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Fair Value Measurements and Disclosures (Details Textual) (USD $)
 3 Months Ended 12 Months Ended 12 Months Ended
Mar. 31, 2012
Dec. 28, 2013
Dec. 29, 2012
Nov. 21, 2011
Nanda [Member]
Dec. 28, 2013
Fair Value, Measurements, Recurring [Member]
Zygo Corporation [Member]
Dec. 29, 2012
Fair Value, Measurements, Recurring [Member]
Zygo Corporation [Member]
Dec. 29, 2012
Real Time Metrology Inc. [Member]
Fair Value Measurements and Disclosures (Textual) [Abstract]              
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value       $ 1,603,000 $ 2,800,000 $ 2,500,000  
Current liability at fair value         1,300,000 700,000  
Long-term liability at fair value         1,500,000 1,800,000  
Reduction in fair value of royalty payments 600,000           600,000
Reduction in fair value of goodwill 400,000   500,000       400,000
Reduction in fair value of intangible assets $ 200,000           $ 200,000
Minimum maturity period of Available-for-sale marketable securities, classified as marketable securities   90 days          
Maximum maturity period of Available-for-sale marketable securities, classified as cash equivalents   90 days          
Maximum period of available for sale securities debt maturities (less than two years)   2 years