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Other Current Liabilities (Details) (USD $)
In Thousands, unless otherwise specified
Dec. 28, 2013
Dec. 29, 2012
Summary of other current liabilities    
Accrued warranty $ 3,426 $ 4,203
Accrued professional services 545 584
Customer deposits 867 27
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition 1,344 649
Other 1,754 2,359
Total other current liabilities $ 7,936 $ 7,822