<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with WebFilings-->
<!-- -->
<linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <roleRef roleURI="http://www.nanometrics.com/role/AccountsReceivable" xlink:href="nano-20130629.xsd#AccountsReceivable" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/AccountsReceivableDetailsTextual" xlink:href="nano-20130629.xsd#AccountsReceivableDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsCashAndInvestmentsTextualDetails" xlink:href="nano-20130629.xsd#CashAndInvestmentsCashAndInvestmentsTextualDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsDetails" xlink:href="nano-20130629.xsd#CashAndInvestmentsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsNotes" xlink:href="nano-20130629.xsd#CashAndInvestmentsNotes" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CashAndInvestmentsTables" xlink:href="nano-20130629.xsd#CashAndInvestmentsTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CommitmentsAndContingencies" xlink:href="nano-20130629.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CommitmentsAndContingenciesDetailsTextual" xlink:href="nano-20130629.xsd#CommitmentsAndContingenciesDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsParentheticalUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedBalanceSheetsParentheticalUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedBalanceSheetsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement" xlink:href="nano-20130629.xsd#CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:href="nano-20130629.xsd#CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/DocumentAndEntityInformation" xlink:href="nano-20130629.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlans" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlans" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails1" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails2" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails2" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails3" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails3" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails4" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetails4" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetailsTextual" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansTables" xlink:href="nano-20130629.xsd#EquityAndStockBasedCompensationPlansTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosures" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosures" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails1" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetailsTextual" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresTables" xlink:href="nano-20130629.xsd#FairValueMeasurementsAndDisclosuresTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformation" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformation" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails1" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails2" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails2" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails3" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationDetails3" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationTables" xlink:href="nano-20130629.xsd#GeographicAndSignificantCustomerInformationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/GoodwillImpairmentAndLongLivedAssetImpairment" xlink:href="nano-20130629.xsd#GoodwillImpairmentAndLongLivedAssetImpairment" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IncomeTaxes" xlink:href="nano-20130629.xsd#IncomeTaxes" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IncomeTaxesDetailsTextual" xlink:href="nano-20130629.xsd#IncomeTaxesDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssets" xlink:href="nano-20130629.xsd#IntangibleAssets" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsDetails" xlink:href="nano-20130629.xsd#IntangibleAssetsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsDetailsTextual" xlink:href="nano-20130629.xsd#IntangibleAssetsDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsFutureAmortizationExpenseDetails" xlink:href="nano-20130629.xsd#IntangibleAssetsFutureAmortizationExpenseDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/IntangibleAssetsTables" xlink:href="nano-20130629.xsd#IntangibleAssetsTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/Inventories" xlink:href="nano-20130629.xsd#Inventories" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/InventoriesDetails" xlink:href="nano-20130629.xsd#InventoriesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/InventoriesTables" xlink:href="nano-20130629.xsd#InventoriesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationTables" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligations" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligations" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationsDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails1" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationsDetails1" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetailsTextual" xlink:href="nano-20130629.xsd#LineOfCreditAndDebtObligationsDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentation" xlink:href="nano-20130629.xsd#NatureOfBusinessAndBasisOfPresentation" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationDetailsTextual" xlink:href="nano-20130629.xsd#NatureOfBusinessAndBasisOfPresentationDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationPolicies" xlink:href="nano-20130629.xsd#NatureOfBusinessAndBasisOfPresentationPolicies" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShare" xlink:href="nano-20130629.xsd#NetIncomeLossPerShare" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShareDetails" xlink:href="nano-20130629.xsd#NetIncomeLossPerShareDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/NetIncomeLossPerShareTables" xlink:href="nano-20130629.xsd#NetIncomeLossPerShareTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilities" xlink:href="nano-20130629.xsd#OtherCurrentLiabilities" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilitiesDetails" xlink:href="nano-20130629.xsd#OtherCurrentLiabilitiesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/OtherCurrentLiabilitiesTables" xlink:href="nano-20130629.xsd#OtherCurrentLiabilitiesTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipment" xlink:href="nano-20130629.xsd#PropertyPlantAndEquipment" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipmentDetails" xlink:href="nano-20130629.xsd#PropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/PropertyPlantAndEquipmentTables" xlink:href="nano-20130629.xsd#PropertyPlantAndEquipmentTables" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/RecentAccountingPronouncements" xlink:href="nano-20130629.xsd#RecentAccountingPronouncements" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/StockRepurchase" xlink:href="nano-20130629.xsd#StockRepurchase" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/StockRepurchaseDetailsTextual" xlink:href="nano-20130629.xsd#StockRepurchaseDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/SubsequentEventDetails" xlink:href="nano-20130629.xsd#SubsequentEventDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/SubsequentEventSubsequentEvent" xlink:href="nano-20130629.xsd#SubsequentEventSubsequentEvent" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/Warranties" xlink:href="nano-20130629.xsd#Warranties" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/WarrantiesDetails" xlink:href="nano-20130629.xsd#WarrantiesDetails" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/WarrantiesDetailsTextual" xlink:href="nano-20130629.xsd#WarrantiesDetailsTextual" xlink:type="simple" />
  <roleRef roleURI="http://www.nanometrics.com/role/WarrantiesTables" xlink:href="nano-20130629.xsd#WarrantiesTables" xlink:type="simple" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/AccountsReceivable" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/AccountsReceivableDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsCashAndInvestmentsTextualDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesFairValueDisclosure" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_2ca70372-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesAmortizedCost" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesAmortizedCost_2ce4a1c8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_2ca70372-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AvailableForSaleSecuritiesAmortizedCost_2ce4a1c8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableforsaleSecuritiesGrossUnrealizedGain" xlink:label="loc_us-gaap_AvailableforsaleSecuritiesGrossUnrealizedGain_28857b48-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_2ca70372-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AvailableforsaleSecuritiesGrossUnrealizedGain_28857b48-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesGrossUnrealizedLosses1" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesGrossUnrealizedLosses1_2cc11636-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_2ca70372-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AvailableForSaleSecuritiesGrossUnrealizedLosses1_2cc11636-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsNotes" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/CashAndInvestmentsTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/CommitmentsAndContingencies" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/CommitmentsAndContingenciesDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsParentheticalUnaudited" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedBalanceSheetsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_2c254058-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_2c254058-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_30cfd000-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_30cfd000-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShortTermInvestments" xlink:label="loc_us-gaap_ShortTermInvestments_6fb87e70-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ShortTermInvestments_6fb87e70-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_28c3463a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AccountsReceivableNetCurrent_28c3463a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_5b10f3ee-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_InventoryNet_5b10f3ee-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_InventoriesDeliveredSystems" xlink:label="loc_nano_InventoriesDeliveredSystems_8d67215e-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_nano_InventoriesDeliveredSystems_8d67215e-fdb9-11e1-9a29-22000a1cf22c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="loc_us-gaap_PrepaidExpenseAndOtherAssetsCurrent_66a1ef74-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PrepaidExpenseAndOtherAssetsCurrent_66a1ef74-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredTaxAssetsNetCurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetCurrent_4735dba0-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_2c23c494-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_DeferredTaxAssetsNetCurrent_4735dba0-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_683dcad8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_2c254058-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_683dcad8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_5a1fdbbc-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_2c254058-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_5a1fdbbc-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_475df306-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_2c254058-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_475df306-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_62df8554-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_2c254058-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OtherAssetsNoncurrent_62df8554-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_567ea9de-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_2c254058-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_Goodwill_567ea9de-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_5c4fc6ae-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_70895bd0-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_5c4fc6ae-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_StockholdersEquity_70895bd0-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_34ddf442-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_70895bd0-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CommonStockValue_34ddf442-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_29ca3a8e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_70895bd0-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AdditionalPaidInCapital_29ca3a8e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_6b785646-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_70895bd0-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_RetainedEarningsAccumulatedDeficit_6b785646-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_29c0ce5e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_70895bd0-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_29c0ce5e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_664b7ebe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_70895bd0-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PreferredStockValue_664b7ebe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_5c30a2c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_5c4fc6ae-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_Liabilities_5c30a2c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_5c30a2c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_28d58084-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AccountsPayableCurrent_28d58084-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_4e9c764c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_4e9c764c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredRevenueCurrent" xlink:label="loc_us-gaap_DeferredRevenueCurrent_473bd082-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_DeferredRevenueCurrent_473bd082-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_298c645c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AccruedIncomeTaxesCurrent_298c645c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_5c188d92-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredRevenueNoncurrent" xlink:label="loc_us-gaap_DeferredRevenueNoncurrent_4737a390-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_5c30a2c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_DeferredRevenueNoncurrent_4737a390-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="loc_us-gaap_OtherLiabilitiesNoncurrent_63d8f7d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_5c30a2c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OtherLiabilitiesNoncurrent_63d8f7d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_5ea4bd74-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_5c30a2c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_5ea4bd74-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TaxesPayableCurrent" xlink:label="loc_us-gaap_TaxesPayableCurrent_716f9f3c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_5c30a2c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_TaxesPayableCurrent_716f9f3c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_34116ef4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_5c4fc6ae-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CommitmentsAndContingencies_34116ef4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_31a4213e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_31a4213e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_611bec6c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_NetIncomeLoss_611bec6c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_48ae4c92-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_DepreciationDepletionAndAmortization_48ae4c92-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_6ec09264-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ShareBasedCompensation_6ec09264-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities" xlink:label="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities_4f6c0772-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities_4f6c0772-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GainLossOnDispositionOfAssets" xlink:label="loc_us-gaap_GainLossOnDispositionOfAssets_559c497c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_GainLossOnDispositionOfAssets_559c497c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_5afd9f42-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_InventoryWriteDown_5afd9f42-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_DeferredIncomeTaxExpenseBenefit_472866e6-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_DeferredIncomeTaxExpenseBenefit_472866e6-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_58ea018c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="8" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_58ea018c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_5962f3b2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="9" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncreaseDecreaseInInventories_5962f3b2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_IncreaseDecreaseInventoriesDeliveredSystems" xlink:label="loc_nano_IncreaseDecreaseInventoriesDeliveredSystems_8cf52b4e-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <calculationArc order="10" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_nano_IncreaseDecreaseInventoriesDeliveredSystems_8cf52b4e-fdb9-11e1-9a29-22000a1cf22c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_595df15a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="11" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_595df15a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ChangesInFairValueOfContingentPayments" xlink:label="loc_nano_ChangesInFairValueOfContingentPayments_8cf30b98-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <calculationArc order="12" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_nano_ChangesInFairValueOfContingentPayments_8cf30b98-fdb9-11e1-9a29-22000a1cf22c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_59244f04-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="13" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_59244f04-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredRevenue" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredRevenue_58e591d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="14" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncreaseDecreaseInDeferredRevenue_58e591d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_58e15870-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="15" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_611fd732-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_58e15870-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_60ef698a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_31a4213e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_60ef698a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" xlink:label="loc_us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities_6752d8de-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_60ef698a-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities_6752d8de-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_ProceedsFromEscrowRelatedToAcquisition" xlink:label="loc_nano_ProceedsFromEscrowRelatedToAcquisition_8cfde5ea-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_60ef698a-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_nano_ProceedsFromEscrowRelatedToAcquisition_8cfde5ea-fdb9-11e1-9a29-22000a1cf22c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsToAcquireMarketableSecurities" xlink:label="loc_us-gaap_PaymentsToAcquireMarketableSecurities_65484ee8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_60ef698a-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PaymentsToAcquireMarketableSecurities_65484ee8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_651f66f4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_60ef698a-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_651f66f4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_31a4213e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_6ac93f3a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_6ac93f3a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions_67792598-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlansIncludingStockOptions_67792598-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities" xlink:label="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_4f6b30fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities_4f6b30fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:label="loc_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_64c9d4d2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_64c9d4d2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="loc_us-gaap_PaymentsForRepurchaseOfCommonStock_651668c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PaymentsForRepurchaseOfCommonStock_651668c4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsOfMergerRelatedCostsFinancingActivities" xlink:label="loc_us-gaap_PaymentsOfMergerRelatedCostsFinancingActivities_65201590-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="6" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_60f52a96-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PaymentsOfMergerRelatedCostsFinancingActivities_65201590-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_4dd8ac80-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_31a4213e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_4dd8ac80-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLossStatement" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_38f2d2fa-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_611bec6c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_38f2d2fa-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_NetIncomeLoss_611bec6c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_643da0a2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_38f2d2fa-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_643da0a2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_633cc110-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_643da0a2-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_633cc110-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax_62ee6416-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_643da0a2-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossAvailableForSaleSecuritiesAdjustmentBeforeReclassificationAdjustmentsNetOfTax_62ee6416-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/CondensedConsolidatedStatementsOfOperationsUnaudited" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_611bec6c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_5817da40-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetIncomeLoss_611bec6c-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_5817da40-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_624609ec-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_5817da40-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OperatingIncomeLoss_624609ec-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingExpenses" xlink:label="loc_us-gaap_OperatingExpenses_623a80b8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_624609ec-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OperatingExpenses_623a80b8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_6aef6d04-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingExpenses_623a80b8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpense_6aef6d04-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="loc_us-gaap_SellingAndMarketingExpense_6e56bf7e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingExpenses_623a80b8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_SellingAndMarketingExpense_6e56bf7e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_GeneralAndAdministrativeExpense_5667a57c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingExpenses_623a80b8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_GeneralAndAdministrativeExpense_5667a57c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="loc_us-gaap_AmortizationOfIntangibleAssets_2b3ffbc4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingExpenses_623a80b8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AmortizationOfIntangibleAssets_2b3ffbc4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_56a7c864-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_624609ec-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_GrossProfit_56a7c864-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_6c24eb22-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_GrossProfit_56a7c864-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_SalesRevenueNet_6c24eb22-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueGoodsNet" xlink:label="loc_us-gaap_SalesRevenueGoodsNet_6c240414-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_SalesRevenueNet_6c24eb22-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_SalesRevenueGoodsNet_6c240414-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueServicesNet" xlink:label="loc_us-gaap_SalesRevenueServicesNet_6c311014-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_SalesRevenueNet_6c24eb22-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_SalesRevenueServicesNet_6c311014-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_40580628-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_GrossProfit_56a7c864-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CostOfGoodsAndServicesSold_40580628-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfGoodsSold" xlink:label="loc_us-gaap_CostOfGoodsSold_40414a32-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSold_40580628-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CostOfGoodsSold_40414a32-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfServices" xlink:label="loc_us-gaap_CostOfServices_410ff044-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSold_40580628-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CostOfServices_410ff044-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_CostOfProductsAmortizationOfIntangibleAssets" xlink:label="loc_nano_CostOfProductsAmortizationOfIntangibleAssets_8d3a65b0-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSold_40580628-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_nano_CostOfProductsAmortizationOfIntangibleAssets_8d3a65b0-fdb9-11e1-9a29-22000a1cf22c" xlink:type="arc" />
    <loc xlink:href="nano-20130629.xsd#nano_OtherIncomeExpenseNet" xlink:label="loc_nano_OtherIncomeExpenseNet_8d351236-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_5817da40-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_nano_OtherIncomeExpenseNet_8d351236-fdb9-11e1-9a29-22000a1cf22c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="loc_us-gaap_InvestmentIncomeInterest_5b31f800-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_OtherIncomeExpenseNet_8d351236-fdb9-11e1-9a29-22000a1cf22c" xlink:to="loc_us-gaap_InvestmentIncomeInterest_5b31f800-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InterestExpense" xlink:label="loc_us-gaap_InterestExpense_5a4444fc-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_OtherIncomeExpenseNet_8d351236-fdb9-11e1-9a29-22000a1cf22c" xlink:to="loc_us-gaap_InterestExpense_5a4444fc-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_63d61950-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_OtherIncomeExpenseNet_8d351236-fdb9-11e1-9a29-22000a1cf22c" xlink:to="loc_us-gaap_OtherNonoperatingIncomeExpense_63d61950-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_584ce050-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetIncomeLoss_611bec6c-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_IncomeTaxExpenseBenefit_584ce050-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/DocumentAndEntityInformation" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlans" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails1" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails2" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails3" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetails4" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/EquityAndStockBasedCompensationPlansTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosures" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsFairValueDisclosure" xlink:label="loc_us-gaap_AssetsFairValueDisclosure_2bc40522-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="loc_us-gaap_CashAndCashEquivalentsFairValueDisclosure_31a61aca-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsFairValueDisclosure_2bc40522-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CashAndCashEquivalentsFairValueDisclosure_31a61aca-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AvailableForSaleSecuritiesFairValueDisclosure" xlink:label="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_2ca70372-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsFairValueDisclosure_2bc40522-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AvailableForSaleSecuritiesFairValueDisclosure_2ca70372-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetails1" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/FairValueMeasurementsAndDisclosuresTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformation" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails1" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails2" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationDetails3" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/GeographicAndSignificantCustomerInformationTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/GoodwillImpairmentAndLongLivedAssetImpairment" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/IncomeTaxes" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/IncomeTaxesDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssets" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_544b59c8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_543933d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_544b59c8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_543933d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_54334af4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_544b59c8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_54334af4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsFutureAmortizationExpenseDetails" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal" xlink:label="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_ffacbe96-fac4-11e2-a68d-22000a9d039f" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear_544aff3c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_ffacbe96-fac4-11e2-a68d-22000a9d039f" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseRemainderOfFiscalYear_544aff3c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_5447a6a2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_ffacbe96-fac4-11e2-a68d-22000a9d039f" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_5447a6a2-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_54352b8a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_ffacbe96-fac4-11e2-a68d-22000a9d039f" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_54352b8a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_54474748-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_ffacbe96-fac4-11e2-a68d-22000a9d039f" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_54474748-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_5432149a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_ffacbe96-fac4-11e2-a68d-22000a9d039f" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_5432149a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_543dc34e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_FiniteLivedIntangibleAssetsAmortizationExpenseTotal_ffacbe96-fac4-11e2-a68d-22000a9d039f" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_543dc34e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/IntangibleAssetsTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/Inventories" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/InventoriesDetails" xlink:type="extended">
    <loc xlink:href="nano-20130629.xsd#nano_Inventory" xlink:label="loc_nano_Inventory_8d984914-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <loc xlink:href="nano-20130629.xsd#nano_InventoriesDeliveredSystems" xlink:label="loc_nano_InventoriesDeliveredSystems_8d67215e-fdb9-11e1-9a29-22000a1cf22c" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_Inventory_8d984914-fdb9-11e1-9a29-22000a1cf22c" xlink:to="loc_nano_InventoriesDeliveredSystems_8d67215e-fdb9-11e1-9a29-22000a1cf22c" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_5b10f3ee-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_nano_Inventory_8d984914-fdb9-11e1-9a29-22000a1cf22c" xlink:to="loc_us-gaap_InventoryNet_5b10f3ee-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryFinishedGoods" xlink:label="loc_us-gaap_InventoryFinishedGoods_5b07fa0a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_5b10f3ee-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_InventoryFinishedGoods_5b07fa0a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryWorkInProcess" xlink:label="loc_us-gaap_InventoryWorkInProcess_5b2829d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_5b10f3ee-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_InventoryWorkInProcess_5b2829d8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryRawMaterials" xlink:label="loc_us-gaap_InventoryRawMaterials_5b27fc06-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_5b10f3ee-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_InventoryRawMaterials_5b27fc06-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/InventoriesTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligations" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_5ea4bd74-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_5ea4bd74-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetails1" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear_5e51e310-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear_5e51e310-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_5e997928-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_5e997928-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_5e988f2c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_5e988f2c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_5e9adc5a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_5e9adc5a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_5e9e1294-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_5e9e1294-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive" xlink:label="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_5ea82036-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebtCurrent_5ea447fe-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_5ea82036-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalRemainderOfFiscalYear_5e51e310-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_5e997928-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_5e988f2c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_5e9adc5a-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_5e9e1294-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LongTermDebt_5e43607e-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_5ea82036-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/LineOfCreditAndDebtObligationsDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentation" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/NatureOfBusinessAndBasisOfPresentationPolicies" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/NetIncomeLossPerShare" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/NetIncomeLossPerShareDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_741fe8a4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_7416e4b6-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_741fe8a4-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_7416e4b6-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_7442f1b4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_741fe8a4-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_7442f1b4-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/NetIncomeLossPerShareTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/OtherCurrentLiabilities" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/OtherCurrentLiabilitiesDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_67c77270-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_67c77270-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccruedProfessionalFeesCurrent" xlink:label="loc_us-gaap_AccruedProfessionalFeesCurrent_293a2110-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AccruedProfessionalFeesCurrent_293a2110-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BusinessAcquisitionContingentConsiderationAtFairValueCurrent" xlink:label="loc_us-gaap_BusinessAcquisitionContingentConsiderationAtFairValueCurrent_2ec83194-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_BusinessAcquisitionContingentConsiderationAtFairValueCurrent_2ec83194-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CustomerDepositsCurrent" xlink:label="loc_us-gaap_CustomerDepositsCurrent_45498d14-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_CustomerDepositsCurrent_45498d14-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherSundryLiabilitiesCurrent" xlink:label="loc_us-gaap_OtherSundryLiabilitiesCurrent_6433fc8c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherLiabilitiesCurrent_63d03724-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_OtherSundryLiabilitiesCurrent_6433fc8c-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/OtherCurrentLiabilitiesTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/PropertyPlantAndEquipment" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/PropertyPlantAndEquipmentDetails" xlink:type="extended">
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_683dcad8-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_29bfb410-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_683dcad8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_29bfb410-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
    <loc xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_683f0542-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="locator" />
    <calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_683dcad8-78f6-11e1-94fe-25ba39ebf1f4" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_683f0542-78f6-11e1-94fe-25ba39ebf1f4" xlink:type="arc" />
  </calculationLink>
  <calculationLink xlink:role="http://www.nanometrics.com/role/PropertyPlantAndEquipmentTables" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/RecentAccountingPronouncements" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/StockRepurchase" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/StockRepurchaseDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/SubsequentEventDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/SubsequentEventSubsequentEvent" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/Warranties" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/WarrantiesDetails" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/WarrantiesDetailsTextual" xlink:type="extended" />
  <calculationLink xlink:role="http://www.nanometrics.com/role/WarrantiesTables" xlink:type="extended" />
</linkbase>
