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Fair Value Measurements and Disclosures (Details Textual) (Fair Value, Measurements, Recurring [Member], Zygo Corporation [Member], USD $) In Millions, unless otherwise specified | Sep. 28, 2013 | Dec. 29, 2012
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Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member] |  |
Fair Value Measurements and Disclosures (Textual) [Abstract] |  |
Liabilities resulting from the acquisition of certain assets from Zygo Corporation measured at fair value | $ 2.8 | $ 2.5
Current liability at fair value | 1.0 | 0.7
Long-term liability at fair value | $ 1.8 | $ 1.8

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- Definition Amount of liabilities due within one year or within the normal operating cycle, if longer, assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=6910749&loc=d3e4845-128472 + Details
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- Definition Amount of liabilities assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=6910749&loc=d3e4845-128472 + Details
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- Definition Amount of liabilities due after one year or the normal operating cycle, if longer, assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=6910749&loc=d3e4845-128472 + Details
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