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Acquisition, Goodwill Impairment and Long-lived Asset Impairment (Details Textual) (USD $)
 3 Months Ended 12 Months Ended 0 Months Ended 12 Months Ended 0 Months Ended 12 Months Ended
Mar. 31, 2012
Dec. 29, 2012
Dec. 28, 2013
Dec. 29, 2012
Nanda [Member]
Dec. 29, 2012
Nanda [Member]
Dec. 31, 2011
Nanda [Member]
Dec. 28, 2013
Nanda [Member]
Nov. 21, 2011
Nanda [Member]
Nov. 21, 2011
Developed technology [Member]
Nanda [Member]
Nov. 21, 2011
Customer relationships [Member]
Nanda [Member]
Dec. 29, 2012
In-process research and development [Member]
Nanda [Member]
Nov. 21, 2011
In-process research and development [Member]
Nanda [Member]
Dec. 28, 2013
Maximum [Member]
Dec. 28, 2013
Maximum [Member]
Developed technology [Member]
Dec. 28, 2013
Maximum [Member]
Customer relationships [Member]
Dec. 29, 2012
Real Time Metrology Inc. (RTM) [Member]
Dec. 28, 2013
Real Time Metrology Inc. (RTM) [Member]
Nanda [Member]
Mar. 31, 2012
Real Time Metrology Inc. (RTM) [Member]
Nanda [Member]
Nov. 21, 2011
Real Time Metrology Inc. (RTM) [Member]
Nanda [Member]
Acquisition Goodwill Impairment and Long Lived Asset Impairment (Textual) [Abstract]                                      
Preliminary purchase price allocation period                         1 year            
Reduction in fair value of royalty payments $ 600,000                             $ 600,000      
Reduction in fair value of goodwill 400,000 500,000                           400,000      
Reduction in fair value of intangible assets 200,000                             200,000      
Proceeds from escrow         500,000                            
Acquired percentage of the outstanding shares of Nanda Technologies GmbH               100.00%                      
Net purchase price in cash       24,600,000                              
Goodwill   11,352,000 11,743,000       11,700,000 11,610,000                      
Intangibles (finite)                 9,042,000 1,040,000                  
Intangibles (indefinite)                     300,000 308,000              
Finite-lived intangibles estimated lives                 5 years 3 years     10 years 10 years 10 years        
Royalty payments to be remitted for the first three years subsequent to the acquisition                                 100.00%    
Royalty payments to be remitted subsequent to the first three years after the acquisition                                 50.00%    
Contingent liabilities                                 0 0 600,000
Pro forma adjustments, amortization           2,400,000                          
Pro forma adjustments, stock-based compensation           $ 800,000