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Other Current Liabilities (Tables) | 12 Months Ended
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Dec. 28, 2013
Other Liabilities Disclosure [Abstract] |
Summary of other current liabilities | Other current liabilities consist of the following (in thousands):
| At
| December 28, 2013 |  | December 29, 2012
Accrued warranty | $ | 3,426 |  |  | $ | 4,203 |
Accrued professional services | 545 |  |  | 584 |
Customer deposits | 867 |  |  | 27 |
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition | 1,344 |  |  | 649 |
Other | 1,754 |  |  | 2,359 |
Total other current liabilities | $ | 7,936 |  |  | $ | 7,822 |

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