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Fair Value Measurements and Disclosures (Details Textual) (USD $) | Jun. 28, 2014 | Dec. 28, 2013
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Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Fair value liabilities, unobservable inputs | $ 2,588,000 | $ 2,783,000
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Liabilities resulting from the acquisition of certain assets from Zygo Corporation measured at fair value | 2,600,000 | 2,800,000
Current liability at fair value | 1,200,000 | 1,300,000
Long-term liability at fair value | $ 1,400,000 | $ 1,500,000

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- Definition Amount of liabilities due within one year or within the normal operating cycle, if longer, assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=39739317&loc=d3e4845-128472 + Details
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- Definition Amount of liabilities assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=39739317&loc=d3e4845-128472 + Details
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- Definition Amount of liabilities due after one year or the normal operating cycle, if longer, assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=39739317&loc=d3e4845-128472 + Details
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- Definition Fair value of financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=36462937&loc=d3e19207-110258 + Details
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