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Intangible Assets (Details Textual) (USD $) | 3 Months Ended | 12 Months Ended |  | 12 Months Ended |  |  |  | 12 Months Ended | 0 Months Ended
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Mar. 31, 2012 | Dec. 28, 2013 | Dec. 29, 2012 | Dec. 31, 2011 | Dec. 28, 2013 Minimum [Member] | Dec. 28, 2013 Maximum [Member] | Dec. 28, 2013 Patented Technology [Member] | Dec. 29, 2012 Patented Technology [Member] | Dec. 28, 2013 Patented Technology [Member] Minimum [Member] | Dec. 28, 2013 Patented Technology [Member] Maximum [Member] | Nov. 21, 2011 Nanda [Member] | Nov. 21, 2011 Nanda [Member] Total identifiable intangible assets acquired [Member] | Dec. 29, 2012 Nanda [Member] Research and Development in Process [Member] | Nov. 21, 2011 Nanda [Member] Research and Development in Process [Member] | Dec. 29, 2012 Real Time Metrology Inc. [Member] | Dec. 09, 2010 Real Time Metrology Inc. [Member] Patented Technology [Member]
Intangible Assets (Textual) [Abstract] |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Acquired percentage of the outstanding shares of Nanda Technologies GmbH |  |  |  |  |  |  |  |  |  |  | 100.00% |  |  |  |  |
Fair Value as of acquisition date |  | $ 31,927,000 | $ 31,497,000 |  |  |  | $ 2,252,000 | $ 2,252,000 |  |  |  | $ 10,570,000 |  | $ 330,000 |  |
Payments to Acquire Intangible Assets |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 400,000
Legal expenses capitalized |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 100,000
Finite-lived intangibles estimated lives |  |  |  |  | 2 years | 10 years | 7 years 3 months |  | 7 years | 10 years |  |  |  |  |  |
Intangibles acquired |  |  |  |  |  |  |  |  |  |  |  |  | 300,000 | 308,000 |  |
Total amortization expense |  | 3,300,000 | 3,300,000 | 1,700,000 |  |  |  |  |  |  |  |  |  |  |  |
Reduction in fair value of royalty payments | 600,000 |  |  |  |  |  |  |  |  |  |  |  |  |  | 600,000 |
Reduction in fair value of goodwill | 400,000 |  | 500,000 |  |  |  |  |  |  |  |  |  |  |  | 400,000 |
Reduction in fair value of intangible assets | 200,000 |  |  |  |  |  |  |  |  |  |  |  |  |  | 200,000 |
Other adjustment to intangible assets |  | $ 0 |  |  |  |  |  |  |  |  |  |  |  |  |  |

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