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Consolidated Statements of Cash Flows (USD $) In Thousands, unless otherwise specified | 12 Months Ended
--- | ---
Dec. 28, 2013 | Dec. 29, 2012 | Dec. 31, 2011
Cash flows from operating activities: |  |  |
Net income (loss) | $ (14,146) | $ 4,465 | $ 28,685
Reconciliation of net income (loss) to net cash provided by (used in) operating activities: |  |  |
Depreciation and amortization | 8,787 | 8,137 | 4,983
Stock-based compensation | 7,674 | 5,890 | 4,473
Excess tax benefit from equity awards | 53 | (910) | (3,915)
Loss on disposal of fixed assets | 177 | 303 | 113
Inventory write down | 7,579 | 3,519 | 3,421
Deferred income taxes | (6,889) | 2,752 | 3,770
Changes in fair value of contingent payments to Zygo Corporation | 1,325 | 129 | 413
Changes in assets and liabilities: |  |  |
Accounts receivable | (10,376) | 7,733 | 16,172
Inventories | (7,024) | 1,383 | (12,169)
Inventories-delivered systems | (4,627) | (758) | 446
Prepaid expenses and other | (1,855) | 1,114 | (4,747)
Accounts payable, accrued and other liabilities | 4,840 | (12,567) | 4,241
Deferred revenue | 12,717 | 2,472 | 3,088
Income taxes payable | (666) | 346 | 5,054
Net cash provided by (used in) operating activities | (2,431) | 24,008 | 54,028
Cash flows from investing activities: |  |  |
Escrow payment received related to Nanda acquisition | 0 | 508 | 0
Purchase of Nanda's net assets, net of cash received | 0 | 0 | (23,912)
Sales of marketable securities | 0 | 3,000 | 0
Maturities of marketable securities | 47,089 | 8,336 | 0
Purchases of marketable securities | (49,182) | (58,647) | 0
Purchases of property, plant and equipment | (5,689) | (4,990) | (2,755)
Net cash used in investing activities | (7,782) | (51,793) | (26,667)
Cash flows from financing activities: |  |  |
Payments to Zygo Corporation related to acquisition | (1,004) | (300) | (432)
Repayments of debt obligations | (5,224) | (2,210) | (2,571)
Proceeds from sale of shares under employee stock option plans and purchase plan | 4,967 | 3,913 | 7,186
Excess tax benefit from equity awards | (53) | 910 | 3,915
Taxes paid on net issuance of stock awards | (1,181) | (618) | (126)
Repurchases of common stock | (5,000) | (8,504) | (4,257)
Net cash provided by (used in) financing activities | (7,495) | (6,809) | 3,715
Effect of exchange rate changes on cash and cash equivalents | (442) | (190) | 163
Net increase (decrease) in cash and cash equivalents | (18,150) | (34,784) | 31,239
Cash and cash equivalents, beginning of period | 62,915 | 97,699 | 66,460
Cash and cash equivalents, end of period | 44,765 | 62,915 | 97,699
Supplemental disclosure of cash flow information: |  |  |
Cash paid for interest | 232 | 522 | 757
Cash paid for income taxes | $ 313 | $ 5,113 | $ 11,149

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- Definition The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585 + Details
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- Definition Cash outflow for purchase of trading, available-for-sale securities and held-to-maturity securities. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 45 -Paragraph 11 -URI http://asc.fasb.org/extlink&oid=6871852&loc=d3e26853-111562 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (a),(b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585 + Details
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- Definition The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585 + Details
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- Definition The total cash inflow associated with the amount received from holders to acquire the entity's shares under incentive and share awards, including stock option exercises. This item inherently excludes any excess tax benefit, which the entity may have realized and reported separately. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Financing Activities -URI http://asc.fasb.org/extlink&oid=6513228 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 14 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3255-108585 + Details
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- Definition The cash inflow associated with maturities (principal being due), prepayments and calls (requests of early payments) on securities not classified as either held-to-maturity securities or trading securities which are classified as available-for-sale securities. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 45 -Paragraph 11 -URI http://asc.fasb.org/extlink&oid=6871852&loc=d3e26853-111562 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 12 -Subparagraph (a),(b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3179-108585 + Details
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- Definition The cash inflow associated with the sale of debt securities classified as available-for-sale securities. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 45 -Paragraph 11 -URI http://asc.fasb.org/extlink&oid=6871852&loc=d3e26853-111562 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 12 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3179-108585 + Details
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- Definition The cash outflow for debt initially having maturity due after one year or beyond the normal operating cycle, if longer. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 15 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3291-108585 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Financing Activities -URI http://asc.fasb.org/extlink&oid=6513228 + Details
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- Definition The aggregate amount of noncash, equity-based employee remuneration. This may include the value of stock or unit options, amortization of restricted stock or units, and adjustment for officers' compensation. As noncash, this element is an add back when calculating net cash generated by operating activities using the indirect method. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 28 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3602-108585 + Details
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