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Other Current Liabilities (Tables) | 9 Months Ended
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Sep. 27, 2014
Other Liabilities Disclosure [Abstract] |
Summary of other current liabilities | Other current liabilities consist of the following as of the following dates (in thousands):
| September 27, 2014 |  | December 28, 2013
Accrued warranty | $ | 2,990 |  |  | $ | 3,426 |
Accrued professional services | 726 |  |  | 545 |
Customer deposits | 3 |  |  | 867 |
Fair value of contingent payments to Zygo Corporation related to acquisition - current portion | 930 |  |  | 1,344 |
Other | 3,185 |  |  | 1,811 |
Total other current liabilities | $ | 7,834 |  |  | $ | 7,993 |

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