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Acquisition, Goodwill Impairment and Long-lived Asset Impairment (Details Textual) (USD $) | 3 Months Ended | 12 Months Ended |  | 0 Months Ended | 12 Months Ended |  |  | 0 Months Ended |  |  | 12 Months Ended |  |  |
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Mar. 31, 2012 | Dec. 29, 2012 | Dec. 28, 2013 | Dec. 29, 2012 Nanda [Member] | Dec. 29, 2012 Nanda [Member] | Dec. 31, 2011 Nanda [Member] | Dec. 28, 2013 Nanda [Member] | Nov. 21, 2011 Nanda [Member] | Nov. 21, 2011 Developed technology [Member] Nanda [Member] | Nov. 21, 2011 Customer relationships [Member] Nanda [Member] | Dec. 29, 2012 In-process research and development [Member] Nanda [Member] | Nov. 21, 2011 In-process research and development [Member] Nanda [Member] | Dec. 28, 2013 Maximum [Member] | Dec. 28, 2013 Maximum [Member] Developed technology [Member] | Dec. 28, 2013 Maximum [Member] Customer relationships [Member] | Dec. 29, 2012 Real Time Metrology Inc. (RTM) [Member] | Dec. 28, 2013 Real Time Metrology Inc. (RTM) [Member] Nanda [Member] | Mar. 31, 2012 Real Time Metrology Inc. (RTM) [Member] Nanda [Member] | Nov. 21, 2011 Real Time Metrology Inc. (RTM) [Member] Nanda [Member]
Acquisition Goodwill Impairment and Long Lived Asset Impairment (Textual) [Abstract] |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Preliminary purchase price allocation period |  |  |  |  |  |  |  |  |  |  |  |  | 1 year |  |  |  |  |  |
Reduction in fair value of royalty payments | $ 600,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | $ 600,000 |  |  |
Reduction in fair value of goodwill | 400,000 | 500,000 |  |  |  |  |  |  |  |  |  |  |  |  |  | 400,000 |  |  |
Reduction in fair value of intangible assets | 200,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 200,000 |  |  |
Proceeds from escrow |  |  |  |  | 500,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |
Acquired percentage of the outstanding shares of Nanda Technologies GmbH |  |  |  |  |  |  |  | 100.00% |  |  |  |  |  |  |  |  |  |  |
Net purchase price in cash |  |  |  | 24,600,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Goodwill |  | 11,352,000 | 11,743,000 |  |  |  | 11,700,000 | 11,610,000 |  |  |  |  |  |  |  |  |  |  |
Intangibles (finite) |  |  |  |  |  |  |  |  | 9,042,000 | 1,040,000 |  |  |  |  |  |  |  |  |
Intangibles (indefinite) |  |  |  |  |  |  |  |  |  |  | 300,000 | 308,000 |  |  |  |  |  |  |
Finite-lived intangibles estimated lives |  |  |  |  |  |  |  |  | 5 years | 3 years |  |  | 10 years | 10 years | 10 years |  |  |  |
Royalty payments to be remitted for the first three years subsequent to the acquisition |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 100.00% |  |
Royalty payments to be remitted subsequent to the first three years after the acquisition |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 50.00% |  |
Contingent liabilities |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 0 | 0 | 600,000
Pro forma adjustments, amortization |  |  |  |  |  | 2,400,000 |  |  |  |  |  |  |  |  |  |  |  |  |
Pro forma adjustments, stock-based compensation |  |  |  |  |  | $ 800,000 |  |  |  |  |  |  |  |  |  |  |  |  |

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