD04B61A055B47ADA1DA5CF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BasisOfAccountingPolicyPolicyTextBlock" xlink:label="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_C2D1F2420A4BA4B80256B47ADA1D6A32" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_C2D1F2420A4BA4B80256B47ADA1D6A32" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiscalPeriod" xlink:label="loc_us-gaap_FiscalPeriod_2A9C96AB7B4B3B84E2DDB47ADA1D67E5" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_us-gaap_FiscalPeriod_2A9C96AB7B4B3B84E2DDB47ADA1D67E5" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PriorPeriodReclassificationAdjustmentDescription" xlink:label="loc_us-gaap_PriorPeriodReclassificationAdjustmentDescription_078BB91DD5D2556F7025B47ADA2D5CAD" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_us-gaap_PriorPeriodReclassificationAdjustmentDescription_078BB91DD5D2556F7025B47ADA2D5CAD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_UseOfEstimates" xlink:label="loc_us-gaap_UseOfEstimates_C4E916EACC4A53352DD2B47ADA2D0D2B" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_us-gaap_UseOfEstimates_C4E916EACC4A53352DD2B47ADA2D0D2B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="loc_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_AD09D5894E68AEB5BFBCB47ADA2D1BCB" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_AD09D5894E68AEB5BFBCB47ADA2D1BCB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="loc_us-gaap_RevenueRecognitionPolicyTextBlock_97D53BAFFCC189909D27B47ADA2D5EB6" xlink:type="locator" />
    <presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_us-gaap_RevenueRecognitionPolicyTextBlock_97D53BAFFCC189909D27B47ADA2D5EB6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_E910A09323247F1B5D0BB47ADA2DD51F" xlink:type="locator" />
    <presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_NatureOfBusinessAndBasisOfPresentationAbstract_5B4AFB9535B96C459E64B47ADA1D770D" xlink:to="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_E910A09323247F1B5D0BB47ADA2DD51F" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/NetIncomeLossPerShare" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_63CB746042834BBFE591B47ADAB9F7B4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="loc_us-gaap_EarningsPerShareTextBlock_7E819985855F21025007B47ADAB90B9F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_63CB746042834BBFE591B47ADAB9F7B4" xlink:to="loc_us-gaap_EarningsPerShareTextBlock_7E819985855F21025007B47ADAB90B9F" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/NetIncomeLossPerShareDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_BC289B54E8170201E3BD35F65C3496F2" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_AB3C0116EF0DE38E582635F65C343096" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_BC289B54E8170201E3BD35F65C3496F2" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_AB3C0116EF0DE38E582635F65C343096" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_5C85EFB123E1BB2C56AB35F65C347AF0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_AB3C0116EF0DE38E582635F65C343096" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_5C85EFB123E1BB2C56AB35F65C347AF0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_639D0B4E7689302B0A0435F65C34EACB" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_AB3C0116EF0DE38E582635F65C343096" xlink:to="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_639D0B4E7689302B0A0435F65C34EACB" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_B00E9E32E4FAE88D472435F65C34CCEC" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_AB3C0116EF0DE38E582635F65C343096" xlink:to="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_B00E9E32E4FAE88D472435F65C34CCEC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_22BD4EA5030DEDD7224E35FC31EE0F84" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_BC289B54E8170201E3BD35F65C3496F2" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_22BD4EA5030DEDD7224E35FC31EE0F84" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/NetIncomeLossPerShareTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_D78A0233808671E89CDFB47AD9EFD2C2" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfWeightedAverageNumberOfSharesTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfWeightedAverageNumberOfSharesTableTextBlock_2856340AD27D88EEE55AB47AD9EF043A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_D78A0233808671E89CDFB47AD9EFD2C2" xlink:to="loc_us-gaap_ScheduleOfWeightedAverageNumberOfSharesTableTextBlock_2856340AD27D88EEE55AB47AD9EF043A" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/OtherCurrentLiabilities" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_EA07142F256D844E3A53B47ADA2D26C7" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureTextBlock" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureTextBlock_192C922C838885A3838BB47ADA2DF861" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_EA07142F256D844E3A53B47ADA2D26C7" xlink:to="loc_us-gaap_OtherLiabilitiesDisclosureTextBlock_192C922C838885A3838BB47ADA2DF861" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/OtherCurrentLiabilitiesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_1EECAA2825AFFBD1D75FB47ADA6B5C0B" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesCurrentAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_1EECAA2825AFFBD1D75FB47ADA6B5C0B" xlink:to="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_0F50F8B77DAA8CB05083B47ADA6B5671" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_0F50F8B77DAA8CB05083B47ADA6B5671" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccruedProfessionalFeesCurrent" xlink:label="loc_us-gaap_AccruedProfessionalFeesCurrent_92FF7600619B9405654BB47ADA6BEE11" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:to="loc_us-gaap_AccruedProfessionalFeesCurrent_92FF7600619B9405654BB47ADA6BEE11" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CustomerDepositsCurrent" xlink:label="loc_us-gaap_CustomerDepositsCurrent_867639A228CFC6E60595B47ADA6B46FC" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:to="loc_us-gaap_CustomerDepositsCurrent_867639A228CFC6E60595B47ADA6B46FC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BusinessAcquisitionContingentConsiderationAtFairValueCurrent" xlink:label="loc_us-gaap_BusinessAcquisitionContingentConsiderationAtFairValueCurrent_0F7AAE514FD904EA209AB47ADA6B843B" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:to="loc_us-gaap_BusinessAcquisitionContingentConsiderationAtFairValueCurrent_0F7AAE514FD904EA209AB47ADA6B843B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherSundryLiabilitiesCurrent" xlink:label="loc_us-gaap_OtherSundryLiabilitiesCurrent_B12B46000FAF03028077B47ADA6BEAED" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:to="loc_us-gaap_OtherSundryLiabilitiesCurrent_B12B46000FAF03028077B47ADA6BEAED" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="loc_us-gaap_OtherLiabilitiesCurrent_80FD2D940BCB2ADC2098B47ADA6B11A2" xlink:type="locator" />
    <presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesCurrentAbstract_FD441CD01C24C8FD3566B47ADA6B35FD" xlink:to="loc_us-gaap_OtherLiabilitiesCurrent_80FD2D940BCB2ADC2098B47ADA6B11A2" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/OtherCurrentLiabilitiesTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesDisclosureAbstract" xlink:label="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_7CD1E53ABB826D4C54A9B47ADA9A8F51" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_ScheduleOfOtherCurrentLiabilityTableTextBlock" xlink:label="loc_nano_ScheduleOfOtherCurrentLiabilityTableTextBlock_AC6259B100F20F4A4209B47ADA9A81D4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherLiabilitiesDisclosureAbstract_7CD1E53ABB826D4C54A9B47ADA9A8F51" xlink:to="loc_nano_ScheduleOfOtherCurrentLiabilityTableTextBlock_AC6259B100F20F4A4209B47ADA9A81D4" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/PropertyPlantAndEquipment" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentAbstract_40D2E72E7D0B8859BAEDB47ADA0E5952" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_49E0B49E662FF22D66AEB47ADA0ED882" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentAbstract_40D2E72E7D0B8859BAEDB47ADA0E5952" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_49E0B49E662FF22D66AEB47ADA0ED882" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/PropertyPlantAndEquipmentDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentAbstract_671844EC5C84FF408C412C7DAB7BA50C" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_C9537A1595090FA7DB3A2C7DAB7BE46A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentAbstract_671844EC5C84FF408C412C7DAB7BA50C" xlink:to="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_C9537A1595090FA7DB3A2C7DAB7BE46A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_3A931DD09CDA3CC741C22C7DAB7B2600" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_C9537A1595090FA7DB3A2C7DAB7BE46A" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_3A931DD09CDA3CC741C22C7DAB7B2600" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_4960CD8C62DFECA7B6CF2C7DAB7B3D93" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_3A931DD09CDA3CC741C22C7DAB7B2600" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_4960CD8C62DFECA7B6CF2C7DAB7B3D93" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LandMember" xlink:label="loc_us-gaap_LandMember_FA7E66AB06993DBA5A062C7DAB7B9CF3" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_4960CD8C62DFECA7B6CF2C7DAB7B3D93" xlink:to="loc_us-gaap_LandMember_FA7E66AB06993DBA5A062C7DAB7B9CF3" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="loc_us-gaap_BuildingAndBuildingImprovementsMember_E8EA0BC6C66249E3E4EE2C7DAB7CCCAE" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_4960CD8C62DFECA7B6CF2C7DAB7B3D93" xlink:to="loc_us-gaap_BuildingAndBuildingImprovementsMember_E8EA0BC6C66249E3E4EE2C7DAB7CCCAE" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="loc_us-gaap_MachineryAndEquipmentMember_7AA80CB108EAACA0311D2C7DAB7CDF3B" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_4960CD8C62DFECA7B6CF2C7DAB7B3D93" xlink:to="loc_us-gaap_MachineryAndEquipmentMember_7AA80CB108EAACA0311D2C7DAB7CDF3B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="loc_us-gaap_FurnitureAndFixturesMember_E42A9B39C4330CE8A9182C7DAB7C6FEB" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_4960CD8C62DFECA7B6CF2C7DAB7B3D93" xlink:to="loc_us-gaap_FurnitureAndFixturesMember_E42A9B39C4330CE8A9182C7DAB7C6FEB" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ProjectsInProgressMember" xlink:label="loc_nano_ProjectsInProgressMember_167A608A64ABD0AC6F8D2C7DAB7C6BB4" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_4960CD8C62DFECA7B6CF2C7DAB7B3D93" xlink:to="loc_nano_ProjectsInProgressMember_167A608A64ABD0AC6F8D2C7DAB7C6BB4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentLineItems_ECDB652E939407B91F6D2C7DAB7CBD8A" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_C9537A1595090FA7DB3A2C7DAB7BE46A" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentLineItems_ECDB652E939407B91F6D2C7DAB7CBD8A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNetByTypeAbstract" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNetByTypeAbstract_416CCFA84509C63544512C7DAB7CB29F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_ECDB652E939407B91F6D2C7DAB7CBD8A" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNetByTypeAbstract_416CCFA84509C63544512C7DAB7CB29F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_27F1CEDACC2CC213201D2C7DAB7CCDF6" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNetByTypeAbstract_416CCFA84509C63544512C7DAB7CB29F" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_27F1CEDACC2CC213201D2C7DAB7CCDF6" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_6A09EB6DE640AF46589B2C7DAB7CB0C4" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNetByTypeAbstract_416CCFA84509C63544512C7DAB7CB29F" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_6A09EB6DE640AF46589B2C7DAB7CB0C4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_B0E23AEF1A873A6EAB9A2C7DAB7C44FE" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNetByTypeAbstract_416CCFA84509C63544512C7DAB7CB29F" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_B0E23AEF1A873A6EAB9A2C7DAB7C44FE" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_PropertyPlantAndEquipmentTextualAbstract" xlink:label="loc_nano_PropertyPlantAndEquipmentTextualAbstract_4DCA15A3452053B03CF12C7DAB7C1896" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentAbstract_671844EC5C84FF408C412C7DAB7BA50C" xlink:to="loc_nano_PropertyPlantAndEquipmentTextualAbstract_4DCA15A3452053B03CF12C7DAB7C1896" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Depreciation" xlink:label="loc_us-gaap_Depreciation_A28EF7BBA4388C4E26442C7DAB7C8C96" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_PropertyPlantAndEquipmentTextualAbstract_4DCA15A3452053B03CF12C7DAB7C1896" xlink:to="loc_us-gaap_Depreciation_A28EF7BBA4388C4E26442C7DAB7C8C96" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/PropertyPlantAndEquipmentTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentAbstract_413128166F4DD04A6634B47AD9B0D67A" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_2409923963C391929FBBB47AD9B0D2F1" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentAbstract_413128166F4DD04A6634B47AD9B0D67A" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_2409923963C391929FBBB47AD9B0D2F1" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/RecentAccountingPronouncements" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_RecentAccountingPronouncementsAbstract" xlink:label="loc_nano_RecentAccountingPronouncementsAbstract_0166854EF23019FBFB19B47AD9EFD754" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_RecentAccountingPronouncementsTextBlock" xlink:label="loc_nano_RecentAccountingPronouncementsTextBlock_FAB29805301C0FA62F81B47AD9EFC443" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_RecentAccountingPronouncementsAbstract_0166854EF23019FBFB19B47AD9EFD754" xlink:to="loc_nano_RecentAccountingPronouncementsTextBlock_FAB29805301C0FA62F81B47AD9EFC443" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/StockRepurchase" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityAbstract" xlink:label="loc_us-gaap_EquityAbstract_4B65C5E04112A3348861B47ADAD96CEF" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TreasuryStockTextBlock" xlink:label="loc_us-gaap_TreasuryStockTextBlock_2642BE8E6EAEF75ABF9DB47ADAD99ABD" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityAbstract_4B65C5E04112A3348861B47ADAD96CEF" xlink:to="loc_us-gaap_TreasuryStockTextBlock_2642BE8E6EAEF75ABF9DB47ADAD99ABD" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/StockRepurchaseDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityAbstract" xlink:label="loc_us-gaap_EquityAbstract_BA95D0D5F293676E7B5B35F65BED26FB" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_854E2DA0A502B8218B4335F65BEDD1CA" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityAbstract_BA95D0D5F293676E7B5B35F65BED26FB" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_854E2DA0A502B8218B4335F65BEDD1CA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PlanNameAxis" xlink:label="loc_us-gaap_PlanNameAxis_63B49143DDAC4BF4D60035F65BEDEA0A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_854E2DA0A502B8218B4335F65BEDD1CA" xlink:to="loc_us-gaap_PlanNameAxis_63B49143DDAC4BF4D60035F65BEDEA0A" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PlanNameDomain" xlink:label="loc_us-gaap_PlanNameDomain_6B1DDC901F301D5C0A8835F65BEDBC91" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PlanNameAxis_63B49143DDAC4BF4D60035F65BEDEA0A" xlink:to="loc_us-gaap_PlanNameDomain_6B1DDC901F301D5C0A8835F65BEDBC91" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_MayTwentyNineTwoThousandTwelveProgramMember" xlink:label="loc_nano_MayTwentyNineTwoThousandTwelveProgramMember_4C235624A94E3B17FD9135F65BEDC165" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PlanNameDomain_6B1DDC901F301D5C0A8835F65BEDBC91" xlink:to="loc_nano_MayTwentyNineTwoThousandTwelveProgramMember_4C235624A94E3B17FD9135F65BEDC165" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_DBBC094A3E930CA24F6535F65BED5056" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_854E2DA0A502B8218B4335F65BEDD1CA" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_DBBC094A3E930CA24F6535F65BED5056" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_StockRepurchaseTextualAbstract" xlink:label="loc_nano_StockRepurchaseTextualAbstract_E3DDFB12623E49918E8A35F65BEDA291" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_DBBC094A3E930CA24F6535F65BED5056" xlink:to="loc_nano_StockRepurchaseTextualAbstract_E3DDFB12623E49918E8A35F65BEDA291" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockRepurchaseProgramAuthorizedAmount" xlink:label="loc_us-gaap_StockRepurchaseProgramAuthorizedAmount_4C83F0660D6A345EFB3435F65BED6DA0" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockRepurchaseTextualAbstract_E3DDFB12623E49918E8A35F65BEDA291" xlink:to="loc_us-gaap_StockRepurchaseProgramAuthorizedAmount_4C83F0660D6A345EFB3435F65BED6DA0" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:label="loc_us-gaap_StockRepurchasedAndRetiredDuringPeriodShares_3CD37BE6C50EDD0D99B935F65BED8F72" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockRepurchaseTextualAbstract_E3DDFB12623E49918E8A35F65BEDA291" xlink:to="loc_us-gaap_StockRepurchasedAndRetiredDuringPeriodShares_3CD37BE6C50EDD0D99B935F65BED8F72" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_WeightedAverageRepurchasePriceOfCommonStock" xlink:label="loc_nano_WeightedAverageRepurchasePriceOfCommonStock_85B042C270C932D6650735F65BEDCF41" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockRepurchaseTextualAbstract_E3DDFB12623E49918E8A35F65BEDA291" xlink:to="loc_nano_WeightedAverageRepurchasePriceOfCommonStock_85B042C270C932D6650735F65BEDCF41" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockRepurchaseProgramRemainingAuthorizedRepurchaseAmount" xlink:label="loc_us-gaap_StockRepurchaseProgramRemainingAuthorizedRepurchaseAmount_145D9BBD1468C4B94F9335F65BEED1F9" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_StockRepurchaseTextualAbstract_E3DDFB12623E49918E8A35F65BEDA291" xlink:to="loc_us-gaap_StockRepurchaseProgramRemainingAuthorizedRepurchaseAmount_145D9BBD1468C4B94F9335F65BEED1F9" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/SubsequentEventDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_FDA77DFAB8BF999D51972CBA0D1B8073" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="loc_us-gaap_SubsequentEventTable_B5C3141B6DDEC4DABC362CBB19A38C88" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventsAbstract_FDA77DFAB8BF999D51972CBA0D1B8073" xlink:to="loc_us-gaap_SubsequentEventTable_B5C3141B6DDEC4DABC362CBB19A38C88" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_46D74FB28DEB4F17CAA32CBB19A37B87" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_B5C3141B6DDEC4DABC362CBB19A38C88" xlink:to="loc_us-gaap_SubsequentEventTypeAxis_46D74FB28DEB4F17CAA32CBB19A37B87" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_4B7BB9264D49822B18822CBB19A39B7B" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_46D74FB28DEB4F17CAA32CBB19A37B87" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_4B7BB9264D49822B18822CBB19A39B7B" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_0DC69BC845FBD8B745A02CBCDB8A8C5F" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_4B7BB9264D49822B18822CBB19A39B7B" xlink:to="loc_us-gaap_SubsequentEventMember_0DC69BC845FBD8B745A02CBCDB8A8C5F" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="loc_us-gaap_SubsequentEventLineItems_ED6C9FB91B3E9CF646C02CBB19A7FAB7" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_B5C3141B6DDEC4DABC362CBB19A38C88" xlink:to="loc_us-gaap_SubsequentEventLineItems_ED6C9FB91B3E9CF646C02CBB19A7FAB7" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_720A389E41CB0542EA2F2CBC11F29985" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventLineItems_ED6C9FB91B3E9CF646C02CBB19A7FAB7" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_720A389E41CB0542EA2F2CBC11F29985" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/SubsequentEventSubsequentEvent" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_511CC9456D97F97AD80B2CBA0D13A996" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="loc_us-gaap_SubsequentEventsTextBlock_38DD3C7585636CD6AD152CBA3524E1B4" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventsAbstract_511CC9456D97F97AD80B2CBA0D13A996" xlink:to="loc_us-gaap_SubsequentEventsTextBlock_38DD3C7585636CD6AD152CBA3524E1B4" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/Warranties" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_76BA71AF0E88D2E6B738B47ADAE852FE" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="loc_us-gaap_ProductWarrantyDisclosureTextBlock_7BEA905481BC8FC2B5B7B47ADAE83889" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_76BA71AF0E88D2E6B738B47ADAE852FE" xlink:to="loc_us-gaap_ProductWarrantyDisclosureTextBlock_7BEA905481BC8FC2B5B7B47ADAE83889" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/WarrantiesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_456C6431EF50CDB303302C7DAA9E36FD" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:label="loc_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_89F380496F4A676F71D82C7DAA9EBFAC" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_456C6431EF50CDB303302C7DAA9E36FD" xlink:to="loc_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_89F380496F4A676F71D82C7DAA9EBFAC" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="loc_us-gaap_ProductWarrantyAccrual_401667E59D859DA220512C7DAA9F557C" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_89F380496F4A676F71D82C7DAA9EBFAC" xlink:to="loc_us-gaap_ProductWarrantyAccrual_401667E59D859DA220512C7DAA9F557C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="loc_us-gaap_ProductWarrantyAccrualWarrantiesIssued_AAEFC839875C13692D242C7DAA9F479C" xlink:type="locator" />
    <presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_89F380496F4A676F71D82C7DAA9EBFAC" xlink:to="loc_us-gaap_ProductWarrantyAccrualWarrantiesIssued_AAEFC839875C13692D242C7DAA9F479C" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="loc_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_EB5A7CFED6161B5A5FBB2C7DAA9FB8CF" xlink:type="locator" />
    <presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_89F380496F4A676F71D82C7DAA9EBFAC" xlink:to="loc_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_EB5A7CFED6161B5A5FBB2C7DAA9FB8CF" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="loc_us-gaap_ProductWarrantyAccrualPayments_56AE8A9F60F9BB6BB0FD2C7DAA9F83AA" xlink:type="locator" />
    <presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_89F380496F4A676F71D82C7DAA9EBFAC" xlink:to="loc_us-gaap_ProductWarrantyAccrualPayments_56AE8A9F60F9BB6BB0FD2C7DAA9F83AA" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="loc_us-gaap_ProductWarrantyAccrual_DA7740A5ECED1210FAB32C7DAA9F1B8E" xlink:type="locator" />
    <presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_89F380496F4A676F71D82C7DAA9EBFAC" xlink:to="loc_us-gaap_ProductWarrantyAccrual_DA7740A5ECED1210FAB32C7DAA9F1B8E" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/WarrantiesDetailsTextual" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_CB15E3FE65E5606F3FE8B47ADAB9017D" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_ProductWarrantiesTextualAbstract" xlink:label="loc_nano_ProductWarrantiesTextualAbstract_E1FDFDCA48C9F9E3C941B47ADAB9927A" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_CB15E3FE65E5606F3FE8B47ADAB9017D" xlink:to="loc_nano_ProductWarrantiesTextualAbstract_E1FDFDCA48C9F9E3C941B47ADAB9927A" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ProductWarrantyPeriod" xlink:label="loc_nano_ProductWarrantyPeriod_47EAA064F574F262928FB47ADAB9AADB" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_nano_ProductWarrantiesTextualAbstract_E1FDFDCA48C9F9E3C941B47ADAB9927A" xlink:to="loc_nano_ProductWarrantyPeriod_47EAA064F574F262928FB47ADAB9AADB" xlink:type="arc" />
  </presentationLink>
  <presentationLink xlink:role="http://www.nanometrics.com/role/WarrantiesTables" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_AB6B8DBF24F4A69FB420B47ADA2D46D5" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_31C00E9202E26CF17E8EB47ADA2D1572" xlink:type="locator" />
    <presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ProductWarrantiesDisclosuresAbstract_AB6B8DBF24F4A69FB420B47ADA2D46D5" xlink:to="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_31C00E9202E26CF17E8EB47ADA2D1572" xlink:type="arc" />
  </presentationLink>
</linkbase>
