XML 69 R24.htm IDEA: XBRL DOCUMENT v2.4.0.8

Defined Benefit Pension Plan	12 Months Ended
	Dec. 28, 2013
Compensation and Retirement Disclosure [Abstract]
Defined Benefit Pension Plan	Defined Benefit Pension Plan Nanometrics sponsors a statutory government mandated defined benefit pension plan (the “Benefit Plan”) in Taiwan for its local employees. The fair value of plan assets was $0.2 million, $0.2 million and $0.1 million for the fiscal years ended 2013, 2012 and 2011, respectively; and the net funding deficiency of the Benefit Plan was $0.2 million, $0.3 million, and $0.2 million for the fiscal years ended December 28, 2013, December 29, 2012, and December 31, 2011, respectively. Based on the nature and limited extent of the pension plan, we determined this pension plan was not material for separate disclosure.

X

- Details

Name:	us-gaap_CompensationAndRetirementDisclosureAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

The entire disclosure for pension and other postretirement benefits.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 715

-URI http://asc.fasb.org/topic&trid=2235017

+ Details

Name:	us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock
Namespace Prefix:	us-gaap_
Data Type:	nonnum:textBlockItemType
Balance Type:	na
Period Type:	duration