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Fair Value Measurements and Disclosures (Details 1) (Level 3 [Member], USD $) In Thousands, unless otherwise specified | 12 Months Ended
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Dec. 28, 2013 | Dec. 29, 2012
Fair value measurement on recurring basis, unobservable input reconciliation |  |
Fair value, beginning balance | $ 2,462 | $ 3,194
Change in fair value included in earnings, Zygo | 1,325 | 129
Fair Value, ending balance | 2,783 | 2,462
Zygo Corporation [Member] |  |
Fair value measurement on recurring basis, unobservable input reconciliation |  |
Payments made to Zygo Corporation | (1,004) | (300)
Nanda [Member] |  |
Fair value measurement on recurring basis, unobservable input reconciliation |  |
Addition: Fair value of royalty payment to RTM related to acquisition of Nanda |  | $ (561)

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- Definition Fair Value Measurement with Unobservable Inputs Reconciliations Addition for Royalty Payments Related to Acquisition + References No definition available. + Details
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- Definition Amount of gain (loss) recognized on the income statement for financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1) -URI http://asc.fasb.org/extlink&oid=25499696&loc=d3e19207-110258 + Details
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- Definition Amount of settlements of financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(2) -URI http://asc.fasb.org/extlink&oid=25499696&loc=d3e19207-110258 + Details
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- Definition Fair value of financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=25499696&loc=d3e19207-110258 + Details
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