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Segment, Geographic, Product and Significant Customer Information (Details 2) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 28, 2013	Dec. 29, 2012	Dec. 31, 2011
Segment Reporting Information [Line Items]
Total product revenues	$ 107,402	$ 143,827	$ 194,774
Automated Systems [Member]
Segment Reporting Information [Line Items]
Total product revenues	82,924	119,451	139,261
Integrated Systems [Member]
Segment Reporting Information [Line Items]
Total product revenues	11,412	12,379	25,413
Materials Characterization Systems [Member]
Segment Reporting Information [Line Items]
Total product revenues	$ 13,066	$ 11,997	$ 30,100

X

- Definition

Aggregate revenue during the period from the sale of goods in the normal course of business, after deducting returns, allowances and discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 225

-SubTopic 10

-Section S99

-Paragraph 2

-Subparagraph (SX 210.5-03.1(a))

-URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 03

-Paragraph 1

-Article 5

+ Details

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Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

X

- Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration