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Stockholders' Equity (Tables) | 12 Months Ended
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Dec. 28, 2013
Equity [Abstract] |
Option Plans | The Nanometrics option plans are as follows:
Plan Name | Participants | Shares Authorized
2005 Equity Incentive Plan | Employees, consultants and directors | 7,292,594 |
2002 Non-statutory Stock Option Plan | Employees and consultants | 1,200,000 |
2000 Employee Stock Option Plan | Employees and consultants | 2,450,000 |
2000 Director Stock Option Plan | Non-employee directors | 250,000 |
Accent Optical Technologies, Inc. Stock Incentive Plan | Employees and consultants | 205,003 |

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