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Stockholders' Equity and Stock-Based Compensation - Option Plans (Details) | Dec. 27, 2014 | May 24, 2013
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2005 Equity Incentive Plan [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares Authorized | 7,292,594 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized / us-gaap_PlanNameAxis = nano_TwoThousandFiveEquityIncentivePlanMember | 2,600,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized / us-gaap_PlanNameAxis = nano_TwoThousandFiveEquityIncentivePlanMember
2002 Non-statutory Stock Option Plan [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares Authorized | 1,200,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized / us-gaap_PlanNameAxis = nano_TwoThousandTwoNonStatutoryStockOptionPlanMember |
2000 Employee Stock Option Plan [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares Authorized | 2,450,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized / us-gaap_PlanNameAxis = nano_TwoThousandEmployeeStockOptionPlanMember |
2000 Director Stock Option Plan [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares Authorized | 250,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized / us-gaap_PlanNameAxis = nano_TwoThousandDirectorStockOptionPlanMember |
Accent Optical Technologies, Inc. Stock Incentive Plan [Member] |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |
Shares Authorized | 205,003 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized / us-gaap_PlanNameAxis = nano_AccentOpticalTechnologiesIncStockIncentivePlanMember |

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- Definition The maximum number of shares (or other type of equity) originally approved (usually by shareholders and board of directors), net of any subsequent amendments and adjustments, for awards under the equity-based compensation plan. As stock or unit options and equity instruments other than options are awarded to participants, the shares or units remain authorized and become reserved for issuance under outstanding awards (not necessarily vested). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(3) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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