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v2.4.1.9

Commitments and Contingencies - Textual (Details) (USD $) | 0 Months Ended | 12 Months Ended
--- | --- | ---
Jan. 13, 2012 | Dec. 27, 2014 | Dec. 28, 2013 | Dec. 29, 2012 | Dec. 31, 2011
Long-term Purchase Commitment [Line Items] |  |  |  |  |
Liabilities recorded for obligations |  | $ 0 nano_IntellectualPropertyIndemnificationObligations | $ 0 nano_IntellectualPropertyIndemnificationObligations |  |
One time payment to KLA | 2,500,000 us-gaap_PaymentsForLegalSettlements |  |  |  |
Legal settlement in operating expense |  |  |  |  | 2,500,000 us-gaap_LitigationSettlementExpense
Rent expense |  | 2,100,000 us-gaap_LeaseAndRentalExpense | 2,000,000 us-gaap_LeaseAndRentalExpense | 2,200,000 us-gaap_LeaseAndRentalExpense |
Inventories [Member] |  |  |  |  |
Long-term Purchase Commitment [Line Items] |  |  |  |  |
Purchase commitment |  | 29,500,000 us-gaap_LongTermPurchaseCommitmentAmount / us-gaap_LongTermPurchaseCommitmentByCategoryOfItemPurchasedAxis = us-gaap_InventoriesMember |  |  |
Inventories [Member] | Zygo Corporation [Member] |  |  |  |  |
Long-term Purchase Commitment [Line Items] |  |  |  |  |
Purchase commitment, estimated future amount |  | 2,900,000 nano_LongTermPurchaseCommitmentEstimatedFutureAmount / us-gaap_BusinessAcquisitionAxis = nano_ZygoCorporationMember / us-gaap_LongTermPurchaseCommitmentByCategoryOfItemPurchasedAxis = us-gaap_InventoriesMember |  |  |
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member] |  |  |  |  |
Long-term Purchase Commitment [Line Items] |  |  |  |  |
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value |  | $ 2,400,000 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities / us-gaap_BusinessAcquisitionAxis = nano_ZygoCorporationMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | $ 2,800,000 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities / us-gaap_BusinessAcquisitionAxis = nano_ZygoCorporationMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |  |

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- Definition Intellectual property indemnification obligations. + References No definition available. + Details
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Balance Type: | credit
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- Definition Long Term Purchase Commitment, Estimated Future Amount + References No definition available. + Details
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Namespace Prefix: | nano_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- Definition Amount of liabilities assumed at the acquisition date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=39739317&loc=d3e4845-128472 + Details
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- Definition Amount of rent expense incurred for leased assets, including but not limited to, furniture and equipment, that is not directly or indirectly associated with the manufacture, sale or creation of a product or product line. + References No definition available. + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
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- Definition Amount of litigation expense, including but not limited to legal, forensic, accounting, and investigative fees. + References No definition available. + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition The minimum amount the entity agreed to spend under the long-term purchase commitment. + References No definition available. + Details
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- Details
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- Definition The amount of cash paid for the settlement of litigation or for other legal issues during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 25 -Subparagraph (g) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3536-108585 + Details
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- Details
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- Details
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