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Stockholders' Equity and Stock-Based Compensation - Stock-based Compensation Expense (Details) (USD $) In Thousands, unless otherwise specified | 12 Months Ended
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Dec. 27, 2014 | Dec. 28, 2013 | Dec. 29, 2012
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] |  |  |
Total stock-based compensation expense related to employee stock options and employee stock purchases | $ 6,752 us-gaap_AllocatedShareBasedCompensationExpense | $ 7,674 us-gaap_AllocatedShareBasedCompensationExpense | $ 5,890 us-gaap_AllocatedShareBasedCompensationExpense
Cost of products [Member] |  |  |
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] |  |  |
Total stock-based compensation expense related to employee stock options and employee stock purchases | 268 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = nano_CostOfProductsMember | 207 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = nano_CostOfProductsMember | 164 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = nano_CostOfProductsMember
Cost of service [Member] |  |  |
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] |  |  |
Total stock-based compensation expense related to employee stock options and employee stock purchases | 287 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = nano_CostOfServiceMember | 278 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = nano_CostOfServiceMember | 230 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = nano_CostOfServiceMember
Research and development [Member] |  |  |
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] |  |  |
Total stock-based compensation expense related to employee stock options and employee stock purchases | 1,245 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_ResearchAndDevelopmentExpenseMember | 1,478 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_ResearchAndDevelopmentExpenseMember | 1,220 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_ResearchAndDevelopmentExpenseMember
Selling [Member] |  |  |
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] |  |  |
Total stock-based compensation expense related to employee stock options and employee stock purchases | 1,642 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_SellingAndMarketingExpenseMember | 1,894 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_SellingAndMarketingExpenseMember | 1,791 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_SellingAndMarketingExpenseMember
General and administrative [Member] |  |  |
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] |  |  |
Total stock-based compensation expense related to employee stock options and employee stock purchases | 3,243 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_GeneralAndAdministrativeExpenseMember | 2,919 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_GeneralAndAdministrativeExpenseMember | 2,485 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_GeneralAndAdministrativeExpenseMember
Restructuring [Member] |  |  |
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items] |  |  |
Total stock-based compensation expense related to employee stock options and employee stock purchases | $ 67 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_RestructuringChargesMember | $ 898 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_RestructuringChargesMember | $ 0 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_IncomeStatementLocationAxis = us-gaap_RestructuringChargesMember

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- Definition Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5047-113901 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SAB TOPIC 14.F) -URI http://asc.fasb.org/extlink&oid=27013229&loc=d3e301413-122809 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1)(i) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Staff Accounting Bulletin (SAB) -Number Topic 14 -Section F + Details
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