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Other Current Liabilities (Tables) | 3 Months Ended
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Mar. 29, 2014
Other Liabilities Disclosure [Abstract] |
Summary of other current liabilities | Other current liabilities consist of the following (in thousands):
| At
| March 29, 2014 |  | December 28, 2013
Accrued warranty | $ | 3,575 |  |  | $ | 3,426 |
Accrued professional services | 799 |  |  | 545 |
Customer deposits | 947 |  |  | 867 |
Fair value of contingent payments to Zygo Corporation related to acquisition - current portion | 1,205 |  |  | 1,344 |
Other | 1,659 |  |  | 1,811 |
Total other current liabilities | $ | 8,185 |  |  | $ | 7,993 |

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