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Commitments and Contingencies (Details Textual) (USD $) | 0 Months Ended | 3 Months Ended | 12 Months Ended
--- | --- | --- | ---
Jan. 13, 2013 | Dec. 31, 2011 | Dec. 28, 2013 | Dec. 29, 2012 | Dec. 31, 2011
Commitments and Contingencies (Textual) [Abstract] |  |  |  |  |
Liabilities recorded for obligations |  |  | $ 0 | $ 0 |
One time payment to KLA | 2,500,000 |  |  |  |
Legal settlement in operating expense |  | 2,500,000 |  |  |
Long-term Purchase Commitment [Line Items] |  |  |  |  |
Rent expense |  |  | 2,000,000 | 2,200,000 | 1,800,000
Inventories [Member] |  |  |  |  |
Long-term Purchase Commitment [Line Items] |  |  |  |  |
Purchase commitment |  |  | 25,100,000 |  |
Inventories [Member] | Zygo Corporation [Member] |  |  |  |  |
Long-term Purchase Commitment [Line Items] |  |  |  |  |
Purchase commitment |  |  | 2,800,000 |  |
Purchase commitment, estimated future amount |  |  | $ 3,500,000 |  |

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- Details
Name: | nano_CommitmentsAndContingenciesTextualAbstract
Namespace Prefix: | nano_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition Intellectual property indemnification obligations. + References No definition available. + Details
Name: | nano_IntellectualPropertyIndemnificationObligations
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

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- Definition Long Term Purchase Commitment, Estimated Future Amount + References No definition available. + Details
Name: | nano_LongTermPurchaseCommitmentEstimatedFutureAmount
Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Amount of rent expense incurred for leased assets, including but not limited to, furniture and equipment, that is not directly or indirectly associated with the manufacture, sale or creation of a product or product line. + References No definition available. + Details
Name: | us-gaap_LeaseAndRentalExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Amount of litigation expense, including but not limited to legal, forensic, accounting, and investigative fees. + References No definition available. + Details
Name: | us-gaap_LitigationSettlementExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition The minimum amount the entity agreed to spend under the long-term purchase commitment. + References No definition available. + Details
Name: | us-gaap_LongTermPurchaseCommitmentAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Details
Name: | us-gaap_LongTermPurchaseCommitmentLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition The amount of cash paid for the settlement of litigation or for other legal issues during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 25 -Subparagraph (g) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3536-108585 + Details
Name: | us-gaap_PaymentsForLegalSettlements
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration